JPH0446947B2 - - Google Patents
Info
- Publication number
- JPH0446947B2 JPH0446947B2 JP63162745A JP16274588A JPH0446947B2 JP H0446947 B2 JPH0446947 B2 JP H0446947B2 JP 63162745 A JP63162745 A JP 63162745A JP 16274588 A JP16274588 A JP 16274588A JP H0446947 B2 JPH0446947 B2 JP H0446947B2
- Authority
- JP
- Japan
- Prior art keywords
- mixture
- substrate
- photosensitive
- coating
- naphthoquinone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000203 mixture Substances 0.000 claims abstract description 63
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 48
- 239000000758 substrate Substances 0.000 claims abstract description 47
- 150000002989 phenols Chemical class 0.000 claims abstract description 7
- 238000000576 coating method Methods 0.000 claims description 36
- 239000011248 coating agent Substances 0.000 claims description 35
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 16
- 150000001875 compounds Chemical class 0.000 claims description 10
- 235000012239 silicon dioxide Nutrition 0.000 claims description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 239000000377 silicon dioxide Substances 0.000 claims description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 239000010949 copper Substances 0.000 claims description 5
- 239000004615 ingredient Substances 0.000 claims description 4
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 2
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 2
- 229920000728 polyester Polymers 0.000 claims description 2
- 229920005591 polysilicon Polymers 0.000 claims description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 2
- 229920000098 polyolefin Polymers 0.000 claims 1
- 229920005989 resin Polymers 0.000 abstract description 27
- 239000011347 resin Substances 0.000 abstract description 27
- 229920003986 novolac Polymers 0.000 abstract description 11
- TUXAJHDLJHMOQB-UHFFFAOYSA-N 2-diazonio-4-sulfonaphthalen-1-olate Chemical compound C1=CC=C2C(S(=O)(=O)O)=CC([N+]#N)=C([O-])C2=C1 TUXAJHDLJHMOQB-UHFFFAOYSA-N 0.000 abstract description 6
- ZRYCRPNCXLQHPN-UHFFFAOYSA-N 3-hydroxy-2-methylbenzaldehyde Chemical compound CC1=C(O)C=CC=C1C=O ZRYCRPNCXLQHPN-UHFFFAOYSA-N 0.000 abstract description 4
- SLGWESQGEUXWJQ-UHFFFAOYSA-N formaldehyde;phenol Chemical compound O=C.OC1=CC=CC=C1 SLGWESQGEUXWJQ-UHFFFAOYSA-N 0.000 abstract description 3
- 229920001568 phenolic resin Polymers 0.000 abstract description 3
- 239000000243 solution Substances 0.000 description 18
- 239000003504 photosensitizing agent Substances 0.000 description 17
- 239000002904 solvent Substances 0.000 description 15
- 238000011161 development Methods 0.000 description 13
- 235000012431 wafers Nutrition 0.000 description 13
- 239000010408 film Substances 0.000 description 11
- 230000005855 radiation Effects 0.000 description 11
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 10
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 10
- -1 ester compounds Chemical class 0.000 description 10
- 238000006243 chemical reaction Methods 0.000 description 8
- 239000007787 solid Substances 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 239000003795 chemical substances by application Substances 0.000 description 7
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 6
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 5
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- 229910000029 sodium carbonate Inorganic materials 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000004090 dissolution Methods 0.000 description 4
- 239000003623 enhancer Substances 0.000 description 4
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000011541 reaction mixture Substances 0.000 description 4
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 3
- OAHMVZYHIJQTQC-UHFFFAOYSA-N 4-cyclohexylphenol Chemical compound C1=CC(O)=CC=C1C1CCCCC1 OAHMVZYHIJQTQC-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 3
- CSNNHWWHGAXBCP-UHFFFAOYSA-L Magnesium sulfate Chemical compound [Mg+2].[O-][S+2]([O-])([O-])[O-] CSNNHWWHGAXBCP-UHFFFAOYSA-L 0.000 description 3
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000004809 Teflon Substances 0.000 description 3
- 229920006362 Teflon® Polymers 0.000 description 3
- 239000002253 acid Substances 0.000 description 3
- 239000000654 additive Substances 0.000 description 3
- 238000013019 agitation Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000000994 contrast dye Substances 0.000 description 3
- 238000000354 decomposition reaction Methods 0.000 description 3
- 239000012153 distilled water Substances 0.000 description 3
- 239000000975 dye Substances 0.000 description 3
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000004014 plasticizer Substances 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000008096 xylene Substances 0.000 description 3
- CNRNYORZJGVOSY-UHFFFAOYSA-N 2,5-diphenyl-1,3-oxazole Chemical compound C=1N=C(C=2C=CC=CC=2)OC=1C1=CC=CC=C1 CNRNYORZJGVOSY-UHFFFAOYSA-N 0.000 description 2
- SNBKPVVDUBFDEJ-UHFFFAOYSA-N 4-cyclopentylphenol Chemical compound C1=CC(O)=CC=C1C1CCCC1 SNBKPVVDUBFDEJ-UHFFFAOYSA-N 0.000 description 2
- WISWLZYHZLVSMO-UHFFFAOYSA-N 6-phenyl-2-(4-phenylphenyl)-1,3-benzoxazole Chemical compound C1=CC=CC=C1C1=CC=C(C=2OC3=CC(=CC=C3N=2)C=2C=CC=CC=2)C=C1 WISWLZYHZLVSMO-UHFFFAOYSA-N 0.000 description 2
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-M Bicarbonate Chemical compound OC([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-M 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 2
- PVNIIMVLHYAWGP-UHFFFAOYSA-N Niacin Chemical compound OC(=O)C1=CC=CN=C1 PVNIIMVLHYAWGP-UHFFFAOYSA-N 0.000 description 2
- 229920001665 Poly-4-vinylphenol Polymers 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical group C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- 125000001931 aliphatic group Chemical group 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 238000006482 condensation reaction Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- 239000008367 deionised water Substances 0.000 description 2
- 229910021641 deionized water Inorganic materials 0.000 description 2
- 125000000664 diazo group Chemical group [N-]=[N+]=[*] 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229940116333 ethyl lactate Drugs 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- CSFWPUWCSPOLJW-UHFFFAOYSA-N lawsone Chemical compound C1=CC=C2C(=O)C(O)=CC(=O)C2=C1 CSFWPUWCSPOLJW-UHFFFAOYSA-N 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Natural products C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- QVEIBLDXZNGPHR-UHFFFAOYSA-N naphthalene-1,4-dione;diazide Chemical class [N-]=[N+]=[N-].[N-]=[N+]=[N-].C1=CC=C2C(=O)C=CC(=O)C2=C1 QVEIBLDXZNGPHR-UHFFFAOYSA-N 0.000 description 2
- 239000002736 nonionic surfactant Substances 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 239000002952 polymeric resin Substances 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 238000000425 proton nuclear magnetic resonance spectrum Methods 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 150000003459 sulfonic acid esters Chemical class 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- WSLDOOZREJYCGB-UHFFFAOYSA-N 1,2-Dichloroethane Chemical compound ClCCCl WSLDOOZREJYCGB-UHFFFAOYSA-N 0.000 description 1
