JPS6332849U - - Google Patents
Info
- Publication number
- JPS6332849U JPS6332849U JP12539786U JP12539786U JPS6332849U JP S6332849 U JPS6332849 U JP S6332849U JP 12539786 U JP12539786 U JP 12539786U JP 12539786 U JP12539786 U JP 12539786U JP S6332849 U JPS6332849 U JP S6332849U
- Authority
- JP
- Japan
- Prior art keywords
- suction port
- air suction
- laminated structure
- registration request
- green sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011148 porous material Substances 0.000 claims 2
- 238000001179 sorption measurement Methods 0.000 claims 1
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986125397U JPH0452196Y2 (de) | 1986-08-15 | 1986-08-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986125397U JPH0452196Y2 (de) | 1986-08-15 | 1986-08-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6332849U true JPS6332849U (de) | 1988-03-03 |
| JPH0452196Y2 JPH0452196Y2 (de) | 1992-12-08 |
Family
ID=31018266
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986125397U Expired JPH0452196Y2 (de) | 1986-08-15 | 1986-08-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0452196Y2 (de) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010035786A1 (ja) * | 2008-09-29 | 2010-04-01 | 日東電工株式会社 | 吸着用シート |
| JP2017043451A (ja) * | 2015-08-26 | 2017-03-02 | 株式会社カテックス | 吸着装置及び搬送方法 |
| WO2017154085A1 (ja) * | 2016-03-08 | 2017-09-14 | 株式会社ナノテム | 搬送用パッドおよびそれを用いる搬送装置、搬送方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51101474U (de) * | 1975-02-10 | 1976-08-14 | ||
| JPS5313045A (en) * | 1976-07-22 | 1978-02-06 | Ishikawajima Harima Heavy Ind Co Ltd | Air bearing and vacuum adsorption device |
-
1986
- 1986-08-15 JP JP1986125397U patent/JPH0452196Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51101474U (de) * | 1975-02-10 | 1976-08-14 | ||
| JPS5313045A (en) * | 1976-07-22 | 1978-02-06 | Ishikawajima Harima Heavy Ind Co Ltd | Air bearing and vacuum adsorption device |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010035786A1 (ja) * | 2008-09-29 | 2010-04-01 | 日東電工株式会社 | 吸着用シート |
| JP2010099826A (ja) * | 2008-09-29 | 2010-05-06 | Nitto Denko Corp | 吸着用シート |
| CN102164719A (zh) * | 2008-09-29 | 2011-08-24 | 日东电工株式会社 | 吸附片 |
| JP2017043451A (ja) * | 2015-08-26 | 2017-03-02 | 株式会社カテックス | 吸着装置及び搬送方法 |
| WO2017154085A1 (ja) * | 2016-03-08 | 2017-09-14 | 株式会社ナノテム | 搬送用パッドおよびそれを用いる搬送装置、搬送方法 |
| JPWO2017154085A1 (ja) * | 2016-03-08 | 2018-11-22 | 株式会社ナノテム | 搬送用パッドおよびそれを用いる搬送装置、搬送方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0452196Y2 (de) | 1992-12-08 |