JPH0447717Y2 - - Google Patents

Info

Publication number
JPH0447717Y2
JPH0447717Y2 JP1986026966U JP2696686U JPH0447717Y2 JP H0447717 Y2 JPH0447717 Y2 JP H0447717Y2 JP 1986026966 U JP1986026966 U JP 1986026966U JP 2696686 U JP2696686 U JP 2696686U JP H0447717 Y2 JPH0447717 Y2 JP H0447717Y2
Authority
JP
Japan
Prior art keywords
mask
case
adhesive
main body
adhesive sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986026966U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62140537U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986026966U priority Critical patent/JPH0447717Y2/ja
Publication of JPS62140537U publication Critical patent/JPS62140537U/ja
Application granted granted Critical
Publication of JPH0447717Y2 publication Critical patent/JPH0447717Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Buffer Packaging (AREA)
  • Packaging Frangible Articles (AREA)
JP1986026966U 1986-02-26 1986-02-26 Expired JPH0447717Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986026966U JPH0447717Y2 (enrdf_load_stackoverflow) 1986-02-26 1986-02-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986026966U JPH0447717Y2 (enrdf_load_stackoverflow) 1986-02-26 1986-02-26

Publications (2)

Publication Number Publication Date
JPS62140537U JPS62140537U (enrdf_load_stackoverflow) 1987-09-04
JPH0447717Y2 true JPH0447717Y2 (enrdf_load_stackoverflow) 1992-11-11

Family

ID=30828558

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986026966U Expired JPH0447717Y2 (enrdf_load_stackoverflow) 1986-02-26 1986-02-26

Country Status (1)

Country Link
JP (1) JPH0447717Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS62140537U (enrdf_load_stackoverflow) 1987-09-04

Similar Documents

Publication Publication Date Title
JPS63178958A (ja) 防塵容器
JP5268142B2 (ja) マスクブランク収納ケース及びマスクブランクの収納方法、並びにマスクブランク収納体
US4776462A (en) Container for a sheet-like article
JP3193567B2 (ja) 基板収容容器
JPH03229254A (ja) 薄膜の包装及び取扱いシステム
JPH0447717Y2 (enrdf_load_stackoverflow)
TWI227210B (en) Mask case
JPH10114388A (ja) ペリクル容器
WO2006035894A1 (ja) 薄膜付基板の支持部材、薄膜付基板の収納容器、マスクブランク収納体、転写マスク収納体、及び薄膜付基板の輸送方法
JPH11255261A (ja) 基板洗浄用ロールブラシの梱包方法、梱包体及び基板洗浄用ロールブラシの取り付け方法
JP4356443B2 (ja) 基板移載装置
JPS6278084A (ja) 基板収納容器
JPS62158682A (ja) 基板収納容器
JPH10114389A (ja) ペリクル容器
JPH0222316Y2 (enrdf_load_stackoverflow)
JP2000258897A (ja) ペリクル収納容器
JPH09106066A (ja) ペリクルライナーの剥離方法
JP3100970B2 (ja) ペリクル貼付装置及びペリクルの接着面保護シート剥離装置
JPH02288322A (ja) マスク収納用ケース
CN201117642Y (zh) 用以存放半导体元件或掩膜的存放装置
JPS5986240A (ja) フオトマスク収納箱
JPS6193542A (ja) 真空装置
JPH0710663Y2 (ja) コンパクト容器
JPH0444422B2 (enrdf_load_stackoverflow)
JPS61106307A (ja) 半導体基板収納用キヤリアの運搬用治具