- 238000005160 1H NMR spectroscopy Methods 0.000 description 1
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 1
- XLLIQLLCWZCATF-UHFFFAOYSA-N 2-methoxyethyl acetate Chemical compound COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 1
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 1
- YVLNDCLPPGIRCP-UHFFFAOYSA-N 2-nitro-3-phenylprop-2-enoic acid Chemical compound OC(=O)C([N+]([O-])=O)=CC1=CC=CC=C1 YVLNDCLPPGIRCP-UHFFFAOYSA-N 0.000 description 1
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 1
- JUQPZRLQQYSMEQ-UHFFFAOYSA-N CI Basic red 9 Chemical compound [Cl-].C1=CC(N)=CC=C1C(C=1C=CC(N)=CC=1)=C1C=CC(=[NH2+])C=C1 JUQPZRLQQYSMEQ-UHFFFAOYSA-N 0.000 description 1
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 1
- 238000005481 NMR spectroscopy Methods 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004115 Sodium Silicate Substances 0.000 description 1
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 1
- 235000021355 Stearic acid Nutrition 0.000 description 1
- 239000011354 acetal resin Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910000288 alkali metal carbonate Inorganic materials 0.000 description 1
- 150000008041 alkali metal carbonates Chemical class 0.000 description 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- 150000005215 alkyl ethers Chemical class 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 229940052223 basic fuchsin Drugs 0.000 description 1
- 239000007853 buffer solution Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- OEYIOHPDSNJKLS-UHFFFAOYSA-N choline Chemical compound C[N+](C)(C)CCO OEYIOHPDSNJKLS-UHFFFAOYSA-N 0.000 description 1
- 229960001231 choline Drugs 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229930003836 cresol Natural products 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- HPXRVTGHNJAIIH-UHFFFAOYSA-N cyclohexanol Chemical compound OC1CCCCC1 HPXRVTGHNJAIIH-UHFFFAOYSA-N 0.000 description 1
- HPXRVTGHNJAIIH-PTQBSOBMSA-N cyclohexanol Chemical group O[13CH]1CCCCC1 HPXRVTGHNJAIIH-PTQBSOBMSA-N 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical group OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- USEUJPGSYMRJHM-UHFFFAOYSA-N formaldehyde;4-methylphenol Chemical compound O=C.CC1=CC=C(O)C=C1 USEUJPGSYMRJHM-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 229910052943 magnesium sulfate Inorganic materials 0.000 description 1
- 235000019341 magnesium sulphate Nutrition 0.000 description 1
- CZRKJHRIILZWRC-UHFFFAOYSA-N methyl acetate;propane-1,2-diol Chemical compound COC(C)=O.CC(O)CO CZRKJHRIILZWRC-UHFFFAOYSA-N 0.000 description 1
- 238000001471 micro-filtration Methods 0.000 description 1
- 238000001393 microlithography Methods 0.000 description 1
- 229960003512 nicotinic acid Drugs 0.000 description 1
- 235000001968 nicotinic acid Nutrition 0.000 description 1
- 239000011664 nicotinic acid Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 1
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- IWDCLRJOBJJRNH-UHFFFAOYSA-N p-cresol Chemical compound CC1=CC=C(O)C=C1 IWDCLRJOBJJRNH-UHFFFAOYSA-N 0.000 description 1
- 229920006287 phenoxy resin Polymers 0.000 description 1
- 239000013034 phenoxy resin Substances 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- OXNIZHLAWKMVMX-UHFFFAOYSA-N picric acid Chemical compound OC1=C([N+]([O-])=O)C=C([N+]([O-])=O)C=C1[N+]([O-])=O OXNIZHLAWKMVMX-UHFFFAOYSA-N 0.000 description 1
- 229920006324 polyoxymethylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Chemical group COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229940051201 quinoline yellow Drugs 0.000 description 1
- IZMJMCDDWKSTTK-UHFFFAOYSA-N quinoline yellow Chemical compound C1=CC=CC2=NC(C3C(C4=CC=CC=C4C3=O)=O)=CC=C21 IZMJMCDDWKSTTK-UHFFFAOYSA-N 0.000 description 1
- 235000012752 quinoline yellow Nutrition 0.000 description 1
- 239000004172 quinoline yellow Substances 0.000 description 1
- 239000002516 radical scavenger Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- RCTGMCJBQGBLKT-PAMTUDGESA-N scarlet red Chemical compound CC1=CC=CC=C1\N=N\C(C=C1C)=CC=C1\N=N\C1=C(O)C=CC2=CC=CC=C12 RCTGMCJBQGBLKT-PAMTUDGESA-N 0.000 description 1
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 235000019795 sodium metasilicate Nutrition 0.000 description 1
- 239000001488 sodium phosphate Substances 0.000 description 1
- 229910000162 sodium phosphate Inorganic materials 0.000 description 1
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 1
- 229910052911 sodium silicate Inorganic materials 0.000 description 1
- HPALAKNZSZLMCH-UHFFFAOYSA-M sodium;chloride;hydrate Chemical class O.[Na+].[Cl-] HPALAKNZSZLMCH-UHFFFAOYSA-M 0.000 description 1
- 239000011877 solvent mixture Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000008117 stearic acid Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 150000003460 sulfonic acids Chemical class 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- HQUQLFOMPYWACS-UHFFFAOYSA-N tris(2-chloroethyl) phosphate Chemical compound ClCCOP(=O)(OCCCl)OCCCl HQUQLFOMPYWACS-UHFFFAOYSA-N 0.000 description 1
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Materials For Photolithography (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Phenolic Resins Or Amino Resins (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Description
ãçºæã®è©³çŽ°ãªèª¬æã
ç£æ¥äžã®å©çšåé
æ¬çºæã¯æå
æ§ã®ïŒïŒïŒâãããããã³âïŒâ
ãžã¢ãžãâïŒâã¹ã«ãã³é žã¢ããšã¹ãã«ååç©ã«
é¢ãããããã«ãæ¬çºæã¯ãããã®ïŒïŒïŒâãã
ãããã³âïŒâãžã¢ãžãâïŒâã¹ã«ãã³é žã¢ããš
ã¹ãã«æå æ§ååç©ãšãšãã«ã¢ã«ã«ãªå¯æº¶æ§ã®æš¹
èãå«æãããããžåã®ããªãã¬ãžã¹ãçµæç©ãš
ããŠæçšãªæå æ§æ··åç©ãšãåããããã§è¢«èŠã
ãåºäœãšã«é¢ããŠããã
ãžã¢ãžãâïŒâã¹ã«ãã³é žã¢ããšã¹ãã«ååç©ã«
é¢ãããããã«ãæ¬çºæã¯ãããã®ïŒïŒïŒâãã
ãããã³âïŒâãžã¢ãžãâïŒâã¹ã«ãã³é žã¢ããš
ã¹ãã«æå æ§ååç©ãšãšãã«ã¢ã«ã«ãªå¯æº¶æ§ã®æš¹
èãå«æãããããžåã®ããªãã¬ãžã¹ãçµæç©ãš
ããŠæçšãªæå æ§æ··åç©ãšãåããããã§è¢«èŠã
ãåºäœãšã«é¢ããŠããã
åŸæ¥ã®æè¡
ããªãã¬ãžã¹ãçµæç©ã¯ã埮å°ãªé»åéšåãäœ
ãããã®ãã€ã¯ããœãªã°ã©ãæ³ã«ãããŠãéç©å
è·¯ãå°å·é ç·æ¿åè·¯ãªã©ã®è£œé ã«éããŠçšããã
ãŠãããäžè¬çã«ãããã®æ¹æ³ã§ã¯ãããªãã¬ãž
ã¹ãçµæç©ã®ãããç®èãŸãã¯å¡èããéç©åè·¯
ãäœãã®ã«çšããã·ãªã³ã³ãŠãšãããŸãã¯å°å·é
ç·æ¿çšã®ã¢ã«ãããŠã ãããã¯é çã®ãããªåºäœ
ææã«ãŸãä»äžãããããã®è¢«èŠæžã¿ã®åºäœã¯ã
ã€ãã§åºäœäžã«å¡èãåºçããããã«ããŒã¯ãã
ããåºäœã®ããŒã¯æžã¿è¢«èŠè¡šé¢ã¯æ¬¡ã«ç»åç¶ã®èŒ»
å°ç·é²å ãåããããã®èŒ»å°ç·é²å ã¯ãç®èé¢ã®
é²å ãããåºåã«ååŠçã®å€åãçããããã茻
å°ç·æºã«ã¯çŽ«å€ç·å ïŒUVïŒãšé»åããŒã ãšãã«
ã®ããçŸåšãã€ã¯ããªãœã°ã©ãæ³ã§æ®éã«çšãã
ããŠããããã®ç»åç¶é²å ã®åŸã§ãåºäœç®èé¢ã®
茻å°ç·é²å ããããåºåãããã¯æªé²å åºåã®ã
ãããã溶解ãé€å»ããããã被èŠæžã¿åºäœã¯çŸ
å液ã§åŠçãããã
ãããã®ãã€ã¯ããœãªã°ã©ãæ³ã«ãããŠãéç©å
è·¯ãå°å·é ç·æ¿åè·¯ãªã©ã®è£œé ã«éããŠçšããã
ãŠãããäžè¬çã«ãããã®æ¹æ³ã§ã¯ãããªãã¬ãž
ã¹ãçµæç©ã®ãããç®èãŸãã¯å¡èããéç©åè·¯
ãäœãã®ã«çšããã·ãªã³ã³ãŠãšãããŸãã¯å°å·é
ç·æ¿çšã®ã¢ã«ãããŠã ãããã¯é çã®ãããªåºäœ
ææã«ãŸãä»äžãããããã®è¢«èŠæžã¿ã®åºäœã¯ã
