JPS6332849U - - Google Patents
Info
- Publication number
- JPS6332849U JPS6332849U JP12539786U JP12539786U JPS6332849U JP S6332849 U JPS6332849 U JP S6332849U JP 12539786 U JP12539786 U JP 12539786U JP 12539786 U JP12539786 U JP 12539786U JP S6332849 U JPS6332849 U JP S6332849U
- Authority
- JP
- Japan
- Prior art keywords
- suction port
- air suction
- laminated structure
- registration request
- green sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011148 porous material Substances 0.000 claims 2
- 238000001179 sorption measurement Methods 0.000 claims 1
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Description
第１図は本考案の実施例を示す一部切欠正面図
である。
１：ヘツド本体、３：空気吸引口、６，７，８
：硬質多孔板。
FIG. 1 is a partially cutaway front view showing an embodiment of the present invention. 1: Head body, 3: Air suction port, 6, 7, 8
: Hard perforated plate.
Claims (1)
た中空のヘツド本体１の下面に、気孔径の異なる
複数枚の硬質多孔板６，７，８を気孔径の小さい
ものを下側として順次積層したことを特徴とする
グリーンシート吸着用ヘツド。 A plurality of hard perforated plates 6, 7, 8 with different pore diameters are placed in order on the lower surface of the hollow head body 1, which has an air suction port 3 connected to a vacuum source at the top, with the one with the smaller pore diameter on the bottom. A green sheet adsorption head characterized by its laminated structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986125397U JPH0452196Y2 (en) | 1986-08-15 | 1986-08-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986125397U JPH0452196Y2 (en) | 1986-08-15 | 1986-08-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6332849U true JPS6332849U (en) | 1988-03-03 |
| JPH0452196Y2 JPH0452196Y2 (en) | 1992-12-08 |
Family
ID=31018266
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986125397U Expired JPH0452196Y2 (en) | 1986-08-15 | 1986-08-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0452196Y2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010035786A1 (en) * | 2008-09-29 | 2010-04-01 | 日東電工株式会社 | Suction sheet |
| JP2017043451A (en) * | 2015-08-26 | 2017-03-02 | 株式会社カテックス | Adsorber and conveyance method |
| WO2017154085A1 (en) * | 2016-03-08 | 2017-09-14 | 株式会社ナノテム | Conveyance pad, and conveyance device and conveyance method using same |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51101474U (en) * | 1975-02-10 | 1976-08-14 | ||
| JPS5313045A (en) * | 1976-07-22 | 1978-02-06 | Ishikawajima Harima Heavy Ind Co Ltd | Air bearing and vacuum adsorption device |
-
1986
- 1986-08-15 JP JP1986125397U patent/JPH0452196Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51101474U (en) * | 1975-02-10 | 1976-08-14 | ||
| JPS5313045A (en) * | 1976-07-22 | 1978-02-06 | Ishikawajima Harima Heavy Ind Co Ltd | Air bearing and vacuum adsorption device |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010035786A1 (en) * | 2008-09-29 | 2010-04-01 | 日東電工株式会社 | Suction sheet |
| JP2010099826A (en) * | 2008-09-29 | 2010-05-06 | Nitto Denko Corp | Suction sheet |
| CN102164719A (en) * | 2008-09-29 | 2011-08-24 | 日东电工株式会社 | Suction sheet |
| JP2017043451A (en) * | 2015-08-26 | 2017-03-02 | 株式会社カテックス | Adsorber and conveyance method |
| WO2017154085A1 (en) * | 2016-03-08 | 2017-09-14 | 株式会社ナノテム | Conveyance pad, and conveyance device and conveyance method using same |
| JPWO2017154085A1 (en) * | 2016-03-08 | 2018-11-22 | 株式会社ナノテム | Transport pad, transport device using the same, and transport method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0452196Y2 (en) | 1992-12-08 |