JPH0448597B2 - - Google Patents

Info

Publication number
JPH0448597B2
JPH0448597B2 JP58141030A JP14103083A JPH0448597B2 JP H0448597 B2 JPH0448597 B2 JP H0448597B2 JP 58141030 A JP58141030 A JP 58141030A JP 14103083 A JP14103083 A JP 14103083A JP H0448597 B2 JPH0448597 B2 JP H0448597B2
Authority
JP
Japan
Prior art keywords
pressure
signal
circuit
sensor
signals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58141030A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6034295A (ja
Inventor
Juji Hosoda
Kazuo Pponma
Masakatsu Fuje
Taro Iwamoto
Koji Kameshima
Yoshuki Nakano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58141030A priority Critical patent/JPS6034295A/ja
Priority to CA000459994A priority patent/CA1247717A/en
Priority to US06/636,296 priority patent/US4709342A/en
Priority to EP84109188A priority patent/EP0133997B1/en
Priority to DE8484109188T priority patent/DE3484082D1/de
Publication of JPS6034295A publication Critical patent/JPS6034295A/ja
Publication of JPH0448597B2 publication Critical patent/JPH0448597B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/167—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using piezoelectric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/22—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers
    • G01L5/226—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers to manipulators, e.g. the force due to gripping
    • G01L5/228—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers to manipulators, e.g. the force due to gripping using tactile array force sensors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Manipulator (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
JP58141030A 1983-08-03 1983-08-03 皮膚感覚センサ Granted JPS6034295A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP58141030A JPS6034295A (ja) 1983-08-03 1983-08-03 皮膚感覚センサ
CA000459994A CA1247717A (en) 1983-08-03 1984-07-30 Tactile sensing means
US06/636,296 US4709342A (en) 1983-08-03 1984-07-31 Tactile sensing apparatus
EP84109188A EP0133997B1 (en) 1983-08-03 1984-08-02 Tactile sensing means
DE8484109188T DE3484082D1 (de) 1983-08-03 1984-08-02 Taktiler sensor.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58141030A JPS6034295A (ja) 1983-08-03 1983-08-03 皮膚感覚センサ

Publications (2)

Publication Number Publication Date
JPS6034295A JPS6034295A (ja) 1985-02-21
JPH0448597B2 true JPH0448597B2 (US07534539-20090519-C00280.png) 1992-08-07

Family

ID=15282579

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58141030A Granted JPS6034295A (ja) 1983-08-03 1983-08-03 皮膚感覚センサ

Country Status (5)

Country Link
US (1) US4709342A (US07534539-20090519-C00280.png)
EP (1) EP0133997B1 (US07534539-20090519-C00280.png)
JP (1) JPS6034295A (US07534539-20090519-C00280.png)
CA (1) CA1247717A (US07534539-20090519-C00280.png)
DE (1) DE3484082D1 (US07534539-20090519-C00280.png)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008139979A1 (ja) * 2007-05-09 2008-11-20 The University Of Tokyo 剪断力検出装置及び物体把持システム
WO2010134584A1 (ja) * 2009-05-22 2010-11-25 国立大学法人電気通信大学 滑り検出装置及び方法
JP2012058159A (ja) * 2010-09-10 2012-03-22 Hirosaki Univ センサ装置および分布測定装置
JP2014055985A (ja) * 2013-12-24 2014-03-27 Seiko Epson Corp 応力検出素子、触覚センサー、および把持装置
US8833178B2 (en) 2009-03-12 2014-09-16 Commissariat A L'energie Atomique Et Aux Energies Alternatives Device for the touch-sensitive characterization of a surface texture