ã€ãã§åºäœäžã«å¡èãåºçããããã«ããŒã¯ãã
ããåºäœã®ããŒã¯æžã¿è¢«èŠè¡šé¢ã¯æ¬¡ã«ç»åç¶ã®èŒ»
å°ç·é²å ãåããããã®èŒ»å°ç·é²å ã¯ãç®èé¢ã®
é²å ãããåºåã«ååŠçã®å€åãçããããã茻
å°ç·æºã«ã¯çŽ«å€ç·å ïŒUVïŒãšé»åããŒã ãšãã«
ã®ããçŸåšãã€ã¯ããªãœã°ã©ãæ³ã§æ®éã«çšãã
ããŠããããã®ç»åç¶é²å ã®åŸã§ãåºäœç®èé¢ã®
茻å°ç·é²å ããããåºåãããã¯æªé²å åºåã®ã
ãããã溶解ãé€å»ããããã被èŠæžã¿åºäœã¯çŸ
å液ã§åŠçãããã
ããªãã¬ãžã¹ãçµæç©ã«ã¯ãã¬åãšããžåãšã®
ïŒã€ã®åœ¢åŒãããããã¬åã®ããªãã¬ãžã¹ãçµæ
ç©ã茻å°ç·ã«å¯ŸããŠç»åç¶ã«é²å ãããšãã茻å°
ç·ã«é²å ãããã¬ãžã¹ãçµæç©ã®åºåã¯çŸåšæ¶²ã«
察ããŠäžæº¶æ§ãšãªãïŒå³ã¡æ¶æ©ååå¿ãçãïŒã
ããã«åãããªãã¬ãžã¹ãå¡èã®æªé²å åºåã¯çŸ
å液ã«å¯ŸããŠå¯æº¶æ§ã®ãŸãŸã§ããããã®ããã«ã
çŸå液ã§é²å ãããã¬åã¬ãžã¹ããåŠçãããšã
ã¬ãžã¹ãå¡èã®æªé²å éšãé€å»ããããªãã¬ãžã¹
ãå¡èäžã«ãã¬ç»åãçæããããäžæ¹ããžåã
ãªãã¬ãžã¹ãçµæç©ã茻å°ç·ã«å¯Ÿãç»åç¶ã«é²å
ããããšã茻å°ç·ã«é²å ãããã¬ãžã¹ãçµæç©ã®
åºåã¯çŸå液ã«å¯ŸããŠå¯æº¶æ§ãšãªãïŒå³ã¡å解å
å¿ãçãïŒãããã«åãé²å ãããªãã€ãåºåã¯
çŸå液ã«å¯ŸããŠäžæº¶æ§ã®ãŸãŸã§ããããã®ããã«
çŸå液ã§é²å ããããžåã¬ãžã¹ããåŠçãããšã
ã¬ãžã¹ãå¡èã®é²å éšãé€å»ããããªãã¬ãžã¹ã
å¡èäžã«ããžç»åãçæãããã
ïŒã€ã®åœ¢åŒãããããã¬åã®ããªãã¬ãžã¹ãçµæ
ç©ã茻å°ç·ã«å¯ŸããŠç»åç¶ã«é²å ãããšãã茻å°
ç·ã«é²å ãããã¬ãžã¹ãçµæç©ã®åºåã¯çŸåšæ¶²ã«
察ããŠäžæº¶æ§ãšãªãïŒå³ã¡æ¶æ©ååå¿ãçãïŒã
ããã«åãããªãã¬ãžã¹ãå¡èã®æªé²å åºåã¯çŸ
å液ã«å¯ŸããŠå¯æº¶æ§ã®ãŸãŸã§ããããã®ããã«ã
çŸå液ã§é²å ãããã¬åã¬ãžã¹ããåŠçãããšã
ã¬ãžã¹ãå¡èã®æªé²å éšãé€å»ããããªãã¬ãžã¹
ãå¡èäžã«ãã¬ç»åãçæããããäžæ¹ããžåã
ãªãã¬ãžã¹ãçµæç©ã茻å°ç·ã«å¯Ÿãç»åç¶ã«é²å
ããããšã茻å°ç·ã«é²å ãããã¬ãžã¹ãçµæç©ã®
åºåã¯çŸå液ã«å¯ŸããŠå¯æº¶æ§ãšãªãïŒå³ã¡å解å
å¿ãçãïŒãããã«åãé²å ãããªãã€ãåºåã¯
çŸå液ã«å¯ŸããŠäžæº¶æ§ã®ãŸãŸã§ããããã®ããã«
çŸå液ã§é²å ããããžåã¬ãžã¹ããåŠçãããšã
ã¬ãžã¹ãå¡èã®é²å éšãé€å»ããããªãã¬ãžã¹ã
å¡èäžã«ããžç»åãçæãããã
ãã®çŸåæäœã®åŸã§ãéšåçã«ä¿è·ãããªããª
ã€ãåºäœã¯ãåºäœãšãã液ãŸãã¯ãã©ãºãã¬ã¹ãŸ
ãã¯åæ§ã®ãã®ãåŠçãããããã®ãšãã液ãŸã
ã¯ãã©ãºãã¬ã¹ã¯ãããªãã¬ãžã¹ãå¡èãçŸåäž
ã«é€å»ãããåºäœã®éšåããšãããããããªãã¬
ãžã¹ãå¡èããŸã æ®ã€ãŠããåºäœã®åºåã¯ä¿è·ã
ããããããŠæŽ»æ§èŒ»å°ç·ã®ç»åç¶ã®é²å ã«å¯Ÿå¿ã
ããšããå³åœ¢ãåºäœææäžã«çæããããã®åŸ
ã§ãããªãã¬ãžã¹ãå¡èã®æ®éšã¯å¥é¢å·¥çšã§é€å»
ããããšããã³ã°ã®ããã æž æµãªåºäœé¢ãšãã
ãã
ã€ãåºäœã¯ãåºäœãšãã液ãŸãã¯ãã©ãºãã¬ã¹ãŸ
ãã¯åæ§ã®ãã®ãåŠçãããããã®ãšãã液ãŸã
ã¯ãã©ãºãã¬ã¹ã¯ãããªãã¬ãžã¹ãå¡èãçŸåäž
ã«é€å»ãããåºäœã®éšåããšãããããããªãã¬
ãžã¹ãå¡èããŸã æ®ã€ãŠããåºäœã®åºåã¯ä¿è·ã
ããããããŠæŽ»æ§èŒ»å°ç·ã®ç»åç¶ã®é²å ã«å¯Ÿå¿ã
ããšããå³åœ¢ãåºäœææäžã«çæããããã®åŸ
ã§ãããªãã¬ãžã¹ãå¡èã®æ®éšã¯å¥é¢å·¥çšã§é€å»
ããããšããã³ã°ã®ããã æž æµãªåºäœé¢ãšãã
ãã
ããžåã®ããªãã¬ãžã¹ãçµæç©ã¯è§£åæ§ãšå³åœ¢
äŒéãšãäžè¬ã«è¯ãããããã¬åã®ããªãã¬ãžã¹
ããããä»æ¥è³çšãããŠããã
äŒéãšãäžè¬ã«è¯ãããããã¬åã®ããªãã¬ãžã¹
ããããä»æ¥è³çšãããŠããã
ããªãã¬ãžã¹ãã®è§£åæ§ã«ã¯ãã¬ãžã¹ãçµæç©
ãé²å ãšçŸåã®åŸã§ãç»åã®çžã®é«åºŠã®é®®éæ§ãš
ãšãã«ããªããã¹ã¯ããåºäœãžãšäŒéã§ããã幟
äœåŠççééãã¿ãŒã³ã«äžéããããä»æ¥ã®å€ã
ã®è£œé äžã®å©çšã§ã¯ãïŒãã¯ãã³ãŸãã¯ãã以äž
ã®çšåºŠã®ã¬ãžã¹ãã®è§£åæ§ãå¿ èŠã§ããã
ãé²å ãšçŸåã®åŸã§ãç»åã®çžã®é«åºŠã®é®®éæ§ãš
ãšãã«ããªããã¹ã¯ããåºäœãžãšäŒéã§ããã幟
äœåŠççééãã¿ãŒã³ã«äžéããããä»æ¥ã®å€ã
ã®è£œé äžã®å©çšã§ã¯ãïŒãã¯ãã³ãŸãã¯ãã以äž
ã®çšåºŠã®ã¬ãžã¹ãã®è§£åæ§ãå¿ èŠã§ããã
ããã«å ããŠãçŸåããããªãã¬ãžã¹ãã®åŽé¢
ã¯åºäœã«å¯ŸããŠã»ãŒåçŽã§ããã®ãã®ããŸããã
ã¬ãžã¹ãå¡èã®çŸåããã³æªçŸååºåéã®ãã®ã
ããªåœ¢ã®å¢çã¯ããšããã³ã°åŸã«åºäœäžã«ãã¹ã¯
åã®æ£ç¢ºãªå³åœ¢äŒéãããã
ã¯åºäœã«å¯ŸããŠã»ãŒåçŽã§ããã®ãã®ããŸããã
ã¬ãžã¹ãå¡èã®çŸåããã³æªçŸååºåéã®ãã®ã
ããªåœ¢ã®å¢çã¯ããšããã³ã°åŸã«åºäœäžã«ãã¹ã¯
åã®æ£ç¢ºãªå³åœ¢äŒéãããã
åçš®æåã§ããžåããªãã¬ãžã¹ãçµæç©ã¯äœã
ããŠãããå å®å®ãªãæ°Žäžæº¶æ§ãã¢ã«ã«ãªå¯æº¶æ§
ãããŠç®è圢ææ§ã®æš¹èïŒãŸãã¯æš¹èæ··åç©ïŒã
éåžžäž»èŠãªåºäœæåã§ãããããšããŒã«âãã«ã
ã¢ã«ãããããã©ãã¯ããã³ã¯ã¬ãŸãŒã«âãã«ã
ã¢ã«ãããããã©ãã¯ããã³ããªããã«ããšããŒ
ã«ãªã©ãããã®ãããªæš¹èã®è¯ãç¥ããããã®ã®
äŸã§ãããïŒã€ãŸãã¯ããã€ãã®æå æ§ååç©
ïŒãŸãå 掻æ§ååç©ãŸãã¯æå å€ãšããŠç¥ãããŠ
ããïŒãããªãã¬ãžã¹ãçµæç©äžã«ååšããŠã
ãããããããã³ãžã¢ãžãååç©ã¯ãããæå å€
ã®äŸã§ãããç®èããã®æš¹èæåããäœããããš
ããããã¯ã¢ã«ã«ãªæ§ã®æ°Žç³»çŸå液äžã«å¯æº¶æ§ã§
ãããããããªããããã®æå å€ã®æ·»å ã¯çŸå液
äžã§ã®ç®èã®æº¶è§£ãæå¶ããããã®ããžåããªã
ã¬ãžã¹ãçµæç©ã被èŠããåºäœã茻å°ç·ã®ç»åç¶
é²å ãããšãããã®æå å€ã¯å¡èã®é²å ãããåº
åã«ãããŠèŒ»å°ç·èªçºååŠå€æãçããããã®å
ååŠçå€æã¯ãã¢ã«ã«ãªæ§çŸå液äžã§ç®è圢ææš¹
èã«ã€ããŠæå å€ãæããŠãã溶解æå¶æ§ãé€å»
ããŠããŸããåŸã€ãŠãå¡èã®èŒ»å°ç·é²å åºåã¯ã
ãŸãæªé²å åºåãããã¢ã«ã«ãªæ§æ°Žç³»çŸå液ã«å¯Ÿ
ããŠããå¯èœæ§ãšãªãã®ã§ããããã®æº¶è§£é床ã®
çžéã¯ã被èŠæžã¿åºäœãã¢ã«ã«ãªæ§ã®æ°Žç³»çŸå液
äžã«æµžããããšããããªãã¬ãžã¹ãç®èã®æº¶è§£ã
çããããæªé²å åºåã¯ã»ãšãã©åœ±é¿ããªããã
ãããŠåºäœäžã«ããžã®ã¬ãªãŒãå³åœ¢ãçæãã
ãã
ããŠãããå å®å®ãªãæ°Žäžæº¶æ§ãã¢ã«ã«ãªå¯æº¶æ§
ãããŠç®è圢ææ§ã®æš¹èïŒãŸãã¯æš¹èæ··åç©ïŒã
éåžžäž»èŠãªåºäœæåã§ãããããšããŒã«âãã«ã
ã¢ã«ãããããã©ãã¯ããã³ã¯ã¬ãŸãŒã«âãã«ã
ã¢ã«ãããããã©ãã¯ããã³ããªããã«ããšããŒ
ã«ãªã©ãããã®ãããªæš¹èã®è¯ãç¥ããããã®ã®
äŸã§ãããïŒã€ãŸãã¯ããã€ãã®æå æ§ååç©
ïŒãŸãå 掻æ§ååç©ãŸãã¯æå å€ãšããŠç¥ãããŠ
ããïŒãããªãã¬ãžã¹ãçµæç©äžã«ååšããŠã
ãããããããã³ãžã¢ãžãååç©ã¯ãããæå å€
ã®äŸã§ãããç®èããã®æš¹èæåããäœããããš
ããããã¯ã¢ã«ã«ãªæ§ã®æ°Žç³»çŸå液äžã«å¯æº¶æ§ã§
ãããããããªããããã®æå å€ã®æ·»å ã¯çŸå液
äžã§ã®ç®èã®æº¶è§£ãæå¶ããããã®ããžåããªã
ã¬ãžã¹ãçµæç©ã被èŠããåºäœã茻å°ç·ã®ç»åç¶
é²å ãããšãããã®æå å€ã¯å¡èã®é²å ãããåº
åã«ãããŠèŒ»å°ç·èªçºååŠå€æãçããããã®å
ååŠçå€æã¯ãã¢ã«ã«ãªæ§çŸå液äžã§ç®è圢ææš¹
èã«ã€ããŠæå å€ãæããŠãã溶解æå¶æ§ãé€å»
ããŠããŸããåŸã€ãŠãå¡èã®èŒ»å°ç·é²å åºåã¯ã
ãŸãæªé²å åºåãããã¢ã«ã«ãªæ§æ°Žç³»çŸå液ã«å¯Ÿ
ããŠããå¯èœæ§ãšãªãã®ã§ããããã®æº¶è§£é床ã®
çžéã¯ã被èŠæžã¿åºäœãã¢ã«ã«ãªæ§ã®æ°Žç³»çŸå液
äžã«æµžããããšããããªãã¬ãžã¹ãç®èã®æº¶è§£ã
çããããæªé²å åºåã¯ã»ãšãã©åœ±é¿ããªããã
ãããŠåºäœäžã«ããžã®ã¬ãªãŒãå³åœ¢ãçæãã
ãã
眮æãããããã³ãžã¢ãžãæå
å€ã«ã€ããŠã¯
ïŒïŒïŒâãããããã³âïŒâãžã¢ãžãâïŒãŸãã¯
ïŒâã¹ã«ãã³é žã®ã·ã¯ããããµããŒã«ã¢ããšã¹ã
ã«ïŒã·ãŠãããæ°ã®ç±³åœç¹èš±ç¬¬2767092å·åç §ïŒã
ãã³ãŒã³çœ®æäœïŒãã€ã²ããŠã¢ãŒæ°ã®ç±³åœç¹èš±ç¬¬
3106465å·ããŠãŒã«ãªããæ°ä»ã®ç±³åœç¹èš±ç¬¬
313047å·ããã³ãµã¹æ°ä»ã®å第3640992å·åç §ïŒã
ããã³ã·ã¯ããããµããŒã«çœ®æäœïŒãã€ããæ°ä»
ã®ç±³åœç¹èš±ç¬¬3823130å·åç §ïŒãªã©ãããã
ïŒïŒïŒâãããããã³âïŒâãžã¢ãžãâïŒãŸãã¯
ïŒâã¹ã«ãã³é žã®ã·ã¯ããããµããŒã«ã¢ããšã¹ã
ã«ïŒã·ãŠãããæ°ã®ç±³åœç¹èš±ç¬¬2767092å·åç §ïŒã
ãã³ãŒã³çœ®æäœïŒãã€ã²ããŠã¢ãŒæ°ã®ç±³åœç¹èš±ç¬¬
3106465å·ããŠãŒã«ãªããæ°ä»ã®ç±³åœç¹èš±ç¬¬
313047å·ããã³ãµã¹æ°ä»ã®å第3640992å·åç §ïŒã
ããã³ã·ã¯ããããµããŒã«çœ®æäœïŒãã€ããæ°ä»
ã®ç±³åœç¹èš±ç¬¬3823130å·åç §ïŒãªã©ãããã
ããžåããªãã¬ãžã¹ãçµæç©ã¯ç®è圢ææš¹èãš
æå å€ãšã®ã»ãã«å¥œãŸãããã®ä»ã®æåãå«ãã§
ãããäŸãã°ãïŒã€ãŸãã¯ããã€ãã®æº¶å€ãå ã
ãããšãã§ãããä¹³é žãšãã«ããšãã¬ã³ã°ãªã³ãŒ
ã«é ¢é žã¡ãã«ãšãŒãã«ããããã¬ã³ã°ãªã³ãŒã«é ¢
é žã¡ãã«ãšãŒãã«ãâã¡ãã«âïŒâãããªã
ã³ãããã³ãšãã«ã»ããœã«ãã¢ã»ããŒããšããã«
ã¢ã»ããŒããšãã·ã¬ã³ãšã®æ··åç©ãªã©ãéåžžçšã
ããã溶å€ã®äŸã§ãããæš¹èãšæå å€ãšã¯åºäœã«
ä»äžããã®ã容æãšããããã«ã溶å€ãŸãã¯è€æ°
ã®æº¶å€äžã«æº¶è§£ãããã
æå å€ãšã®ã»ãã«å¥œãŸãããã®ä»ã®æåãå«ãã§
ãããäŸãã°ãïŒã€ãŸãã¯ããã€ãã®æº¶å€ãå ã
ãããšãã§ãããä¹³é žãšãã«ããšãã¬ã³ã°ãªã³ãŒ
ã«é ¢é žã¡ãã«ãšãŒãã«ããããã¬ã³ã°ãªã³ãŒã«é ¢
é žã¡ãã«ãšãŒãã«ãâã¡ãã«âïŒâãããªã
ã³ãããã³ãšãã«ã»ããœã«ãã¢ã»ããŒããšããã«
ã¢ã»ããŒããšãã·ã¬ã³ãšã®æ··åç©ãªã©ãéåžžçšã
ããã溶å€ã®äŸã§ãããæš¹èãšæå å€ãšã¯åºäœã«
ä»äžããã®ã容æãšããããã«ã溶å€ãŸãã¯è€æ°
ã®æº¶å€äžã«æº¶è§£ãããã
ãã®ä»ã®ããªãã¬ãžã¹ãçšæ·»å å€ã®å¥œãŸããã
ã®ã«ã¯æŽ»æ§åããã³ã³ã³ãã©ã¹ãçšè²çŽ ããªãã
å€ãå¯å¡å€ãé床å¢å å€ãªã©ãå«ãŸããã掻æ§å
è²çŽ ã¯ãåºäœè£åŽã«æ£ä¹±ããå ãæå¶ããããšã«
ãã解åæ§ãå¢å ãããã®ã«åœ¹ç«ã€ããã®è£é¢æ£
ä¹±ã¯å åŠçãããã³ã°ã«å¥œãŸãããªãäœçšãç
ããããšã«åºäœè¡šé¢ãé«åå°æ§ã§ããããŸãã¯ã
ã®ãããªåœ¢ããã€ãšãã«èãããã³ã³ãã©ã¹ãçš
è²çŽ ã¯çŸåãããç»åã®å¯èŠæ§ãè¯ããããããŠ
補é äžã®ãã¿ãŒã³é åã容æãšããããªããå€ã¯
ããªãã¬ãžã¹ãå¡èãŸãã¯ç®èãåäžãªåã¿ãšã
ãããã«å¹³é¢åãããããã®ããšã¯ç®èé¢ã«åäž
ãªèŒ»å°ç·é²å ãããã®ã«éèŠã§ãããå¯èŠå€ã¯ã
ãªãã¬ãžã¹ãçµæç©ã®å¡èãšæ¥çæ§ãšãæ¹åãã
åºäœäžã«å¹³æ»ãã€åäžãªåã¿ã®ããªãã¬ãžã¹ãã®
ãããå¡èãŸãã¯è¢«èŠã®ä»äžãå¯èœãšãããé床
