JPS6384952U - - Google Patents
Info
- Publication number
- JPS6384952U JPS6384952U JP17928086U JP17928086U JPS6384952U JP S6384952 U JPS6384952 U JP S6384952U JP 17928086 U JP17928086 U JP 17928086U JP 17928086 U JP17928086 U JP 17928086U JP S6384952 U JPS6384952 U JP S6384952U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- support column
- suctioned
- receiving frame
- supports
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000001179 sorption measurement Methods 0.000 description 1
Description
第１図は、本考案に係るウエハ吸着装置の一部
切欠側面図、第２図は、第１図のウエハを除去し
た時の上面図である。
２……吸着面、３……受枠、５……支持柱、７
……ウエハ。
FIG. 1 is a partially cutaway side view of a wafer suction device according to the present invention, and FIG. 2 is a top view when the wafer in FIG. 1 is removed. 2... Adsorption surface, 3... Receiving frame, 5... Support column, 7
...Wafer.
Claims (1)
持する支持柱とからなる吸着面で、ウエハを吸着
するようにしたことを特徴とするウエハ吸着装置
。 A wafer suction device characterized in that a wafer is suctioned by a suction surface consisting of a receiving frame that receives the outer peripheral edge of the wafer and a support column that supports the middle of the wafer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17928086U JPS6384952U (en) | 1986-11-20 | 1986-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17928086U JPS6384952U (en) | 1986-11-20 | 1986-11-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6384952U true JPS6384952U (en) | 1988-06-03 |
Family
ID=31122205
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17928086U Pending JPS6384952U (en) | 1986-11-20 | 1986-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6384952U (en) |
-
1986
- 1986-11-20 JP JP17928086U patent/JPS6384952U/ja active Pending