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US4884223A (en) * 1985-07-05 1989-11-28 Hybond, Inc. Dynamic force measurement system
US4857916A (en) * 1987-02-26 1989-08-15 Bellin Robert W System and method for identifying an individual utilizing grasping pressures
US5263375A (en) * 1987-09-18 1993-11-23 Wacoh Corporation Contact detector using resistance elements and its application
US5092645A (en) * 1987-09-18 1992-03-03 Wacoh Corporation Robotic gripper having strain sensors formed on a semiconductor substrate
JPH01222851A (ja) * 1988-03-03 1989-09-06 Kitamura Mach Co Ltd 工作機械の主軸スラストカの検出方法
JPH0665454B2 (ja) * 1988-03-14 1994-08-24 エルコー株式会社 荷重検出器付き工具取り付けアダプタ
WO1991010118A1 (en) 1989-12-28 1991-07-11 Wacoh Corporation Apparatus for detecting physical quantity that acts as external force and method of testing and producing this apparatus
US6864677B1 (en) 1993-12-15 2005-03-08 Kazuhiro Okada Method of testing a sensor
US5421213A (en) * 1990-10-12 1995-06-06 Okada; Kazuhiro Multi-dimensional force detector
US6314823B1 (en) 1991-09-20 2001-11-13 Kazuhiro Okada Force detector and acceleration detector and method of manufacturing the same
US5297910A (en) * 1991-02-15 1994-03-29 Tokyo Electron Limited Transportation-transfer device for an object of treatment
US5373747A (en) * 1991-03-30 1994-12-20 Kabushiki Kaisha Toshiba Robot hand and robot
CH682263A5 (US07534539-20090519-C00280.png) * 1991-06-04 1993-08-13 Schweiz Unfallversicherung
JP3141954B2 (ja) * 1991-07-17 2001-03-07 株式会社ワコー 圧電素子を用いた力・加速度・磁気のセンサ
DE4129701C2 (de) * 1991-09-06 1994-07-28 Halil Ulusar Dr Akbay Meßverfahren zur Messung von mechanischen Spannungen und Meßwertaufnehmer zur Durchführung des Verfahrens
US5349263A (en) * 1991-10-09 1994-09-20 Mitsumi Electric Co., Ltd. Pointing device suitable for miniaturization
JP3027457B2 (ja) * 1991-10-25 2000-04-04 和廣 岡田 多次元方向に関する力・加速度・磁気の検出装置
JPH05215627A (ja) * 1992-02-04 1993-08-24 Kazuhiro Okada 多次元方向に関する力・加速度・磁気の検出装置
CH685648A5 (de) * 1992-10-23 1995-08-31 Kk Holding Ag Mehrkomponenten-Kraft- und Moment-Messanordnung.
US5760530A (en) * 1992-12-22 1998-06-02 The United States Of America As Represented By The Secretary Of The Air Force Piezoelectric tactile sensor
US6282956B1 (en) 1994-12-29 2001-09-04 Kazuhiro Okada Multi-axial angular velocity sensor
US5694013A (en) * 1996-09-06 1997-12-02 Ford Global Technologies, Inc. Force feedback haptic interface for a three-dimensional CAD surface
WO1998036241A1 (fr) * 1997-02-17 1998-08-20 Mitutoyo Corporation Sonde d'injection de signaux tactiles non directionnels
JPH10249768A (ja) * 1997-03-12 1998-09-22 Tokai Rubber Ind Ltd 力センサー
US6162007A (en) * 1999-01-14 2000-12-19 Witte; Stefan Apparatus for feeding electronic component tape
DE60043112D1 (de) 1999-08-09 2009-11-19 Sonavation Inc Piezoelektrischer dünnschichtfingerabdruckabtaster
US7067962B2 (en) 2000-03-23 2006-06-27 Cross Match Technologies, Inc. Multiplexer for a piezo ceramic identification device
US20030001459A1 (en) * 2000-03-23 2003-01-02 Cross Match Technologies, Inc. Secure wireless sales transaction using print information to verify a purchaser's identity
AU2001245936A1 (en) * 2000-03-23 2001-10-03 Cross Match Technologies, Inc. Piezoelectric identification device and applications thereof
JP3682525B2 (ja) * 2001-06-07 2005-08-10 独立行政法人科学技術振興機構 二脚歩行式人型ロボット
JP3479064B1 (ja) * 2002-04-12 2003-12-15 北陸電気工業株式会社 半導体力センサ
FR2849185B1 (fr) * 2002-12-18 2005-04-29 Ensam Ecole Nationale Superieu Procede et dispositif de controle sensoriel de la surface exterieure d'un objet
JP4313125B2 (ja) * 2003-09-12 2009-08-12 本田技研工業株式会社 ロボットハンド
JP2006226858A (ja) * 2005-02-18 2006-08-31 Hiroshima Univ 変動荷重センサ及びこれを用いた触覚センサ
US8181540B2 (en) * 2006-03-28 2012-05-22 University Of Southern California Measurement of sliding friction-induced vibrations for biomimetic tactile sensing
US8272278B2 (en) 2007-03-28 2012-09-25 University Of Southern California Enhancements to improve the function of a biomimetic tactile sensor
JP2010528267A (ja) * 2007-05-18 2010-08-19 ユニバーシティ オブ サザン カリフォルニア グリップ制御のための生体模倣触覚センサ
JP5396698B2 (ja) * 2007-07-25 2014-01-22 セイコーエプソン株式会社 圧力センサー
US20090167567A1 (en) * 2008-01-02 2009-07-02 Israeli Aerospace Industries Ltd. Method for avoiding collisions and a collision avoidance system
JP5604035B2 (ja) * 2008-07-18 2014-10-08 本田技研工業株式会社 力覚センサユニット
JP5417454B2 (ja) * 2009-10-14 2014-02-12 国立大学法人東北大学 シート状触覚センサシステム
US8938753B2 (en) 2010-05-12 2015-01-20 Litl Llc Configurable computer system
US9436219B2 (en) 2010-05-12 2016-09-06 Litl Llc Remote control to operate computer system
JP5678669B2 (ja) * 2011-01-06 2015-03-04 セイコーエプソン株式会社 超音波センサー、触覚センサー、および把持装置
JP5678670B2 (ja) * 2011-01-06 2015-03-04 セイコーエプソン株式会社 超音波センサー、触覚センサー、および把持装置
JP2012198171A (ja) * 2011-03-23 2012-10-18 Seiko Epson Corp 検出装置，電子機器およびロボット
JP5633701B2 (ja) * 2011-03-23 2014-12-03 セイコーエプソン株式会社 検出装置，電子機器およびロボット
WO2013060021A1 (en) * 2011-10-28 2013-05-02 Xi'an Jiaotong University Flexible micro bumps operably coupled to array of nan-piezoelectric sensors
TW201416652A (zh) * 2012-10-18 2014-05-01 Ind Tech Res Inst 壓力感測裝置及應用其之夾持設備
US9625333B2 (en) 2013-03-15 2017-04-18 President And Fellows Of Harvard College Tactile sensor
JP2015087281A (ja) * 2013-10-31 2015-05-07 セイコーエプソン株式会社 力検出装置、ロボット、電子部品搬送装置、電子部品検査装置、および部品加工装置
JP2014062918A (ja) * 2013-12-25 2014-04-10 Seiko Epson Corp 応力検出素子、触覚センサー、および把持装置
JP6285259B2 (ja) * 2014-01-14 2018-02-28 Ｎｉｓｓｈａ株式会社 圧力センサ
DE102014221294A1 (de) * 2014-10-21 2016-04-21 Robert Bosch Gmbh Sensorvorrichtung, greifvorrichtung und herstellungsverfahren
ITUB20160788A1 (it) * 2016-02-16 2017-08-16 St Microelectronics Srl Unita' di rilevamento di pressione per sistemi di monitoraggio dello stato di integrita' strutturale
US20190242768A1 (en) * 2016-10-17 2019-08-08 Kistler Holding Ag Force and Moment Sensor, Force Transducer Module for Such a Force and Moment Sensor and Robot Comprising Such a Force and Moment Sensor
US11680860B2 (en) * 2016-11-24 2023-06-20 The University Of Queensland Compact load cells
JP6794800B2 (ja) * 2016-11-29 2020-12-02 セイコーエプソン株式会社 ロボット
US10444090B2 (en) 2017-05-15 2019-10-15 Honeywell International Inc. System and method for securing sense die in force sensor
CN108072464B (zh) * 2017-11-30 2019-10-29 东南大学 一种仿人手指端滑动触觉传感器
JP7193262B2 (ja) * 2018-07-23 2022-12-20 ミネベアミツミ株式会社 触覚センサ
CN110108395B (zh) * 2019-06-14 2024-01-16 清华大学深圳研究生院 一种触滑觉传感器及其制备方法