å¢å å€ã¯ãé²å éšããã³æªé²å éšã®ãããã«ãã
ãŠããããªãã¬ãžã¹ãå¡èã®æº¶è§£æ§ãå¢å ããã
ããã§ãããã¯ããçšåºŠã³ã³ãã©ã¹ããããããš
ãªãããšããã€ãŠãçŸåé床ãèæ ®ããããããª
çšéã§çšããããããããªãã¬ãžã¹ãå¡èã®é²å
éšã¯çŸå液ã«ããæŽã«éããã«æº¶è§£ããããã©
ããæªé²å éšã®ããªãã¬ãžã¹ãå¡èã®å€§éã®æ倱
ãçããã§ãããã
ã®ã«ã¯æŽ»æ§åããã³ã³ã³ãã©ã¹ãçšè²çŽ ããªãã
å€ãå¯å¡å€ãé床å¢å å€ãªã©ãå«ãŸããã掻æ§å
è²çŽ ã¯ãåºäœè£åŽã«æ£ä¹±ããå ãæå¶ããããšã«
ãã解åæ§ãå¢å ãããã®ã«åœ¹ç«ã€ããã®è£é¢æ£
ä¹±ã¯å åŠçãããã³ã°ã«å¥œãŸãããªãäœçšãç
ããããšã«åºäœè¡šé¢ãé«åå°æ§ã§ããããŸãã¯ã
ã®ãããªåœ¢ããã€ãšãã«èãããã³ã³ãã©ã¹ãçš
è²çŽ ã¯çŸåãããç»åã®å¯èŠæ§ãè¯ããããããŠ
補é äžã®ãã¿ãŒã³é åã容æãšããããªããå€ã¯
ããªãã¬ãžã¹ãå¡èãŸãã¯ç®èãåäžãªåã¿ãšã
ãããã«å¹³é¢åãããããã®ããšã¯ç®èé¢ã«åäž
ãªèŒ»å°ç·é²å ãããã®ã«éèŠã§ãããå¯èŠå€ã¯ã
ãªãã¬ãžã¹ãçµæç©ã®å¡èãšæ¥çæ§ãšãæ¹åãã
åºäœäžã«å¹³æ»ãã€åäžãªåã¿ã®ããªãã¬ãžã¹ãã®
ãããå¡èãŸãã¯è¢«èŠã®ä»äžãå¯èœãšãããé床
å¢å å€ã¯ãé²å éšããã³æªé²å éšã®ãããã«ãã
ãŠããããªãã¬ãžã¹ãå¡èã®æº¶è§£æ§ãå¢å ããã
ããã§ãããã¯ããçšåºŠã³ã³ãã©ã¹ããããããš
ãªãããšããã€ãŠãçŸåé床ãèæ ®ããããããª
çšéã§çšããããããããªãã¬ãžã¹ãå¡èã®é²å
éšã¯çŸå液ã«ããæŽã«éããã«æº¶è§£ããããã©
ããæªé²å éšã®ããªãã¬ãžã¹ãå¡èã®å€§éã®æ倱
ãçããã§ãããã
ããžåã®ããªãã¬ãžã¹ããäœãã®ã«å€ãã®åœ¢åŒ
ã®æå å€ãçšããããŠããããç¹å®ã®å©çšã®ãã
ç¹å®ã®ç®è圢ææ§æš¹èãšãšãã«ããããã¯ç¹å®ã®
溶å€ãŸãã¯æ·»å å€ãšãšãã«ããè¯ãæ§èœã瀺ãæ°
èŠã®ãã®ãèŠåºãå¿ èŠããããããã§æ¬çºæã¯ã
ã®ãããªäºæ ã®äžã«å©ç¹ããã€æå æ§ååç©ã®æ°
èŠãªãã®ã«åããŠè¡ãããã
ã®æå å€ãçšããããŠããããç¹å®ã®å©çšã®ãã
ç¹å®ã®ç®è圢ææ§æš¹èãšãšãã«ããããã¯ç¹å®ã®
溶å€ãŸãã¯æ·»å å€ãšãšãã«ããè¯ãæ§èœã瀺ãæ°
èŠã®ãã®ãèŠåºãå¿ èŠããããããã§æ¬çºæã¯ã
ã®ãããªäºæ ã®äžã«å©ç¹ããã€æå æ§ååç©ã®æ°
èŠãªãã®ã«åããŠè¡ãããã
çºæã®èŠç¹
æ¬çºæã¯ãæ°èŠãªãã®ãšããŠæ¬¡ã®åŒïŒïŒã«çž
åœããïŒïŒïŒâãããããã³âïŒâãžã¢ãžãâïŒ
âã¹ã«ãã³é žã®ã·ã¯ãã¢ã«ãã«çœ®æããšããŒã«ã¢
ããšã¹ãã«ã«é¢ãããã®ã§ããã
åœããïŒïŒïŒâãããããã³âïŒâãžã¢ãžãâïŒ
âã¹ã«ãã³é žã®ã·ã¯ãã¢ã«ãã«çœ®æããšããŒã«ã¢
ããšã¹ãã«ã«é¢ãããã®ã§ããã
ããã§ïœã¯çŽïŒããçŽ10ã®æ°ã§ããã
ããã«æ¬çºæã¯
(a) å°ãªããšãïŒã€ã®ã¢ã«ã«ãªå¯æº¶æ§æš¹èïŒãš
(b) å°ãªããšãïŒã€ã®åèšåŒïŒïŒã®ã¢ããšã¹ã
ã«ååç©ããšãããªãããžåããªãã¬ãžã¹ãçµ
æç©ãšããŠæçšãªæå æ§æ··åç©ãå å«ããã
ã«ååç©ããšãããªãããžåããªãã¬ãžã¹ãçµ
æç©ãšããŠæçšãªæå æ§æ··åç©ãå å«ããã
ãã®äžæ¬çºæã¯ãããã®æå
æ§æ··åç©ã§è¢«èŠã
ããåºäœããå å«ããŠããã
ããåºäœããå å«ããŠããã
çºæã®å
·äœç説æ
æ¬çºæã®ãšã¹ãã«ååç©ã¯ãïŒïŒïŒâãããã
ãã³âïŒâãžã¢ãžãâïŒâã¹ã«ãã³é žãã©ã€ãã
çžåœããã·ã¯ãã¢ã«ãã«çœ®æããšããŒã«ãšåå¿ã
ããããšã«ããäœãããšãã§ããããã®åå¿ã¯ä»¥
äžã®åå¿åŒ(A)ã«ãã瀺ãããããã§ã¯ïŒïŒïŒâã
ããããã³âïŒâãžã¢ãžãâïŒâã¹ã«ãã³é žã¯ã
ã©ã€ããšïŒâã·ã¯ãããã·ã«ããšããŒã«ãšããã¬
ã«ãŒãµãŒã§ããã
ãã³âïŒâãžã¢ãžãâïŒâã¹ã«ãã³é žãã©ã€ãã
çžåœããã·ã¯ãã¢ã«ãã«çœ®æããšããŒã«ãšåå¿ã
ããããšã«ããäœãããšãã§ããããã®åå¿ã¯ä»¥
äžã®åå¿åŒ(A)ã«ãã瀺ãããããã§ã¯ïŒïŒïŒâã
ããããã³âïŒâãžã¢ãžãâïŒâã¹ã«ãã³é žã¯ã
ã©ã€ããšïŒâã·ã¯ãããã·ã«ããšããŒã«ãšããã¬
ã«ãŒãµãŒã§ããã
åèšåŒïŒïŒã®ãšã¹ãã«ååç©ã¯é©åœãªæº¶å€äž
ã«ã奜ãŸããã¯ã¹ã«ãã³é žã¯ãã©ã€ãã§ããã¹ã«
ãã³é žãã©ã€ããã¬ã«ãŒãµãŒããŸã溶解ããããš
ã«ããäœããããé©åœãªæº¶å€ã¯ã¢ã»ãã³ããžãªã
ãµã³ãïŒâãã¿ãã³ãŸãã¯ã·ã¯ããããµãã³ãªã©
ãå«ãŸããããã®æ¶²ã«ã·ã¯ãã¢ã«ãã«çœ®æããšã
ãŒã«ã次ãã§æ·»å ããããã®åå¿ã¯ã¢ã«ã«ãªéå±
çé žå¡©ãŸãã¯éçé žå¡©ãã¢ã«ã«ãªåé¡éå±çé žå¡©
ãŸãã¯éçé žå¡©ã第åçŽèèªæã¢ãã³ãŸãã¯ããª
ãžã³ã®ãããªãé žã¹ã«ãã³ãžã€å¡©åºã®ååšäžã«éœ
åããè¡ãããã
ã«ã奜ãŸããã¯ã¹ã«ãã³é žã¯ãã©ã€ãã§ããã¹ã«
ãã³é žãã©ã€ããã¬ã«ãŒãµãŒããŸã溶解ããããš
ã«ããäœããããé©åœãªæº¶å€ã¯ã¢ã»ãã³ããžãªã
ãµã³ãïŒâãã¿ãã³ãŸãã¯ã·ã¯ããããµãã³ãªã©
ãå«ãŸããããã®æ¶²ã«ã·ã¯ãã¢ã«ãã«çœ®æããšã
ãŒã«ã次ãã§æ·»å ããããã®åå¿ã¯ã¢ã«ã«ãªéå±
çé žå¡©ãŸãã¯éçé žå¡©ãã¢ã«ã«ãªåé¡éå±çé žå¡©
ãŸãã¯éçé žå¡©ã第åçŽèèªæã¢ãã³ãŸãã¯ããª
ãžã³ã®ãããªãé žã¹ã«ãã³ãžã€å¡©åºã®ååšäžã«éœ
åããè¡ãããã
ãã®åå¿ã®ãšã¹ãã«åçæç©ã¯åå¿æ··åç©ãã
éåžžã®æ段ã«ãã€ãŠååã§ãã奜ãŸããã¯ãšãã¬
ã³ã¯ãã©ã€ããŸãã¯ãã®ä»ã®æ°Žãšæ··ããåããªã
æœåºæº¶å€ã§æœåºããã€ãã§ä¹Ÿç¥ãããã
éåžžã®æ段ã«ãã€ãŠååã§ãã奜ãŸããã¯ãšãã¬
ã³ã¯ãã©ã€ããŸãã¯ãã®ä»ã®æ°Žãšæ··ããåããªã
æœåºæº¶å€ã§æœåºããã€ãã§ä¹Ÿç¥ãããã
ããžåã®ããªãã¬ãžã¹ãçµæç©ãšããŠæçšãªæ
å æ§æ··åç©ãäœããããå°ãªããšãïŒã€ã®æ¬çºæ
ã®ãšã¹ãã«ååç©ãã¢ã«ã«ãªå¯æº¶æ§ã®æš¹èã®ïŒã€
ãŸãã¯ããã€ããšæ··åãããããã¢ã«ã«ãªå¯æº¶æ§
æš¹èããªãçšèªã¯ãããžåããªãã¬ãžã¹ãçµæç©
ã«ã€ããŠæ®éã«çšããããŠãããã¢ã«ã«ãªæ§æ°Žç³»
çŸå液äžã«å®å šã«æº¶è§£ããæš¹èãæå³ããããã«
ããã§çšããããŠãããé©åœãªã¢ã«ã«ãªå¯æº¶æ§æš¹
èã«ã¯ããšããŒã«âãã«ã ã¢ã«ãããããã©ãã¯
æš¹èãã¯ã¬ãŸãŒã«âãã«ã ã¢ã«ãããããã©ãã¯
æš¹èãããã³ããªããã«ããšããŒã«æš¹èãªã©ã®çŽ
500ããçŽ30000ã®ååéãããã«å¥œãŸããã¯çŽ
1000ããçŽ20000ã®ãã®ãå«ãŸããããããã®ã
ãã©ãã¯æš¹èã¯ãããšããŒã«ãŸãã¯ã¯ã¬ãŸãŒã«ãš
ãã«ã ã¢ã«ããããšã®çž®ååå¿ã«ãã奜ãŸãã調
補ãããå å®å®æ§ãæ°Žäžæº¶æ§ãã¢ã«ã«ãªå¯æº¶æ§ã
ããŠç®è圢ææ§ãªã©ã«ããç¹åŸŽã¥ããããããã€
ãšã奜ãŸããçšåºŠã®ããã©ãã¯æš¹èã¯ãã¡ã¿ãâ
ããã³ãã©âã¯ã¬ãŸãŒã«æ··åç©ãšãã«ã ã¢ã«ãã
ããšã®çž®ååå¿ã«ãããçŽ500ããçŽ5000ã®åå
éããã€ãã®ãäœãããããããé©åœãªæš¹èã®èª¿
補äŸã¯ç±³åœç¹èš±ç¬¬4377631å·ãå第4529682å·ãã
ã³å第4587196å·äžã«èª¬æãããŠããããããã®
ç¹èš±ã¯ããããã¡ããŒãã»ããŠãã€æ°ã«å¯ŸããŠèª
å¯ããããã®ã§ãããããã«åèãšããŠè¿°ã¹ãŠã
ãã
å æ§æ··åç©ãäœããããå°ãªããšãïŒã€ã®æ¬çºæ
ã®ãšã¹ãã«ååç©ãã¢ã«ã«ãªå¯æº¶æ§ã®æš¹èã®ïŒã€
ãŸãã¯ããã€ããšæ··åãããããã¢ã«ã«ãªå¯æº¶æ§
æš¹èããªãçšèªã¯ãããžåããªãã¬ãžã¹ãçµæç©
ã«ã€ããŠæ®éã«çšããããŠãããã¢ã«ã«ãªæ§æ°Žç³»
çŸå液äžã«å®å šã«æº¶è§£ããæš¹èãæå³ããããã«
ããã§çšããããŠãããé©åœãªã¢ã«ã«ãªå¯æº¶æ§æš¹
èã«ã¯ããšããŒã«âãã«ã ã¢ã«ãããããã©ãã¯
æš¹èãã¯ã¬ãŸãŒã«âãã«ã ã¢ã«ãããããã©ãã¯
æš¹èãããã³ããªããã«ããšããŒã«æš¹èãªã©ã®çŽ
500ããçŽ30000ã®ååéãããã«å¥œãŸããã¯çŽ
1000ããçŽ20000ã®ãã®ãå«ãŸããããããã®ã
ãã©ãã¯æš¹èã¯ãããšããŒã«ãŸãã¯ã¯ã¬ãŸãŒã«ãš
ãã«ã ã¢ã«ããããšã®çž®ååå¿ã«ãã奜ãŸãã調
補ãããå å®å®æ§ãæ°Žäžæº¶æ§ãã¢ã«ã«ãªå¯æº¶æ§ã
ããŠç®è圢ææ§ãªã©ã«ããç¹åŸŽã¥ããããããã€
ãšã奜ãŸããçšåºŠã®ããã©ãã¯æš¹èã¯ãã¡ã¿ãâ
ããã³ãã©âã¯ã¬ãŸãŒã«æ··åç©ãšãã«ã ã¢ã«ãã
ããšã®çž®ååå¿ã«ãããçŽ500ããçŽ5000ã®åå
éããã€ãã®ãäœãããããããé©åœãªæš¹èã®èª¿
補äŸã¯ç±³åœç¹èš±ç¬¬4377631å·ãå第4529682å·ãã
ã³å第4587196å·äžã«èª¬æãããŠããããããã®
ç¹èš±ã¯ããããã¡ããŒãã»ããŠãã€æ°ã«å¯ŸããŠèª
å¯ããããã®ã§ãããããã«åèãšããŠè¿°ã¹ãŠã
ãã
æå
æ§æ··åç©äžã®åèšåŒïŒïŒã®ãšã¹ãã«åå
ç©ã®å²åã¯ã奜ãŸããã¯çŽïŒããçŽ50ããŒã»ã³ã
éã®ç¯å²ã§ãããããã«å¥œãŸããã¯æå æ§æ··åç©
ã®éæ®çºæ§æåïŒå³ã¡æº¶å€ãã¬ãã«ããïŒã®éé
ã®çŽïŒããçŽ30ããŒã»ã³ãéã§ãããæå æ§æ··å
äžã®ã¢ã«ã«ãªå¯æº¶æ§æš¹èã®å²åã¯ã奜ãŸããã¯çŽ
50ããçŽ95ããŒã»ã³ãéã®ç¯å²ã§ãããããã«å¥œ
ãŸããã¯æå æ§æ··åç©ã®éæ®çºæ§æåïŒå³ã¡æº¶å€
ãã¬ãã«ããïŒã®çŽ70ããçŽ92ããŒã»ã³ãã§ã
ãã
ç©ã®å²åã¯ã奜ãŸããã¯çŽïŒããçŽ50ããŒã»ã³ã
éã®ç¯å²ã§ãããããã«å¥œãŸããã¯æå æ§æ··åç©
ã®éæ®çºæ§æåïŒå³ã¡æº¶å€ãã¬ãã«ããïŒã®éé
ã®çŽïŒããçŽ30ããŒã»ã³ãéã§ãããæå æ§æ··å
äžã®ã¢ã«ã«ãªå¯æº¶æ§æš¹èã®å²åã¯ã奜ãŸããã¯çŽ
50ããçŽ95ããŒã»ã³ãéã®ç¯å²ã§ãããããã«å¥œ
ãŸããã¯æå æ§æ··åç©ã®éæ®çºæ§æåïŒå³ã¡æº¶å€
ãã¬ãã«ããïŒã®çŽ70ããçŽ92ããŒã»ã³ãã§ã
ãã
ãããã®æå
æ§æ··åç©ã¯ãŸã溶å€ãè²çŽ ããªã
ãå€ãå¯å¡æ§ãé床å¢å å€ãéã€ãªã³æ§çé¢æŽ»æ§
å€ãªã©ã®ãããªãéåžžã®ããªãã¬ãžã¹ãçµæç©ã®
æåãå«ãããšãã§ããããããã®è¿œå çã®æå
ã¯ãåºäœäžã«æ¶²ãå¡åžããåã«ããã©ãã¯æš¹èãš
æå å€ã®æº¶æ¶²ã«æ·»å ããããšãã§ããã
ãå€ãå¯å¡æ§ãé床å¢å å€ãéã€ãªã³æ§çé¢æŽ»æ§
å€ãªã©ã®ãããªãéåžžã®ããªãã¬ãžã¹ãçµæç©ã®
æåãå«ãããšãã§ããããããã®è¿œå çã®æå
ã¯ãåºäœäžã«æ¶²ãå¡åžããåã«ããã©ãã¯æš¹èãš
æå å€ã®æº¶æ¶²ã«æ·»å ããããšãã§ããã
é©åœãªæº¶å€ã®äŸãšããŠã¯ãšãã«ã»ã«ãœã«ãã¢ã»
ããŒããé ¢é žããã«ããã·ã¬ã³ãä¹³é žãšãã«ãã
ããã¬ã³ã°ãªã³ãŒã«ã¢ã«ãã«ãšãŒãã«ã¢ã»ããŒ
ãããããã®æ··åç©ãªã©ãå«ãŸããã溶å€ã®å¥œãŸ
ããåéã¯ãæš¹èãšæå å€ã®åèšãåºæºãšããŠé
éã§çŽ50ïŒ ããçŽ500ïŒ ã§ãããã«å¥œãŸããã¯çŽ
100ïŒ ããçŽ300ïŒ ã§ããã
ããŒããé ¢é žããã«ããã·ã¬ã³ãä¹³é žãšãã«ãã
ããã¬ã³ã°ãªã³ãŒã«ã¢ã«ãã«ãšãŒãã«ã¢ã»ããŒ
ãããããã®æ··åç©ãªã©ãå«ãŸããã溶å€ã®å¥œãŸ
ããåéã¯ãæš¹èãšæå å€ã®åèšãåºæºãšããŠé
éã§çŽ50ïŒ ããçŽ500ïŒ ã§ãããã«å¥œãŸããã¯çŽ
100ïŒ ããçŽ300ïŒ ã§ããã
掻æ§åè²çŽ ã®äŸã¯ãçŽ400ã460nïœã®å
ãšãã«
ã®ãåžåãããã®ãäŸãã°ãã¢ã¹ããã©ãŠã³ïŒ¢
ïŒC.I.No.12010ïŒïŒãã¢ã¹ããã©ãŠã³RRïŒC.I.No.
11285ïŒïŒïŒâããããã·âïŒïŒïŒâãããããã³
ïŒC.I.No.75480ïŒããã³ãããªã³ã€ãšããŒïŒ¡ïŒC.I.No.
