JPH0450528B2 - - Google Patents

Info

Publication number
JPH0450528B2
JPH0450528B2 JP5393283A JP5393283A JPH0450528B2 JP H0450528 B2 JPH0450528 B2 JP H0450528B2 JP 5393283 A JP5393283 A JP 5393283A JP 5393283 A JP5393283 A JP 5393283A JP H0450528 B2 JPH0450528 B2 JP H0450528B2
Authority
JP
Japan
Prior art keywords
flaw
circuit
output
signal
representative
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5393283A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59180346A (ja
Inventor
Chiaki Fukazawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP5393283A priority Critical patent/JPS59180346A/ja
Publication of JPS59180346A publication Critical patent/JPS59180346A/ja
Publication of JPH0450528B2 publication Critical patent/JPH0450528B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP5393283A 1983-03-31 1983-03-31 表面検査装置 Granted JPS59180346A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5393283A JPS59180346A (ja) 1983-03-31 1983-03-31 表面検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5393283A JPS59180346A (ja) 1983-03-31 1983-03-31 表面検査装置

Publications (2)

Publication Number Publication Date
JPS59180346A JPS59180346A (ja) 1984-10-13
JPH0450528B2 true JPH0450528B2 (enrdf_load_stackoverflow) 1992-08-14

Family

ID=12956505

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5393283A Granted JPS59180346A (ja) 1983-03-31 1983-03-31 表面検査装置

Country Status (1)

Country Link
JP (1) JPS59180346A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0623646B2 (ja) * 1986-03-10 1994-03-30 工業技術院長 撮像式塗装下地処理面グレ−ド判定装置

Also Published As

Publication number Publication date
JPS59180346A (ja) 1984-10-13

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