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JPS5719278U (US07534539-20090519-C00280.png) * 1980-07-07 1982-02-01

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JPS5719278U (US07534539-20090519-C00280.png) * 1980-07-07 1982-02-01

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008139979A1 (ja) * 2007-05-09 2008-11-20 The University Of Tokyo 剪断力検出装置及び物体把持システム
US8833178B2 (en) 2009-03-12 2014-09-16 Commissariat A L'energie Atomique Et Aux Energies Alternatives Device for the touch-sensitive characterization of a surface texture
WO2010134584A1 (ja) * 2009-05-22 2010-11-25 国立大学法人電気通信大学 滑り検出装置及び方法
JP2010271242A (ja) * 2009-05-22 2010-12-02 Univ Of Electro-Communications 滑り検出装置及び方法
JP2012058159A (ja) * 2010-09-10 2012-03-22 Hirosaki Univ センサ装置および分布測定装置
JP2014055985A (ja) * 2013-12-24 2014-03-27 Seiko Epson Corp 応力検出素子、触覚センサー、および把持装置

Also Published As

Publication number Publication date
EP0133997B1 (en) 1991-02-06
EP0133997A3 (en) 1986-03-26
CA1247717A (en) 1988-12-28
DE3484082D1 (de) 1991-03-14
EP0133997A2 (en) 1985-03-13
JPS6034295A (ja) 1985-02-21
US4709342A (en) 1987-11-24

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