47000ïŒãããã³çŽ300ã340nïœã®å ãšãã«ã®ãåž
åãããã®ãäŸãã°ïŒïŒïŒâãžããšãã«ãªããµãŸ
ãŒã«ïŒPPOâChem.Abs.Reg.No.92â71âïŒïŒã
ãã³ïŒâïŒïŒâãããšãã«ïŒâïŒâããšãã«âãã³
ãŸãªããµãŸãŒã«ïŒPBBOâChem.Abs.Reg.No.
17064â47âïŒïŒããªã©ãå«ãŸããã
ã®ãåžåãããã®ãäŸãã°ãã¢ã¹ããã©ãŠã³ïŒ¢
ïŒC.I.No.12010ïŒïŒãã¢ã¹ããã©ãŠã³RRïŒC.I.No.
11285ïŒïŒïŒâããããã·âïŒïŒïŒâãããããã³
ïŒC.I.No.75480ïŒããã³ãããªã³ã€ãšããŒïŒ¡ïŒC.I.No.
47000ïŒãããã³çŽ300ã340nïœã®å ãšãã«ã®ãåž
åãããã®ãäŸãã°ïŒïŒïŒâãžããšãã«ãªããµãŸ
ãŒã«ïŒPPOâChem.Abs.Reg.No.92â71âïŒïŒã
ãã³ïŒâïŒïŒâãããšãã«ïŒâïŒâããšãã«âãã³
ãŸãªããµãŸãŒã«ïŒPBBOâChem.Abs.Reg.No.
17064â47âïŒïŒããªã©ãå«ãŸããã
æ¬çºæã®æå
æ§æ··åç©ãšãšãã«çšããããšã®ã§
ããã³ã³ãã©ã¹ãçšè²çŽ æ·»å å€ã®äŸã¯ãœã«ãã³ã
ã¬ãã24ïŒC.I.No.26105ïŒãããŒã·ãã¯ãã¯ã·ã³
ïŒC.I.No.42514ïŒããªã€ã«ãã«ãŒïŒ®ïŒC.I.No.61555ïŒã
ãã³ã«ã«ã³ã¬ããïŒC.I.No.26125ïŒãªã©ãå«ãŸ
ããæš¹èãšæå å€ãšã®åèšéãåºæºã«ãééã§10
ïŒ ãŸã§ã®éã§çšããããã
ããã³ã³ãã©ã¹ãçšè²çŽ æ·»å å€ã®äŸã¯ãœã«ãã³ã
ã¬ãã24ïŒC.I.No.26105ïŒãããŒã·ãã¯ãã¯ã·ã³
ïŒC.I.No.42514ïŒããªã€ã«ãã«ãŒïŒ®ïŒC.I.No.61555ïŒã
ãã³ã«ã«ã³ã¬ããïŒC.I.No.26125ïŒãªã©ãå«ãŸ
ããæš¹èãšæå å€ãšã®åèšéãåºæºã«ãééã§10
ïŒ ãŸã§ã®éã§çšããããã
ãªããå€ã¯æš¹èãšæå
å€ãšã®åèšéãåºæºã«ã
ééã§ïŒïŒ ãŸã§ã®éã§çšããããšãã§ããããªã
ãå€ãšããŠé©åœãªãã®ã®ïŒã€ã¯éã€ãªã³æ§ã®ã·ãª
ã³ã³å€æ§ããªãã§ãããéã€ãªã³çé¢æŽ»æ§å€ãã
ã®ç®çã«çšããããšãã§ãããããã¯äŸãã°ãã
ã«ããšããã·ããªïŒãšãã¬ã³ãªãã·ïŒãšã¿ããŒ
ã«ããªã¯ãã«ããšããã·ïŒãšãã¬ã³ãªãã·ïŒãšã¿
ããŒã«ãããã³ãžããã«ããšããã·ããªïŒãšãã¬
ã³ãªãã·ïŒãšã¿ããŒã«ãå«ãŸããã
ééã§ïŒïŒ ãŸã§ã®éã§çšããããšãã§ããããªã
ãå€ãšããŠé©åœãªãã®ã®ïŒã€ã¯éã€ãªã³æ§ã®ã·ãª
ã³ã³å€æ§ããªãã§ãããéã€ãªã³çé¢æŽ»æ§å€ãã
ã®ç®çã«çšããããšãã§ãããããã¯äŸãã°ãã
ã«ããšããã·ããªïŒãšãã¬ã³ãªãã·ïŒãšã¿ããŒ
ã«ããªã¯ãã«ããšããã·ïŒãšãã¬ã³ãªãã·ïŒãšã¿
ããŒã«ãããã³ãžããã«ããšããã·ããªïŒãšãã¬
ã³ãªãã·ïŒãšã¿ããŒã«ãå«ãŸããã
䜿çšã§ããå¯å¡å€ã¯äŸãã°ããªâïŒÎ²âã¯ãã
ãšãã«ïŒâãªã³é žãšã¹ãã«ãã¹ãã¢ãªã³é žããžã«
ã³ãã¢ãŒãããªãããã¬ã³ãã¢ã»ã¿ãŒã«æš¹èãã
ãšããã·æš¹èããã³ã¢ã«ãã«æš¹èãªã©ãå«ãŸãã
æš¹èãšæå å€ãšã®åèšéãåºæºã«ãééã§10ïŒ ãŸ
ã§ã®éã§çšããããã
ãšãã«ïŒâãªã³é žãšã¹ãã«ãã¹ãã¢ãªã³é žããžã«
ã³ãã¢ãŒãããªãããã¬ã³ãã¢ã»ã¿ãŒã«æš¹èãã
ãšããã·æš¹èããã³ã¢ã«ãã«æš¹èãªã©ãå«ãŸãã
æš¹èãšæå å€ãšã®åèšéãåºæºã«ãééã§10ïŒ ãŸ
ã§ã®éã§çšããããã
䜿çšã§ããé床å¢å å€ã¯äŸãã°ãã¯ãªã³é
žãã
ã³ãã³é žãŸãã¯ãããã±ã€ç®é žãå«ãŸããæš¹èãš
æå å€ãšã®åèšéãåºæºã«ãééã§20ïŒ ãŸã§ã®é
ã§çšããããã
ã³ãã³é žãŸãã¯ãããã±ã€ç®é žãå«ãŸããæš¹èãš
æå å€ãšã®åèšéãåºæºã«ãééã§20ïŒ ãŸã§ã®é
ã§çšããããã
調補ãããæå
æ§ã¬ãžã¹ãæ··åç©ã¯ãã€ããã³
ã°ãã¹ãã¬ã€ã³ã°ãã¯ãŒãªã³ã°ããã³ã¹ãã³å¡åž
ãªã©ãå«ããããªãã¬ãžã¹ãæè¡ã§çšããããŠã
ãæ®éã®æ¹æ³ã«ããåºäœã«æœããããã¹ãã³å¡åž
ã®ãšããäŸãã°ã¬ãžã¹ãæ··åç©ã¯ãçšããããã¹
ãã³è£ 眮ã®äžãããã圢æãšã¹ãã³å·¥çšã®æéé
ã«ãããææã®åã¿ã®å¡èãåŸãããã«åºäœæå
ã®ããŒã»ã³ãã調æŽããããé©åœãªåºäœã«ã¯ã·ãª
ã³ã³ãã¢ã«ãããŠã ãŸãã¯ããªãæ§æš¹èãäºé žå
ããé žãããŒãããäºé žåããçŽ ãã·ãªã³ã³æš¹
èããåã¬ãªãŠã ãçªåããçŽ ãã¿ã³ã¿ã«ãé ã
ããªã·ãªã³ã³ãã»ã©ããã¯ããã³ã¢ã«ãããŠã ïŒ
é æ··åç©ãªã©ãå«ãŸããã
ã°ãã¹ãã¬ã€ã³ã°ãã¯ãŒãªã³ã°ããã³ã¹ãã³å¡åž
ãªã©ãå«ããããªãã¬ãžã¹ãæè¡ã§çšããããŠã
ãæ®éã®æ¹æ³ã«ããåºäœã«æœããããã¹ãã³å¡åž
ã®ãšããäŸãã°ã¬ãžã¹ãæ··åç©ã¯ãçšããããã¹
ãã³è£ 眮ã®äžãããã圢æãšã¹ãã³å·¥çšã®æéé
ã«ãããææã®åã¿ã®å¡èãåŸãããã«åºäœæå
ã®ããŒã»ã³ãã調æŽããããé©åœãªåºäœã«ã¯ã·ãª
ã³ã³ãã¢ã«ãããŠã ãŸãã¯ããªãæ§æš¹èãäºé žå
ããé žãããŒãããäºé žåããçŽ ãã·ãªã³ã³æš¹
èããåã¬ãªãŠã ãçªåããçŽ ãã¿ã³ã¿ã«ãé ã
ããªã·ãªã³ã³ãã»ã©ããã¯ããã³ã¢ã«ãããŠã ïŒ
é æ··åç©ãªã©ãå«ãŸããã
åè¿°ã®æ¹æ³ã§äœãããããªãã¬ãžã¹ãå¡èã¯ã
ç±çã«çé·ãããã·ãªã³ã³ïŒäºé žåããçŽ è¢«èŠãŠ
ãšãã«ä»äžããã®ã«ç¹ã«é©ããŠãããããã¯ãã€
ã¯ãããã»ããµããã³ãã®ä»ã®åŸ®å°ãªéç©åè·¯éš
åã®çç£ã«å©çšããããã¢ã«ãããŠã ïŒé žåã¢ã«
ãããŠã ãŠãšããåæ§ã«çšããããããšãã§ã
ããåºäœã¯ãŸãåçš®ã®ããªãæ§æš¹èãç¹ã«ããªãš
ã¹ãã«ã®ãããªéæã®ãã®ã§æ§æãããããšãã
ãã
ç±çã«çé·ãããã·ãªã³ã³ïŒäºé žåããçŽ è¢«èŠãŠ
ãšãã«ä»äžããã®ã«ç¹ã«é©ããŠãããããã¯ãã€
ã¯ãããã»ããµããã³ãã®ä»ã®åŸ®å°ãªéç©åè·¯éš
åã®çç£ã«å©çšããããã¢ã«ãããŠã ïŒé žåã¢ã«
ãããŠã ãŠãšããåæ§ã«çšããããããšãã§ã
ããåºäœã¯ãŸãåçš®ã®ããªãæ§æš¹èãç¹ã«ããªãš
ã¹ãã«ã®ãããªéæã®ãã®ã§æ§æãããããšãã
ãã
ã¬ãžã¹ãçµæç©æº¶æ¶²ãåºäœäžã«å¡åžãããåŸ
ã«ãåºäœã¯çŽ80°ã105âã®æž©åºŠã§å®è³ªçã«ãã¹ãŠ
ã®æº¶å€ãèžçºãããŸã§ããŒã¯ãããåºäœäžã«ã¯å
ã¿ïŒãã¯ãã³çšåºŠã®ãããªãã¬ãžã¹ãçµæç©ã®ã
ããåäžãªè¢«èŠãŸãã¯ç®èãæ®çããããã®è¢«èŠ
ãã¿åºäœã¯ãã€ãã§é©åœãªãã¹ã¯ããã¬ãããã¹
ãã³ã·ã«ããã³ãã¬ãŒããªã©ãçšããããšã«ãã
äœããããææã®é²å å³åœ¢ç¶ã«èŒ»å°ç·ãç¹ã«çŽ«å€
ç·ã«å¯Ÿãé²å ãããã
ã«ãåºäœã¯çŽ80°ã105âã®æž©åºŠã§å®è³ªçã«ãã¹ãŠ
ã®æº¶å€ãèžçºãããŸã§ããŒã¯ãããåºäœäžã«ã¯å
ã¿ïŒãã¯ãã³çšåºŠã®ãããªãã¬ãžã¹ãçµæç©ã®ã
ããåäžãªè¢«èŠãŸãã¯ç®èãæ®çããããã®è¢«èŠ
ãã¿åºäœã¯ãã€ãã§é©åœãªãã¹ã¯ããã¬ãããã¹
ãã³ã·ã«ããã³ãã¬ãŒããªã©ãçšããããšã«ãã
äœããããææã®é²å å³åœ¢ç¶ã«èŒ»å°ç·ãç¹ã«çŽ«å€
ç·ã«å¯Ÿãé²å ãããã
é²å
ãããã¬ãžã¹ã被èŠæžã¿åºäœã¯ã次ã«ã¢ã«
ã«ãªæ§ã®çŸå液äžã«æµžæŒ¬ãããããã®æ¶²ã¯å¥œãŸã
ããäŸãã°çªçŽ ã¬ã¹æ¹æã«ãã€ãŠããããŸããã
ããã¹ãã¬ãŒçŸåãŸãã¯ããã«çŸåã®ãããªä»ã®
çŸåæ³ããŸãã¯ããããçµåãããã®ãçšããã
ãšãã§ããã
ã«ãªæ§ã®çŸå液äžã«æµžæŒ¬ãããããã®æ¶²ã¯å¥œãŸã
ããäŸãã°çªçŽ ã¬ã¹æ¹æã«ãã€ãŠããããŸããã
ããã¹ãã¬ãŒçŸåãŸãã¯ããã«çŸåã®ãããªä»ã®
çŸåæ³ããŸãã¯ããããçµåãããã®ãçšããã
ãšãã§ããã
åºäœã¯é²å
ãããåºåãããã¹ãŠã®ã¬ãžã¹ãå¡
èã溶解ããããŸã§çŸå液äžã«å ¥ããŠããããã
æ®éçŽ30ç§ããçŽïŒåã®çŸåæéãå©çšãããã
ã¢ã«ã«ãªæ§çŸå液ã®é©åœãªãã®ã®äŸã¯æ°Žé žåãã
ãªãŠã ãæ°Žé žåã«ãªãŠã ãããã©ã¡ãã«ã¢ã³ã¢ã
ãŠã æ°Žé žåç©ãã³ãªã³ããªã³é žãããªãŠã ãçé ž
ãããªãŠã ãã¡ã¿ã±ã€é žãããªãŠã ãªã©ã®æ°Žæº¶æ¶²
ã§ããã
èã溶解ããããŸã§çŸå液äžã«å ¥ããŠããããã
æ®éçŽ30ç§ããçŽïŒåã®çŸåæéãå©çšãããã
ã¢ã«ã«ãªæ§çŸå液ã®é©åœãªãã®ã®äŸã¯æ°Žé žåãã
ãªãŠã ãæ°Žé žåã«ãªãŠã ãããã©ã¡ãã«ã¢ã³ã¢ã
ãŠã æ°Žé žåç©ãã³ãªã³ããªã³é žãããªãŠã ãçé ž
ãããªãŠã ãã¡ã¿ã±ã€é žãããªãŠã ãªã©ã®æ°Žæº¶æ¶²
ã§ããã
çŸå液ããå¡åžãã¿ãŠãšãããšãåºããåŸã§ã
ãããã¯å¥œãŸããã¯è±ã€ãªã³æ°Žã®ãªã³ã¹ãããã«
奜ãŸããã¯çªçŽ ã§ãããŸããªãããªã³ã¹ãããã€
ãã§ãã€ã«ã¿ãã空æ°ã§å¹ä»ã也ç¥ãããå¡èã®
æ¥çæ§ãå¢å ããšããã³ã°æ¶²ããã³ãã®ä»ã®ç©è³ª
ã«å¯ŸããååŠçæµææ§ãå¢å€§ããããããçŸååŸ
ã®ç±åŠçãŸãã¯ããŒãã³ã°ãè¡ããããçŸååŸã®
ç±åŠçã¯å¡èãšåºäœãšãå¡èã®è»åç¹ä»¥äžã®æž©åºŠ
ã§ãªãŒãã³äžã§ããŒãã³ã°ããŠè¡ãããã
ãããã¯å¥œãŸããã¯è±ã€ãªã³æ°Žã®ãªã³ã¹ãããã«
奜ãŸããã¯çªçŽ ã§ãããŸããªãããªã³ã¹ãããã€
ãã§ãã€ã«ã¿ãã空æ°ã§å¹ä»ã也ç¥ãããå¡èã®
æ¥çæ§ãå¢å ããšããã³ã°æ¶²ããã³ãã®ä»ã®ç©è³ª
ã«å¯ŸããååŠçæµææ§ãå¢å€§ããããããçŸååŸ
ã®ç±åŠçãŸãã¯ããŒãã³ã°ãè¡ããããçŸååŸã®
ç±åŠçã¯å¡èãšåºäœãšãå¡èã®è»åç¹ä»¥äžã®æž©åºŠ
