JPH0447890Y2 - - Google Patents

Info

Publication number
JPH0447890Y2
JPH0447890Y2 JP10679785U JP10679785U JPH0447890Y2 JP H0447890 Y2 JPH0447890 Y2 JP H0447890Y2 JP 10679785 U JP10679785 U JP 10679785U JP 10679785 U JP10679785 U JP 10679785U JP H0447890 Y2 JPH0447890 Y2 JP H0447890Y2
Authority
JP
Japan
Prior art keywords
valve
valve seat
lever body
valve body
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10679785U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6215761U (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10679785U priority Critical patent/JPH0447890Y2/ja
Publication of JPS6215761U publication Critical patent/JPS6215761U/ja
Application granted granted Critical
Publication of JPH0447890Y2 publication Critical patent/JPH0447890Y2/ja
Expired legal-status Critical Current

Links

JP10679785U 1985-07-12 1985-07-12 Expired JPH0447890Y2 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10679785U JPH0447890Y2 (zh) 1985-07-12 1985-07-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10679785U JPH0447890Y2 (zh) 1985-07-12 1985-07-12

Publications (2)

Publication Number Publication Date
JPS6215761U JPS6215761U (zh) 1987-01-30
JPH0447890Y2 true JPH0447890Y2 (zh) 1992-11-11

Family

ID=30982488

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10679785U Expired JPH0447890Y2 (zh) 1985-07-12 1985-07-12

Country Status (1)

Country Link
JP (1) JPH0447890Y2 (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5189256B2 (ja) * 2006-07-06 2013-04-24 株式会社ソディック 電子ビーム照射表面改質装置
JP4994151B2 (ja) * 2007-08-14 2012-08-08 日本電子株式会社 荷電粒子線装置
JP6323321B2 (ja) * 2014-12-16 2018-05-16 株式会社島津製作所 真空装置及びこれを備えた質量分析装置

Also Published As

Publication number Publication date
JPS6215761U (zh) 1987-01-30

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