JPH0452196Y2 - - Google Patents
Info
- Publication number
- JPH0452196Y2 JPH0452196Y2 JP1986125397U JP12539786U JPH0452196Y2 JP H0452196 Y2 JPH0452196 Y2 JP H0452196Y2 JP 1986125397 U JP1986125397 U JP 1986125397U JP 12539786 U JP12539786 U JP 12539786U JP H0452196 Y2 JPH0452196 Y2 JP H0452196Y2
- Authority
- JP
- Japan
- Prior art keywords
- green sheet
- hard
- head
- suction
- head body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011148 porous material Substances 0.000 claims description 15
- 238000001179 sorption measurement Methods 0.000 description 6
- 239000000919 ceramic Substances 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986125397U JPH0452196Y2 (de) | 1986-08-15 | 1986-08-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986125397U JPH0452196Y2 (de) | 1986-08-15 | 1986-08-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6332849U JPS6332849U (de) | 1988-03-03 |
| JPH0452196Y2 true JPH0452196Y2 (de) | 1992-12-08 |
Family
ID=31018266
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986125397U Expired JPH0452196Y2 (de) | 1986-08-15 | 1986-08-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0452196Y2 (de) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI439351B (zh) * | 2008-09-29 | 2014-06-01 | Nitto Denko Corp | Adsorption tablets |
| JP6563277B2 (ja) * | 2015-08-26 | 2019-08-21 | 株式会社カテックス | 吸着装置及び搬送方法 |
| US20190084778A1 (en) * | 2016-03-08 | 2019-03-21 | Nano Tem Co., Ltd. | Conveying pad, conveying apparatus using the conveying pad, and conveying method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5313045A (en) * | 1976-07-22 | 1978-02-06 | Ishikawajima Harima Heavy Ind Co Ltd | Air bearing and vacuum adsorption device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51101474U (de) * | 1975-02-10 | 1976-08-14 |
-
1986
- 1986-08-15 JP JP1986125397U patent/JPH0452196Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5313045A (en) * | 1976-07-22 | 1978-02-06 | Ishikawajima Harima Heavy Ind Co Ltd | Air bearing and vacuum adsorption device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6332849U (de) | 1988-03-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6010811B2 (ja) | 吸着盤 | |
| JPH0452196Y2 (de) | ||
| JP4181809B2 (ja) | 焼成用セッター | |
| CN205892135U (zh) | 一种面板搬运装置 | |
| JP4254749B2 (ja) | 被運搬体吸着保持用当接体及び吸着保持装置 | |
| JP2585298Y2 (ja) | チップボンディング装置におけるワーク吸着部 | |
| JPS61136838A (ja) | 積層した板材の分離機構 | |
| JP2019518340A (ja) | Ｍｌｃｃ積層用上部金型 | |
| JPH1142583A (ja) | 多孔板吸着装置 | |
| JPH0338191Y2 (de) | ||
| CN212859225U (zh) | 一种陶瓷面板真空吸腔 | |
| JPH0214237Y2 (de) | ||
| JPS61155135A (ja) | 板状体の移載方法 | |
| JPH0516088A (ja) | 吸着保持具 | |
| TW593966B (en) | Device of stacking and bonding cross channel structural body and method thereof | |
| JPH0738305Y2 (ja) | 真空吸着プレート | |
| JP2583355B2 (ja) | 半導体製造装置のリードフレーム供給方法 | |
| JPS63126347U (de) | ||
| JPS629066Y2 (de) | ||
| JPS6341049U (de) | ||
| JPH058280Y2 (de) | ||
| JPS6238776Y2 (de) | ||
| JPH0434015Y2 (de) | ||
| JPH04176580A (ja) | 搬送装置 | |
| JPH04113936U (ja) | セラミツクグリーンシート印刷装置 |