ã§ãªãŒãã³äžã§ããŒãã³ã°ããŠè¡ãããã
å·¥æ¥çã®å¿çšãç¹ã«ã·ãªã³ã³ïŒäºé
žåããçŽ å
ã®åºäœäžã«åŸ®å°åè·¯ãŠããããäœãéã«ãçŸåã
ããåºäœã¯ã€ãã§ãããã¢ãããããåæ°ŽçŽ é žãš
ããã³ã°æ¶²ãŸãã¯ãã©ãºãã¬ã¹ãšããã§åŠçãã
ããæ¬çºæã®ã¬ãžã¹ãçµæç©ã¯ãé žãšããã³ã°æ¶²
ãŸãã¯ãã©ãºãã¬ã¹ã«æµææ§ã§ãããæªé²å ã®ã¬
ãžã¹ãã®å¡åžãããåºåã®åºäœãå åã«ä¿è·ã
ãã
ã®åºäœäžã«åŸ®å°åè·¯ãŠããããäœãéã«ãçŸåã
ããåºäœã¯ã€ãã§ãããã¢ãããããåæ°ŽçŽ é žãš
ããã³ã°æ¶²ãŸãã¯ãã©ãºãã¬ã¹ãšããã§åŠçãã
ããæ¬çºæã®ã¬ãžã¹ãçµæç©ã¯ãé žãšããã³ã°æ¶²
ãŸãã¯ãã©ãºãã¬ã¹ã«æµææ§ã§ãããæªé²å ã®ã¬
ãžã¹ãã®å¡åžãããåºåã®åºäœãå åã«ä¿è·ã
ãã
æåŸã«ãããªãã¬ãžã¹ãå¡èã®æ®çéšåã¯ãæ®
éã®ããªãã¬ãžã¹ãå¥é¢æ段ã«ãããšããããã
åºäœé¢ããåãé€ãããã
éã®ããªãã¬ãžã¹ãå¥é¢æ段ã«ãããšããããã
åºäœé¢ããåãé€ãããã
æ¬çºæã¯ä»¥äžã®å®æœäŸã«ããããã«è©³çŽ°ã«èª¬æ
ãããããã¹ãŠã®éšãšããŒã»ã³ããšã¯ç¹ã«æããª
ãéãééã«ãããã®ã§ããã
ãããããã¹ãŠã®éšãšããŒã»ã³ããšã¯ç¹ã«æããª
ãéãééã«ãããã®ã§ããã
å®æœäŸ ïŒ
ïŒïŒïŒâãããããã³âïŒâãžã¢ãžãâïŒâã¹
ã«ãã³é žã®ïŒâã·ã¯ãããã·ã«ããšããŒã«ã¢ã
ãšã¹ãã«ã®åæ åå¿ãã©ã¹ã³ã«33.36ïœã®ïŒâãªããœâïŒïŒïŒ
âãžãããâïŒâãžã¢ãŸâïŒâããã¿ã¬ã³ã¹ã«ã
ãã«ã¯ãã©ã€ãïŒãŸãïŒïŒïŒâãããããã³âïŒ
âãžã¢ãžãâïŒâã¹ã«ãã³é žã¯ãã©ã€ããšããŠã
ç¥ãããŠããïŒã21.88ïœã®ïŒâã·ã¯ãããã·ã«ã
ãšããŒã«ãããã³300mlã®ïœâãžãªããµã³ãå ã
ããããæ¹æããŠåºäœã溶解ããåŸã§199mlã®èž
çæ°Žäžã«13.17ïœã®çé žãããªãŠã ã®æ¶²ã20åã
ããŠæ·»å ãããæ··åç©ã¯åšå²æž©åºŠã§16æéæ¹æã
ãã
ã«ãã³é žã®ïŒâã·ã¯ãããã·ã«ããšããŒã«ã¢ã
ãšã¹ãã«ã®åæ åå¿ãã©ã¹ã³ã«33.36ïœã®ïŒâãªããœâïŒïŒïŒ
âãžãããâïŒâãžã¢ãŸâïŒâããã¿ã¬ã³ã¹ã«ã
ãã«ã¯ãã©ã€ãïŒãŸãïŒïŒïŒâãããããã³âïŒ
âãžã¢ãžãâïŒâã¹ã«ãã³é žã¯ãã©ã€ããšããŠã
ç¥ãããŠããïŒã21.88ïœã®ïŒâã·ã¯ãããã·ã«ã
ãšããŒã«ãããã³300mlã®ïœâãžãªããµã³ãå ã
ããããæ¹æããŠåºäœã溶解ããåŸã§199mlã®èž
çæ°Žäžã«13.17ïœã®çé žãããªãŠã ã®æ¶²ã20åã
ããŠæ·»å ãããæ··åç©ã¯åšå²æž©åºŠã§16æéæ¹æã
ãã
åå¿æ··åç©ã¯1200mlã®èžçæ°Žãš25mlã®12NHCl
ãšã®äžã«æ³šå ããããæ²æ®¿ããçæç©ãã¬ã©ã¹æ£
ã§ããŒã«ãŒå£ã«ãããä»ãããšé»è²ã®åºäœçµæ¶ãš
ãªã€ãããã®åå¿æ··åç©äžã«çŽ800mlã®ã¡ãã¬ã³
ã¯ãã©ã€ããå ããåºäœçµæ¶ã溶解ããããã®æ··
åç©ãåé¢ããŒãäžã«å ¥ããïŒïŒ çé žãããªãŠã
氎溶液ïŒåã300mlã®èžçæ°Žã§ïŒåã飜åé£å¡©æ°Ž
ã§ïŒåæŽãããããŠç¡æ°Žç¡«é žãã°ãã·ãŠã ã§ä¹Ÿç¥
ãéãããã
ãšã®äžã«æ³šå ããããæ²æ®¿ããçæç©ãã¬ã©ã¹æ£
ã§ããŒã«ãŒå£ã«ãããä»ãããšé»è²ã®åºäœçµæ¶ãš
ãªã€ãããã®åå¿æ··åç©äžã«çŽ800mlã®ã¡ãã¬ã³
ã¯ãã©ã€ããå ããåºäœçµæ¶ã溶解ããããã®æ··
åç©ãåé¢ããŒãäžã«å ¥ããïŒïŒ çé žãããªãŠã
氎溶液ïŒåã300mlã®èžçæ°Žã§ïŒåã飜åé£å¡©æ°Ž
ã§ïŒåæŽãããããŠç¡æ°Žç¡«é žãã°ãã·ãŠã ã§ä¹Ÿç¥
ãéãããã
èžçºããŠæ®çããé»è²åºäœã¯æžå§äžã«ç©ºæ°æµã®
èš±ã§ä¹Ÿç¥ã38.4ïœã®é»è²åºäœãåŸãïŒçè«éã®76
ïŒ ã®çæç©ãåŸãããã
èš±ã§ä¹Ÿç¥ã38.4ïœã®é»è²åºäœãåŸãïŒçè«éã®76
ïŒ ã®çæç©ãåŸãããã
çæç©ã¯IRããããã³NMRããã³UVåæãª
ã©ã«ãããè¡šé¡ã®æ§é ã§ããããšã確èªãããã
ã©ã«ãããè¡šé¡ã®æ§é ã§ããããšã確èªãããã
èç¹ 134ã136âïŒå解ïŒ
IRïŒKBrïŒïŒ3100ïŒç°ïŒ£âïŒã2851ã2924ïŒèèªæ
âïŒã2143ïŒãžã¢ãŸïŒã1360ã1143ïŒã¹ã«ãã³
é žãšã¹ãã«ã®ïŒ³â䌞瞮ïŒã870ïŒïœâãžçœ®æã
ã³ãŒã³ïŒcm-1ã1 HâNMRïŒDMSOâD6ïŒïŒÏ1.63ãïŒïŒïŒ5Hãç°
ãããã³ïŒã8.2ã9.2ïŒ11Hãèèªæãããã³ïŒ UVïŒCH2Cl2ïŒCH3OHïŒïŒïŒïŒïŒïŒ303nïœ
ïŒ4919ïŒã323nïœïŒ5270ïŒ375nïœïŒ7027ïŒ å®æœäŸ ïŒ ïŒïŒïŒâãããããã³âïŒâãžã¢ãžãâïŒâã¹
ã«ãã³é žã®ïŒâã·ã¯ããã³ãã«ããšããŒã«ã¢ã
ãšã¹ãã«ã®åæ 容åšã«11.8ïœã®ïŒâãªã¯ãœâïŒïŒïŒâãžããã
âïŒâãžã¢ãŸâããã¿ã¬ã³âïŒâã¹ã«ããã«ã¯ã
ã©ã€ãïŒãŸãïŒïŒïŒâãããããã³âïŒâãžã¢ãž
ãâïŒâã¹ã«ãã³é žã¯ãã©ã€ããšããŠãç¥ãããŠ
ããïŒã7.5ïœã®ïŒâã·ã¯ããã³ãã«ããšããŒã«ã
ããã³125mlã®ïœâãžãªããµã³ãå ãããããã
ã®æ¶²ã«47mlã®10ïŒ çé žãããªãŠã 溶液ã15åéã
ããŠæ·»å ãããã
âïŒã2143ïŒãžã¢ãŸïŒã1360ã1143ïŒã¹ã«ãã³
é žãšã¹ãã«ã®ïŒ³â䌞瞮ïŒã870ïŒïœâãžçœ®æã
ã³ãŒã³ïŒcm-1ã1 HâNMRïŒDMSOâD6ïŒïŒÏ1.63ãïŒïŒïŒ5Hãç°
ãããã³ïŒã8.2ã9.2ïŒ11Hãèèªæãããã³ïŒ UVïŒCH2Cl2ïŒCH3OHïŒïŒïŒïŒïŒïŒ303nïœ
ïŒ4919ïŒã323nïœïŒ5270ïŒ375nïœïŒ7027ïŒ å®æœäŸ ïŒ ïŒïŒïŒâãããããã³âïŒâãžã¢ãžãâïŒâã¹
ã«ãã³é žã®ïŒâã·ã¯ããã³ãã«ããšããŒã«ã¢ã
ãšã¹ãã«ã®åæ 容åšã«11.8ïœã®ïŒâãªã¯ãœâïŒïŒïŒâãžããã
âïŒâãžã¢ãŸâããã¿ã¬ã³âïŒâã¹ã«ããã«ã¯ã
ã©ã€ãïŒãŸãïŒïŒïŒâãããããã³âïŒâãžã¢ãž
ãâïŒâã¹ã«ãã³é žã¯ãã©ã€ããšããŠãç¥ãããŠ
ããïŒã7.5ïœã®ïŒâã·ã¯ããã³ãã«ããšããŒã«ã
ããã³125mlã®ïœâãžãªããµã³ãå ãããããã
ã®æ¶²ã«47mlã®10ïŒ çé žãããªãŠã 溶液ã15åéã
ããŠæ·»å ãããã
åå¿æ··åç©ã¯16æéåšå²æž©åºŠã§æ¹æãããã
ãã®æ··åç©ã¯800mlã®æ°Žäžã«æ³šå ããã500mlã®
ã¡ãã¬ã³ã¯ãã©ã€ãã§æœåºãããããã®æ¶²ã¯50ml
ã®10ïŒ çé žãããªãŠã 液ã§ïŒåãæ°Žã§ïŒåããã
ãŠé£å¡©æ¶²ã§ïŒåæŽãããç¡«é žãã°ãã·ãŠã ã§ä¹Ÿç¥
ããããããŠéãããã
ã¡ãã¬ã³ã¯ãã©ã€ãã§æœåºãããããã®æ¶²ã¯50ml
ã®10ïŒ çé žãããªãŠã 液ã§ïŒåãæ°Žã§ïŒåããã
ãŠé£å¡©æ¶²ã§ïŒåæŽãããç¡«é žãã°ãã·ãŠã ã§ä¹Ÿç¥
ããããããŠéãããã
ãã®æ¶²ã¯æžå§äžã«æ¿çž®ãããã·ã¯ããããµã³ã
å ããŠç²æ«åãããé«ç空äžã«ä¹Ÿç¥ãããŠ13.5ïœ
ã®çæç©ãšãªã€ããçè«å€ã®78ïŒ ã
å ããŠç²æ«åãããé«ç空äžã«ä¹Ÿç¥ãããŠ13.5ïœ
ã®çæç©ãšãªã€ããçè«å€ã®78ïŒ ã
çæç©ã¯IRããããã³NMRããã³UVåæã«
ããæ®éã®æ§é ã§ããããšã確èªãããã
ããæ®éã®æ§é ã§ããããšã確èªãããã
èç¹ 133ã135âïŒå解ïŒ
IRïŒKBrïŒïŒ3072ïŒç°ïŒ£âïŒã2948ã2858ïŒèèªæ
âïŒã2145ïŒãžã¢ãŸïŒã1359ã1144ïŒã¹ã«ãã³
é žãšã¹ãã«ã®ïŒ³â䌞瞮ïŒã869ïŒïœâãžçœ®æã
ã³ãŒã³ïŒcm-1ã1 HâNMRïŒDOSOâD6ïŒïŒÎŽ1.0ã2.2ïŒ9Hãèèªæ
ãããã³ïŒã6.6ã8.5ïŒ5Hãç°ãããã³ïŒã
âïŒã2145ïŒãžã¢ãŸïŒã1359ã1144ïŒã¹ã«ãã³
é žãšã¹ãã«ã®ïŒ³â䌞瞮ïŒã869ïŒïœâãžçœ®æã
ã³ãŒã³ïŒcm-1ã1 HâNMRïŒDOSOâD6ïŒïŒÎŽ1.0ã2.2ïŒ9Hãèèªæ
ãããã³ïŒã6.6ã8.5ïŒ5Hãç°ãããã³ïŒã
UVïŒCH2Cl2ïŒCH3OHïŒïŒïŒïŒïŒïŒ303nïœ
ïŒ5573ïŒã323nïœïŒ5278ïŒã377nïœïŒ7377ïŒã
ïŒ5573ïŒã323nïœïŒ5278ïŒã377nïœïŒ7377ïŒã
å®æœäŸ ïŒ
å®æœäŸïŒã®æå
å€ã«ããããªãã¬ãžã¹ãçµæç©
ã®èª¿è£œ ïŒãªã³ã¹ïŒ170c.c.ïŒã®è€è²ã®ã³ãã®äžã§ããšã
ã«ã»ã«ãœã«ãã¢ã»ããŒã85ïŒ ãé ¢é žããã«10ïŒ ã
ãã³ãã·ã¬ã³ïŒïŒ ãããªãæ··å溶å€88.27ïœãšã
80ïŒ ïœâãš20ïŒ ïœâã¯ã¬ãŸãŒã«âãã«ã ã¢ã«ãã
ãããã©ãã¯æš¹è33.48ïœãšãããªãæ··å液ãã»
ã©ã€ãéå©å€çŽïŒïœãéã€ãªã³æ§ã·ãªã³ã³å€æ§
ããªããªããå€31mgããã³å®æœäŸïŒã§äœã€ãæå
å€3.15ïœãæ··åããããã¹ãŠã®åºäœã溶解ããã
ãŸã§ããã®ã³ãã¯å®€æž©ã§çŽ12æéé«éããŒã©äžã§
å転ããããåŸãããã¬ãžã¹ã液ã¯ãããªãã¢åŸ®
现éã·ã¹ãã ïŒ100mlã®ããŒã¬ã«ãš47mmã®ãã€
ã¹ã¯ãçšããïŒã䜿çšããŠã0.2ãã¯ãã³ç©ºåãµ
ã€ãºã®ãã€ã«ã¿ãéããŠéãããããã®éã¯
10ãã³ãå¹³æ¹ã€ã³ãïŒ0.7KgïŒcm2ïŒã®å§åäžçªçŽ
é°å²æ°äžã§è¡ããããçŽ110ïœã®éæžã¿ã¬ãžã¹
ã液ãåŸãããã
ã®èª¿è£œ ïŒãªã³ã¹ïŒ170c.c.ïŒã®è€è²ã®ã³ãã®äžã§ããšã
ã«ã»ã«ãœã«ãã¢ã»ããŒã85ïŒ ãé ¢é žããã«10ïŒ ã
ãã³ãã·ã¬ã³ïŒïŒ ãããªãæ··å溶å€88.27ïœãšã
80ïŒ ïœâãš20ïŒ ïœâã¯ã¬ãŸãŒã«âãã«ã ã¢ã«ãã
ãããã©ãã¯æš¹è33.48ïœãšãããªãæ··å液ãã»
ã©ã€ãéå©å€çŽïŒïœãéã€ãªã³æ§ã·ãªã³ã³å€æ§
ããªããªããå€31mgããã³å®æœäŸïŒã§äœã€ãæå
å€3.15ïœãæ··åããããã¹ãŠã®åºäœã溶解ããã
