JPH0450751B2 - - Google Patents

Info

Publication number
JPH0450751B2
JPH0450751B2 JP57112970A JP11297082A JPH0450751B2 JP H0450751 B2 JPH0450751 B2 JP H0450751B2 JP 57112970 A JP57112970 A JP 57112970A JP 11297082 A JP11297082 A JP 11297082A JP H0450751 B2 JPH0450751 B2 JP H0450751B2
Authority
JP
Japan
Prior art keywords
substrate
film
insulating film
conductive film
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57112970A
Other languages
English (en)
Japanese (ja)
Other versions
JPS594070A (ja
Inventor
Sunao Shibata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP57112970A priority Critical patent/JPS594070A/ja
Priority to DE8383303603T priority patent/DE3380582D1/de
Priority to EP83303603A priority patent/EP0102696B1/de
Priority to US06/506,593 priority patent/US4543597A/en
Publication of JPS594070A publication Critical patent/JPS594070A/ja
Publication of JPH0450751B2 publication Critical patent/JPH0450751B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
JP57112970A 1982-06-30 1982-06-30 半導体記憶装置及びその製造方法 Granted JPS594070A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP57112970A JPS594070A (ja) 1982-06-30 1982-06-30 半導体記憶装置及びその製造方法
DE8383303603T DE3380582D1 (en) 1982-06-30 1983-06-22 Dynamic semiconductor memory and manufacturing method thereof
EP83303603A EP0102696B1 (de) 1982-06-30 1983-06-22 Dynamische Halbleiterspeicher und Verfahren zu seiner Herstellung
US06/506,593 US4543597A (en) 1982-06-30 1983-06-22 Dynamic semiconductor memory and manufacturing method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57112970A JPS594070A (ja) 1982-06-30 1982-06-30 半導体記憶装置及びその製造方法

Publications (2)

Publication Number Publication Date
JPS594070A JPS594070A (ja) 1984-01-10
JPH0450751B2 true JPH0450751B2 (de) 1992-08-17

Family

ID=14600108

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57112970A Granted JPS594070A (ja) 1982-06-30 1982-06-30 半導体記憶装置及びその製造方法

Country Status (1)

Country Link
JP (1) JPS594070A (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5994454A (ja) * 1982-11-19 1984-05-31 Nec Kyushu Ltd 半導体装置とその製造方法
JPS61231753A (ja) * 1985-04-08 1986-10-16 Nec Corp Ｍｉｓ型ダイナミツクランダムアクセスメモリ装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56107390A (en) * 1980-01-29 1981-08-26 Nec Corp Semiconductor memory device
JPS5775463A (en) * 1980-10-28 1982-05-12 Nec Corp Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS594070A (ja) 1984-01-10

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