JPH0452514Y2 - - Google Patents
Info
- Publication number
- JPH0452514Y2 JPH0452514Y2 JP1988160567U JP16056788U JPH0452514Y2 JP H0452514 Y2 JPH0452514 Y2 JP H0452514Y2 JP 1988160567 U JP1988160567 U JP 1988160567U JP 16056788 U JP16056788 U JP 16056788U JP H0452514 Y2 JPH0452514 Y2 JP H0452514Y2
- Authority
- JP
- Japan
- Prior art keywords
- pulley
- wire
- slide
- slide pulley
- screw groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000007246 mechanism Effects 0.000 claims description 9
- 238000010586 diagram Methods 0.000 description 4
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 238000004804 winding Methods 0.000 description 3
- 230000002238 attenuated effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Transmission Devices (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988160567U JPH0452514Y2 (US20020128544A1-20020912-P00008.png) | 1988-12-09 | 1988-12-09 | |
US07/431,171 US5022619A (en) | 1988-12-09 | 1989-10-26 | Positioning device of table for semiconductor wafers |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988160567U JPH0452514Y2 (US20020128544A1-20020912-P00008.png) | 1988-12-09 | 1988-12-09 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0280245U JPH0280245U (US20020128544A1-20020912-P00008.png) | 1990-06-20 |
JPH0452514Y2 true JPH0452514Y2 (US20020128544A1-20020912-P00008.png) | 1992-12-10 |
Family
ID=31442743
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988160567U Expired JPH0452514Y2 (US20020128544A1-20020912-P00008.png) | 1988-12-09 | 1988-12-09 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0452514Y2 (US20020128544A1-20020912-P00008.png) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6347947U (US20020128544A1-20020912-P00008.png) * | 1986-09-17 | 1988-03-31 |
-
1988
- 1988-12-09 JP JP1988160567U patent/JPH0452514Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6347947U (US20020128544A1-20020912-P00008.png) * | 1986-09-17 | 1988-03-31 |
Also Published As
Publication number | Publication date |
---|---|
JPH0280245U (US20020128544A1-20020912-P00008.png) | 1990-06-20 |
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