ãŸã§ããã®ã³ãã¯å®€æž©ã§çŽ12æéé«éããŒã©äžã§
å転ããããåŸãããã¬ãžã¹ã液ã¯ãããªãã¢åŸ®
现éã·ã¹ãã ïŒ100mlã®ããŒã¬ã«ãš47mmã®ãã€
ã¹ã¯ãçšããïŒã䜿çšããŠã0.2ãã¯ãã³ç©ºåãµ
ã€ãºã®ãã€ã«ã¿ãéããŠéãããããã®éã¯
10ãã³ãå¹³æ¹ã€ã³ãïŒ0.7KgïŒcm2ïŒã®å§åäžçªçŽ
é°å²æ°äžã§è¡ããããçŽ110ïœã®éæžã¿ã¬ãžã¹
ã液ãåŸãããã
å®æœäŸ ïŒ
å®æœäŸïŒã®æå
å€ã«ããããªãã¬ãžã¹ãçµæç©
ã®èª¿è£œ å®æœäŸïŒã§è¿°ã¹ãã®ãšåãæ¹æ³ã§ãå®æœäŸïŒã§
åŸãæå å€3.15ïœãåãã¯ã¬ãŸãŒã«âãã«ã ã¢ã«
ãããããã©ãã¯ã溶å€æ··åç©ããã³ãªããå€ãš
æ··åãããããã®æ··åç©ã¯å®æœäŸïŒãšåãã«æº¶è§£
ããããŠéããã
ã®èª¿è£œ å®æœäŸïŒã§è¿°ã¹ãã®ãšåãæ¹æ³ã§ãå®æœäŸïŒã§
åŸãæå å€3.15ïœãåãã¯ã¬ãŸãŒã«âãã«ã ã¢ã«
ãããããã©ãã¯ã溶å€æ··åç©ããã³ãªããå€ãš
æ··åãããããã®æ··åç©ã¯å®æœäŸïŒãšåãã«æº¶è§£
ããããŠéããã
å®æœäŸ ïŒ
åºäœäžãžã®ããªãã¬ãžã¹ãçµæç©ã®å¡åž
å®æœäŸïŒãšïŒã®éæžã¿ã¬ãžã¹ãçµæç©ã®çŽïŒ
ïœãããã®è¡šé¢äžã«500nïœã®äºé žåã·ãªã³ã³å±€
ããã€çŽåŸïŒã€ã³ãïŒ7.6cmïŒã®ç±çã«çé·ãã
ãã·ãªã³ã³ïŒäºé žåã·ãªã³ã³ãŠãšãäžã«ãããã
ãŠãšã€ãªãµãŒã瀟補ã®ã¹ãã³ããçšããŠãããã
å¡åžãããã¬ãžã¹ãå¡èã¯æ¯å5000å転ã®ã¹ãã³
é床ã§30ç§éä»äžããããïŒã€ã®å¡åžæžã¿ãŠãšã
ã¯100°ã105âã®ç©ºæ°åŸªç°ãªãŒãã³äžã§30åéã
ãŒã¯ããããç®èã®åã¿ã¯ã¹ããŒã©ã³ãã¯ã¿ã¯
ïœåè¡šé¢ãããã€ãã¡ãŒã¿ã§æž¬å®ããŠçŽïŒãã¯ã
ã³ã§ãã€ãã
ïœãããã®è¡šé¢äžã«500nïœã®äºé žåã·ãªã³ã³å±€
ããã€çŽåŸïŒã€ã³ãïŒ7.6cmïŒã®ç±çã«çé·ãã
ãã·ãªã³ã³ïŒäºé žåã·ãªã³ã³ãŠãšãäžã«ãããã
ãŠãšã€ãªãµãŒã瀟補ã®ã¹ãã³ããçšããŠãããã
å¡åžãããã¬ãžã¹ãå¡èã¯æ¯å5000å転ã®ã¹ãã³
é床ã§30ç§éä»äžããããïŒã€ã®å¡åžæžã¿ãŠãšã
ã¯100°ã105âã®ç©ºæ°åŸªç°ãªãŒãã³äžã§30åéã
ãŒã¯ããããç®èã®åã¿ã¯ã¹ããŒã©ã³ãã¯ã¿ã¯
ïœåè¡šé¢ãããã€ãã¡ãŒã¿ã§æž¬å®ããŠçŽïŒãã¯ã
ã³ã§ãã€ãã
å®æœäŸ ïŒ
å¡åžæžã¿åºäœã®ç»åç¶é²å
å®æœäŸïŒã®ïŒã€ã®å¡åžæžã¿ãŠãšãã¯ã290nïœ
ã®ã³ãŒã«ããã©ãŒãšå ±ã«å¯çã¢ãŒãã§ãã€ãã³å¹³
è¡å ã¢ã©ã€ãPLA501FåãçšããŠã300ã340nïœ
ã®äžéUVæ³¢é·å ã«å¯ŸããŠç»åç¶é²å ããããã
ãã®äžéUVæ³¢é·å ã¯ããŠãšãã®å¡åžé¢ã«åçš®ã®
é²å ãšãã«ã®ã®åºåãäžããããã«ãç³è±è£œã®ãª
ããã©ã€ã³ããªãã¬ãžã¹ãã¹ãããçãéããŠçŽ
15ç§éäžãããããå šéééã®ç¹ã§ã310nïœã®
æ³¢é·ã®è¡šé¢ãšãã«ã®ïŒïœïŒ·ïŒcm2ãšæž¬å®ãããã
ã®ã³ãŒã«ããã©ãŒãšå ±ã«å¯çã¢ãŒãã§ãã€ãã³å¹³
è¡å ã¢ã©ã€ãPLA501FåãçšããŠã300ã340nïœ
ã®äžéUVæ³¢é·å ã«å¯ŸããŠç»åç¶é²å ããããã
ãã®äžéUVæ³¢é·å ã¯ããŠãšãã®å¡åžé¢ã«åçš®ã®
é²å ãšãã«ã®ã®åºåãäžããããã«ãç³è±è£œã®ãª
ããã©ã€ã³ããªãã¬ãžã¹ãã¹ãããçãéããŠçŽ
15ç§éäžãããããå šéééã®ç¹ã§ã310nïœã®
æ³¢é·ã®è¡šé¢ãšãã«ã®ïŒïœïŒ·ïŒcm2ãšæž¬å®ãããã
å®æœäŸ ïŒ
é²å
ããã¬ãžã¹ãå¡åžæžã¿åºäœã®çŸå
å®æœäŸïŒã«ããé²å
ãããïŒã€ã®ã¬ãžã¹ãå¡åž
æžã¿ãŠãšãã¯ãå圢ã®ãããã³è£œãŠãšãããŒãäž
ã«çœ®ããçŽ12.5ã®PHããã€ã¢ã«ã«ãªæ§ã®ãããã¢
液ã§ãããŠãšã€ã³ãŒãããžçšLSIçŸå液ãã¿ã€ã
ïŒãªãªã³ã»ãã³ãã»ã¹ãã·ã€ã«ãã€ã»ãããã¯
ã瀟補ïŒãå ¥ããïŒã®ãããã³å®¹åšäžã«æŒ¬ãã
ãããçŸåãå©ãä¿é²ãããããããããã³å®¹åš
ã«ã¯çªçŽ ã¬ã¹æ¹æãæºåãããããŠãšãã¯ïŒåé
çŸå液äžã«æŒ¬ããŠããããããšãåºããããŠãšã
ã¯è±ã€ãªã³æ°Žã§ïŒåéãããããéãã空æ°æµ
äžã§ä¹Ÿç¥ããã
æžã¿ãŠãšãã¯ãå圢ã®ãããã³è£œãŠãšãããŒãäž
ã«çœ®ããçŽ12.5ã®PHããã€ã¢ã«ã«ãªæ§ã®ãããã¢
液ã§ãããŠãšã€ã³ãŒãããžçšLSIçŸå液ãã¿ã€ã
ïŒãªãªã³ã»ãã³ãã»ã¹ãã·ã€ã«ãã€ã»ãããã¯
ã瀟補ïŒãå ¥ããïŒã®ãããã³å®¹åšäžã«æŒ¬ãã
ãããçŸåãå©ãä¿é²ãããããããããã³å®¹åš
ã«ã¯çªçŽ ã¬ã¹æ¹æãæºåãããããŠãšãã¯ïŒåé
çŸå液äžã«æŒ¬ããŠããããããšãåºããããŠãšã
ã¯è±ã€ãªã³æ°Žã§ïŒåéãããããéãã空æ°æµ
äžã§ä¹Ÿç¥ããã
é²å
ãçŸåããããŠãšãã¯ãå®æœäŸïŒãšïŒã®ã
ãªãã¬ãžã¹ãå¡èã®æå 床ãšã³ã³ãã©ã¹ããšã決
å®ããããã«æ€æ»ãããã
ãªãã¬ãžã¹ãå¡èã®æå 床ãšã³ã³ãã©ã¹ããšã決
å®ããããã«æ€æ»ãããã
åã¬ãžã¹ãã®æå
床ã¯ããªããã©ã€ã³ã¹ããã
çã®ç°ãªãééçïŒ ã®çªã«çžåœãããã¬ãžã¹ãå¡
èã®çŸåãããããããã®åºåãèŠãããšã«ãã
枬å®ããããåã¬ãžã¹ãã®æå 床ã¯ãã¬ãžã¹ãå¡
èãå®å šã«çŸåãããïŒå³ã¡å¯æº¶æ§ã®å¡èããã¹
ãŠé€å»ãããïŒã¹ãããçã®çªã®ééçïŒ ã«ãå š
éééã®é²å ãšãã«ã®ãä¹ããããšã«ããèšç®ã
ãããèšç®ãããæå 床ã¯ä»¥äžã®è¡šäžã«ç€ºããŠã
ãã
çã®ç°ãªãééçïŒ ã®çªã«çžåœãããã¬ãžã¹ãå¡
èã®çŸåãããããããã®åºåãèŠãããšã«ãã
枬å®ããããåã¬ãžã¹ãã®æå 床ã¯ãã¬ãžã¹ãå¡
èãå®å šã«çŸåãããïŒå³ã¡å¯æº¶æ§ã®å¡èããã¹
ãŠé€å»ãããïŒã¹ãããçã®çªã®ééçïŒ ã«ãå š
éééã®é²å ãšãã«ã®ãä¹ããããšã«ããèšç®ã
ãããèšç®ãããæå 床ã¯ä»¥äžã®è¡šäžã«ç€ºããŠã
ãã
ã³ã³ãã©ã¹ãã¯ãåééçïŒ
ã®çªæ¯ã«çŸååŸã«
æ®çããç®èã®ç±ã¿ã«å¯Ÿããé²å ãšãã«ã®éã®å¯Ÿ
æ°ãããããããããšã«ãã枬å®ãããããã®ç¹
ã®ããããã§ã³ã³ãã©ã¹ãæ²ç·ãšãªãããããã
æ²ç·ã®ã»ãŒåçŽéšã®å€æ¿ã«ããçŽç·ãåŸãããã
ãã®çŽç·ã®åŸæãã¬ãžã¹ãã®ã³ã³ãã©ã¹ãå€ã§ã
ããåã¬ãžã¹ãã«ã€ããŠæž¬å®ããå€ã¯ä»¥äžã®è¡šã«
瀺ããŠããã
æ®çããç®èã®ç±ã¿ã«å¯Ÿããé²å ãšãã«ã®éã®å¯Ÿ
æ°ãããããããããšã«ãã枬å®ãããããã®ç¹
ã®ããããã§ã³ã³ãã©ã¹ãæ²ç·ãšãªãããããã
æ²ç·ã®ã»ãŒåçŽéšã®å€æ¿ã«ããçŽç·ãåŸãããã
ãã®çŽç·ã®åŸæãã¬ãžã¹ãã®ã³ã³ãã©ã¹ãå€ã§ã
ããåã¬ãžã¹ãã«ã€ããŠæž¬å®ããå€ã¯ä»¥äžã®è¡šã«
瀺ããŠããã
第ïŒè¡š
å®æœäŸïŒãšïŒã®ã¬ãžã¹ãçµæç©
ã®åçå
床ãšã³ã³ãã©ã¹ãå€ çµæç©
æå
床 ã³ã³ãã©ã¹ã
å®æœäŸïŒ 30.1 2.59
å®æœäŸïŒ 29.0 2.57
ãã®ããŒã¿ã¯ãïŒïŒïŒâãããããã³âïŒâãž
ã¢ãžãâïŒâã¹ã«ãã³é žã®ç°åŒèèªæããšãã«ãš
ã¹ãã«éšåãå«ãã çµæç©ããåžè²©ã®ããªãã¬ãž
ã¹ãçµæç©ã«å¹æµããæå 床ãšã³ã³ãã©ã¹ãå€ã
ãã€ããšã瀺ããããã§ç£æ¥äžã®å©çšã«é©ããã
ã®ãšæãããã
ã¢ãžãâïŒâã¹ã«ãã³é žã®ç°åŒèèªæããšãã«ãš
ã¹ãã«éšåãå«ãã çµæç©ããåžè²©ã®ããªãã¬ãž
ã¹ãçµæç©ã«å¹æµããæå 床ãšã³ã³ãã©ã¹ãå€ã
ãã€ããšã瀺ããããã§ç£æ¥äžã®å©çšã«é©ããã
ã®ãšæãããã
Claims (1)
- ãç¹èš±è«æ±ã®ç¯å²ã ïŒ æ¬¡ã®åŒã«çžåœããæå æ§ã®ïŒïŒïŒâãããã
ãã³âïŒâãžã¢ãžãâïŒâã¹ã«ãã³é žã®ã·ã¯ãã¢
ã«ãã«çœ®æããšããŒã«ã¢ããšã¹ãã«ååç©ïŒ ããã§ïœã¯çŽïŒããçŽ10ã®æ°ã§ããã ïŒ æ¬¡ã®æå (a) çŽ50ããçŽ95ããŒã»ã³ãéã®ãå°ãªããšãïŒ
ã€ã®ã¢ã«ã«ãªå¯æº¶æ§æš¹èïŒããã³ (b) çŽ50ããçŽïŒããŒã»ã³ãéã®ã次ã®åŒã«çžåœ
ããæå æ§ã®ïŒïŒïŒâãããããã³âïŒâãžã¢
ãžãâïŒâã¹ã«ãã³é žã®ã·ã¯ãã¢ã«ãã«çœ®æã
ãšããŒã«ã¢ããšã¹ãã«ååç© ïŒããã§ïœã¯çŽïŒããçŽ10ã®æ°ã§ãããåèš(a)ãš
(b)ã®ããŒã»ã³ãéã¯æ··åç©ã®éæ®çºæ§æåãåºæº
ãšãããã®ã§ããïŒã®æ··åç©ãå«ãããžåããªã
ã¬ãžã¹ãçµæç©ãšããŠæçšãªæå æ§æ··åç©ã ïŒ æ¬¡ã®æå (a) çŽ50ããçŽ95ããŒã»ã³ãéã®ãå°ãªããšãïŒ
ã€ã®ã¢ã«ã«ãªå¯æº¶æ§æš¹èïŒããã³ (b) çŽ50ããçŽïŒããŒã»ã³ãéã®ã次ã®åŒã«çžåœ
ããæå æ§ã®ïŒïŒïŒâãããããã³âïŒâãžã¢
ãžãâïŒâã¹ã«ãã³é žã®ã·ã¯ãã¢ã«ãã«çœ®æã
ãšããŒã«ã¢ããšã¹ãã«ååç© ïŒããã§ïœã¯çŽïŒããçŽ10ã®æ°ã§ãããåèš(a)ãš
(b)ã®ããŒã»ã³ãéã¯æ··åç©ã®éæ®çºæ§æåãåºæº
ãšãããã®ã§ããïŒã®æ··åç©ãå«ããæå æ§æ··å
ç©ã®ç®èã被èŠãããåºäœãããªã被èŠæžã¿åº
äœã ïŒ åèšåºäœãããªãšã¹ãã«ãããªãªã¬ãã€ã³ã
ã·ãªã³ã³ããåã¬ãªãŠã ãã·ãªã³ã³ïŒäºé žåãã
çŽ ãããŒãããäºé žåããçŽ ãçªåã·ãªã³ã³ãã¢
ã«ãããŠã ïŒé æ··åç©ãã¿ã³ã¿ã«ãé ããã³ããª
ã·ãªã³ã³ãããªã矀ããéžã°ãããã®ã§ããè«æ±
é ïŒèšèŒã®è¢«èŠæžã¿åºäœã
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US068,397 | 1987-07-01 | ||
