JPH0449721B2 - - Google Patents

Info

Publication number
JPH0449721B2
JPH0449721B2 JP59056467A JP5646784A JPH0449721B2 JP H0449721 B2 JPH0449721 B2 JP H0449721B2 JP 59056467 A JP59056467 A JP 59056467A JP 5646784 A JP5646784 A JP 5646784A JP H0449721 B2 JPH0449721 B2 JP H0449721B2
Authority
JP
Japan
Prior art keywords
dielectric
compound
thin film
temperature
precursor solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59056467A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60200403A (ja
Inventor
Hitoo Yoshihara
Ichiro Kikuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Soda Co Ltd
Original Assignee
Nippon Soda Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Soda Co Ltd filed Critical Nippon Soda Co Ltd
Priority to JP59056467A priority Critical patent/JPS60200403A/ja
Publication of JPS60200403A publication Critical patent/JPS60200403A/ja
Publication of JPH0449721B2 publication Critical patent/JPH0449721B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compositions Of Oxide Ceramics (AREA)
  • Ceramic Capacitors (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Inorganic Insulating Materials (AREA)
JP59056467A 1984-03-24 1984-03-24 薄膜誘電体の製造方法 Granted JPS60200403A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59056467A JPS60200403A (ja) 1984-03-24 1984-03-24 薄膜誘電体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59056467A JPS60200403A (ja) 1984-03-24 1984-03-24 薄膜誘電体の製造方法

Publications (2)

Publication Number Publication Date
JPS60200403A JPS60200403A (ja) 1985-10-09
JPH0449721B2 true JPH0449721B2 (en:Method) 1992-08-12

Family

ID=13027906

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59056467A Granted JPS60200403A (ja) 1984-03-24 1984-03-24 薄膜誘電体の製造方法

Country Status (1)

Country Link
JP (1) JPS60200403A (en:Method)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60236404A (ja) * 1984-05-10 1985-11-25 日本曹達株式会社 薄膜強誘電体の製造方法
KR100333669B1 (ko) * 1999-06-28 2002-04-24 박종섭 레드니오비움지르코니움타이타니트 용액 형성 방법 및 그를 이용한 강유전체 캐패시터 제조 방법
JP4407103B2 (ja) * 2002-08-12 2010-02-03 三菱マテリアル株式会社 耐疲労特性に優れた強誘電体薄膜とその形成用組成物
JP6102358B2 (ja) * 2013-03-08 2017-03-29 三菱マテリアル株式会社 誘電体薄膜形成用組成物

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS549320A (en) * 1977-06-23 1979-01-24 Nippon Denso Co Ltd Apparatus for supplying secondary air
JPS5623948A (en) * 1979-08-06 1981-03-06 Tsuzuki Junichi Electromagnetic sound walk inducing apparatus for blind person
JPS59220913A (ja) * 1983-05-31 1984-12-12 日本曹達株式会社 チタンジルコン酸鉛誘電体薄膜の製造方法

Also Published As

Publication number Publication date
JPS60200403A (ja) 1985-10-09

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