JPH0450361B2 - - Google Patents

Info

Publication number
JPH0450361B2
JPH0450361B2 JP59202042A JP20204284A JPH0450361B2 JP H0450361 B2 JPH0450361 B2 JP H0450361B2 JP 59202042 A JP59202042 A JP 59202042A JP 20204284 A JP20204284 A JP 20204284A JP H0450361 B2 JPH0450361 B2 JP H0450361B2
Authority
JP
Japan
Prior art keywords
laser beam
vibrating mirror
laser processing
workpiece
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59202042A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6179715A (ja
Inventor
Yoshihide Kanehara
Hajime Osanai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP59202042A priority Critical patent/JPS6179715A/ja
Publication of JPS6179715A publication Critical patent/JPS6179715A/ja
Publication of JPH0450361B2 publication Critical patent/JPH0450361B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Laser Beam Processing (AREA)
JP59202042A 1984-09-28 1984-09-28 レ−ザ加工装置 Granted JPS6179715A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59202042A JPS6179715A (ja) 1984-09-28 1984-09-28 レ−ザ加工装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59202042A JPS6179715A (ja) 1984-09-28 1984-09-28 レ−ザ加工装置

Publications (2)

Publication Number Publication Date
JPS6179715A JPS6179715A (ja) 1986-04-23
JPH0450361B2 true JPH0450361B2 (enrdf_load_stackoverflow) 1992-08-14

Family

ID=16450962

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59202042A Granted JPS6179715A (ja) 1984-09-28 1984-09-28 レ−ザ加工装置

Country Status (1)

Country Link
JP (1) JPS6179715A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63115688A (ja) * 1986-10-31 1988-05-20 Kawasaki Steel Corp レ−ザ−加工装置
JPH0463223A (ja) * 1990-06-30 1992-02-28 Okuma Mach Works Ltd レーザービームのスキャニング方法
JP2007167741A (ja) * 2005-12-20 2007-07-05 Seiko Epson Corp 液滴吐出装置
CN103215411B (zh) 2013-02-06 2015-07-08 武汉新瑞达激光工程有限责任公司 一种激光淬火方法及装置

Also Published As

Publication number Publication date
JPS6179715A (ja) 1986-04-23

Similar Documents

Publication Publication Date Title
JPH0639572A (ja) ウェハ割断装置
KR950021919A (ko) 레이저 빔 진동 장치 및 그것을 구비한 레이저 가공 장치
JPH10291084A (ja) 脆性材料のレーザ加工方法及び装置
JPH0450361B2 (enrdf_load_stackoverflow)
JPH0693402B2 (ja) レ−ザ・トリミング方法及び同トリミング装置
JP2798223B2 (ja) レーザ切断方法
JP2000107876A (ja) レーザ溶接方法及びレーザ溶接装置
JP2000028955A (ja) レーザ加工方法、レーザ加工装置およびその方法を実行させるためのプログラムを記録したコンピュータ読み取り可能な記録媒体
JPS6119083B2 (enrdf_load_stackoverflow)
JP2919037B2 (ja) レーザパターン形成装置
JPH08103878A (ja) 部品の表面を加工するためレーザービームの強度分布を調整する方法
JPH0140893B2 (enrdf_load_stackoverflow)
JPH0134718B2 (enrdf_load_stackoverflow)
JPS60177983A (ja) スポット溶接法
JP3180412B2 (ja) 回転体のレーザ加工装置及びレーザ加工方法
JPS6139377B2 (enrdf_load_stackoverflow)
JPS57181787A (en) Laser working method
JP2650979B2 (ja) レーザ加工機用数値制御装置
JP2716272B2 (ja) レーザ加工装置
JPS5913589A (ja) レ−ザ加工装置
JPH10137960A (ja) レーザ穴開け加工装置
JPH0691757A (ja) 超音波溶着装置
JP2741781B2 (ja) レーザ加工装置
SU929332A1 (ru) Способ механической обработки
JPS59129485A (ja) レ−ザ発振装置