JPS6384952U - - Google Patents
Info
- Publication number
- JPS6384952U JPS6384952U JP17928086U JP17928086U JPS6384952U JP S6384952 U JPS6384952 U JP S6384952U JP 17928086 U JP17928086 U JP 17928086U JP 17928086 U JP17928086 U JP 17928086U JP S6384952 U JPS6384952 U JP S6384952U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- support column
- suctioned
- receiving frame
- supports
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000001179 sorption measurement Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17928086U JPS6384952U (de) | 1986-11-20 | 1986-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17928086U JPS6384952U (de) | 1986-11-20 | 1986-11-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6384952U true JPS6384952U (de) | 1988-06-03 |
Family
ID=31122205
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17928086U Pending JPS6384952U (de) | 1986-11-20 | 1986-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6384952U (de) |
-
1986
- 1986-11-20 JP JP17928086U patent/JPS6384952U/ja active Pending