US07/068,397 US4797345A (en) | 1987-07-01 | 1987-07-01 | Light-sensitive 1,2-naphthoquinone-2-diazide-4-sulfonic acid monoesters of cycloalkyl substituted phenol and their use in light-sensitive mixtures |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01104037A JPH01104037A (ja) | 1989-04-21 |
JPH0446947B2 true JPH0446947B2 (ja) | 1992-07-31 |
Family
ID=22082313
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63162745A Granted JPH01104037A (ja) | 1987-07-01 | 1988-07-01 | æå æ§ïŒïŒïŒâãããããã³âïŒâãžã¢ãžãâïŒâã¹ã«ãã³é žã¢ããšã¹ãã« |
Country Status (5)
Country | Link |
---|---|
US (1) | US4797345A (ja) |
EP (1) | EP0297825B1 (ja) |
JP (1) | JPH01104037A (ja) |
AT (1) | ATE72061T1 (ja) |
DE (1) | DE3867929D1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0389353A (ja) * | 1989-09-01 | 1991-04-15 | Nippon Paint Co Ltd | ããžåæå æ§æš¹èçµæç© |
JP3319092B2 (ja) * | 1993-11-08 | 2002-08-26 | äœåååŠå·¥æ¥æ ªåŒäŒç€Ÿ | ããžåã¬ãžã¹ãçµæç© |
JP3224115B2 (ja) * | 1994-03-17 | 2001-10-29 | å¯å£«åçãã€ã«ã æ ªåŒäŒç€Ÿ | ããžåããªãã¬ãžã¹ãçµæç© |
JP3278306B2 (ja) * | 1994-10-31 | 2002-04-30 | å¯å£«åçãã€ã«ã æ ªåŒäŒç€Ÿ | ããžåãã©ãã¬ãžã¹ãçµæç© |
TW201025701A (en) * | 2008-12-22 | 2010-07-01 | Taiwan Textile Res Inst | Dye-sensitized solar cell, photo-sensitized cathode thereof, and method of manufacturing the same |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3046121A (en) * | 1949-07-23 | 1962-07-24 | Azoplate Corp | Process for the manufacture of printing plates and light-sensitive material suttablefor use therein |
US3046119A (en) * | 1950-08-01 | 1962-07-24 | Azoplate Corp | Light sensitive material for printing and process for making printing plates |
US3046112A (en) * | 1951-06-30 | 1962-07-24 | Azoplate Corp | Quinone diazide printing plates |
US2767092A (en) * | 1951-12-06 | 1956-10-16 | Azoplate Corp | Light sensitive material for lithographic printing |
DE938233C (de) * | 1953-03-11 | 1956-01-26 | Kalle & Co Ag | Lichtempfindliches Material fuer die photomechanische Herstellung von Druckformen |
NL247405A (ja) * | 1959-01-15 | |||
NL247588A (ja) * | 1959-01-21 | |||
DE1447015B2 (de) * | 1963-10-03 | 1973-03-15 | Kalle Ag, 6202 Wiesbaden-Biebrich | Lichtempfindliche schichten zur herstellung von druckformen |
DE1543721A1 (de) * | 1966-07-27 | 1969-09-11 | Kalle Ag | Naphthochinondiazidsulfosaeureester und Verfahren zu seiner Herstellung und Verfahren zur Herstellung eines den Ester enthaltenden lagerfaehigen lichtempfindlichen Materials |
US3823130A (en) * | 1971-05-28 | 1974-07-09 | Polychrome Corp | Light sensitive esters of naphthoquinone-1,2-diazide-(2)-5-sulfonicacids with cyclohexylmethanol or secondary or tertiary alkanols of up to six carbon atoms |
US3900325A (en) * | 1972-06-12 | 1975-08-19 | Shipley Co | Light sensitive quinone diazide composition with n-3-oxohydrocarbon substituted acrylamide |
US4551409A (en) * | 1983-11-07 | 1985-11-05 | Shipley Company Inc. | Photoresist composition of cocondensed naphthol and phenol with formaldehyde in admixture with positive o-quinone diazide or negative azide |
US4670372A (en) * | 1984-10-15 | 1987-06-02 | Petrarch Systems, Inc. | Process of developing radiation imaged photoresist with alkaline developer solution including a carboxylated surfactant |
-
1987
- 1987-07-01 US US07/068,397 patent/US4797345A/en not_active Expired - Fee Related
-
1988
- 1988-06-28 DE DE8888305863T patent/DE3867929D1/de not_active Expired - Fee Related
- 1988-06-28 AT AT88305863T patent/ATE72061T1/de not_active IP Right Cessation
- 1988-06-28 EP EP88305863A patent/EP0297825B1/en not_active Expired - Lifetime
- 1988-07-01 JP JP63162745A patent/JPH01104037A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
US4797345A (en) | 1989-01-10 |
DE3867929D1 (de) | 1992-03-05 |
EP0297825B1 (en) | 1992-01-22 |
JPH01104037A (ja) | 1989-04-21 |
ATE72061T1 (de) | 1992-02-15 |
EP0297825A1 (en) | 1989-01-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2552891B2 (ja) | ããžåããªãã¬ãžã¹ãçµæç© | |
JP2785926B2 (ja) | éžæãããäžæ žæ§ããã©ãã¯ãªãªãŽã㌠| |
JPH0727203B2 (ja) | ãã©ãã¬ãžã¹ãåã³è©²ãã©ãã¬ãžã¹ããæããç©åã®è£œæ³ | |
JPH0433025B2 (ja) | ||
JP3717183B2 (ja) | äœéå±ã€ãªã³ïœâã¯ã¬ãŸãŒã«ãªãªãŽããŒããã³æå æ§çµæç© | |
EP0442952B1 (en) | Positive-working photoresists employing a selected mixture of ethyl lactate and ethyl 3-ethoxy propionate as casting solvent | |
JPS63305348A (ja) | ããžåããªãã¬ãžã¹ãçµæç© | |
JPH04328555A (ja) | ããžåããªãã¬ãžã¹ãçµæç© | |
JP2552900B2 (ja) | ããžåããªãã¬ãžã¹ãçµæç© | |
JP2617594B2 (ja) | ç±çã«å®å®ãªããšããŒã«æš¹èçµæç©åã³æå æ§çµæç©ã«ããããããã®äœ¿çš | |
US6051358A (en) | Photoresist with novel photoactive compound | |
JP2628615B2 (ja) | è¿ éãªãžã¢ãŸããã³ããžã¬ãžã¹ã | |
US4902603A (en) | Photoresist compositions containing selected 6-acetoxy cyclohexadienone photosensitizers and novolak resins | |
JPH0446947B2 (ja) | ||
JPH0616175B2 (ja) | ããžåããªãã¬ãžã¹ãçµæç© | |
US5278021A (en) | O-naphthoquinone diazide sulfonyl esters of 4-(4-hydroxyphenyl)cyclohexanone phenolic derivatives with associated radiation sensitive mixtures and articles | |
KR20010040552A (ko) | ì ì륌 ìì±íë 겜í¥ìŽ ê°ìë í¬í ë ì§ì€íž ì¡°ì±ë¬Œìì ì¡° ë°©ë² | |
US5763135A (en) | Light sensitive composition containing an arylhydrazo dye | |
JP2568883B2 (ja) | ããžåããªãã¬ãžã¹ãçµæç© | |
JP2574692B2 (ja) | ããžåããªãã¬ãžã¹ãçµæç© | |
US5019478A (en) | Selected trihydroxybenzophenone compounds and their use in photoactive compounds and radiation sensitive mixtures | |
US5258265A (en) | Aqueous developable deep UV negative resist | |
JPH0527430A (ja) | ããžåããªãã¬ãžã¹ãçµæç© | |
US5219714A (en) | Selected trihydroxybenzophenone compounds and their use in photoactive compounds and radiation sensitive mixtures | |
US5220073A (en) | Selected trihydroxybenzophenone compounds |