JPS62153091U - - Google Patents

Info

Publication number
JPS62153091U
JPS62153091U JP4009986U JP4009986U JPS62153091U JP S62153091 U JPS62153091 U JP S62153091U JP 4009986 U JP4009986 U JP 4009986U JP 4009986 U JP4009986 U JP 4009986U JP S62153091 U JPS62153091 U JP S62153091U
Authority
JP
Japan
Prior art keywords
sponge
suction device
attached
suction
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4009986U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4009986U priority Critical patent/JPS62153091U/ja
Publication of JPS62153091U publication Critical patent/JPS62153091U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の一実施例を示す図、第２図は
同じく動作の説明に供する図である。 １……箱体、２……枠体、３……通気板、４…
…スポンジ、９……搬送ロボツト、１０……ワー
ク、１１……薄板状のパレツト。 FIG. 1 is a diagram showing an embodiment of the present invention, and FIG. 2 is a diagram also used to explain the operation. 1... Box body, 2... Frame body, 3... Ventilation plate, 4...
...Sponge, 9...Transfer robot, 10...Workpiece, 11...Thin plate-shaped pallet.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 箱体の上部に吸引装置を設け、下側にスポンジ
の側部を包囲して取り付け、中間層に上記スポン
ジと吸引装置とを分離するための通気板を取り付
け、上記吸引装置の吸引力により上記スポンジの
気孔部に吸着作用を生じさせ、上記スポンジの下
面全体でワークを吸着するようにしたことを特徴
とする空気吸着装置。 A suction device is provided at the top of the box body, and attached to the bottom side to surround the sides of the sponge, and a ventilation plate is attached to the middle layer to separate the sponge and the suction device, and the suction force of the suction device is used to An air adsorption device characterized in that an adsorption action is produced in the pores of a sponge so that a workpiece is adsorbed on the entire lower surface of the sponge.
JP4009986U 1986-03-19 1986-03-19 Pending JPS62153091U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4009986U JPS62153091U (en) 1986-03-19 1986-03-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4009986U JPS62153091U (en) 1986-03-19 1986-03-19

Publications (1)

Publication Number Publication Date
JPS62153091U true JPS62153091U (en) 1987-09-28

Family

ID=30853878

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4009986U Pending JPS62153091U (en) 1986-03-19 1986-03-19

Country Status (1)

Country Link
JP (1) JPS62153091U (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0360984A (en) * 1989-07-26 1991-03-15 Matsushita Electric Works Ltd Adsorption moving device
JPH07314370A (en) * 1994-05-25 1995-12-05 Ckd Corp Vacuum chuck, and sucking method of subject of suction in vacuum chuck
JP2008251653A (en) * 2007-03-29 2008-10-16 Sharp Corp Low-load conveyer
JP2009113159A (en) * 2007-11-07 2009-05-28 Seiko Instruments Inc Chuck, and method for manufacturing timepiece
JP2011181936A (en) * 2011-03-28 2011-09-15 Renesas Electronics Corp Method for manufacturing semiconductor device
US8877613B2 (en) 2002-07-22 2014-11-04 Renesas Electronics Corporation Method of manufacturing a semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4316175Y1 (en) * 1965-07-21 1968-07-05

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4316175Y1 (en) * 1965-07-21 1968-07-05

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0360984A (en) * 1989-07-26 1991-03-15 Matsushita Electric Works Ltd Adsorption moving device
JPH07314370A (en) * 1994-05-25 1995-12-05 Ckd Corp Vacuum chuck, and sucking method of subject of suction in vacuum chuck
US8877613B2 (en) 2002-07-22 2014-11-04 Renesas Electronics Corporation Method of manufacturing a semiconductor device
US9805980B2 (en) 2002-07-22 2017-10-31 Renesas Electronics Corporation Method of manufacturing a semiconductor device
JP2008251653A (en) * 2007-03-29 2008-10-16 Sharp Corp Low-load conveyer
JP2009113159A (en) * 2007-11-07 2009-05-28 Seiko Instruments Inc Chuck, and method for manufacturing timepiece
JP2011181936A (en) * 2011-03-28 2011-09-15 Renesas Electronics Corp Method for manufacturing semiconductor device

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