JPH0446275Y2 - - Google Patents
Info
- Publication number
- JPH0446275Y2 JPH0446275Y2 JP1986077467U JP7746786U JPH0446275Y2 JP H0446275 Y2 JPH0446275 Y2 JP H0446275Y2 JP 1986077467 U JP1986077467 U JP 1986077467U JP 7746786 U JP7746786 U JP 7746786U JP H0446275 Y2 JPH0446275 Y2 JP H0446275Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- conveyor
- exposure
- arm
- suction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 155
- 230000007246 mechanism Effects 0.000 claims description 51
- 238000012423 maintenance Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986077467U JPH0446275Y2 (US06168655-20010102-C00055.png) | 1986-05-21 | 1986-05-21 | |
| US07/005,858 US4842412A (en) | 1986-01-22 | 1987-01-21 | Exposure apparatus employed for fabricating printed circuit boards |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986077467U JPH0446275Y2 (US06168655-20010102-C00055.png) | 1986-05-21 | 1986-05-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62188773U JPS62188773U (US06168655-20010102-C00055.png) | 1987-12-01 |
| JPH0446275Y2 true JPH0446275Y2 (US06168655-20010102-C00055.png) | 1992-10-30 |
Family
ID=30925500
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986077467U Expired JPH0446275Y2 (US06168655-20010102-C00055.png) | 1986-01-22 | 1986-05-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0446275Y2 (US06168655-20010102-C00055.png) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4644382B2 (ja) * | 2001-04-24 | 2011-03-02 | 日立ビアメカニクス株式会社 | 露光システム |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS433918Y1 (US06168655-20010102-C00055.png) * | 1965-04-09 | 1968-02-19 | ||
| JPS60594U (ja) * | 1983-06-17 | 1985-01-05 | 三菱重工業株式会社 | 原子炉炉心 |
| JPS618557A (ja) * | 1984-06-22 | 1986-01-16 | Matsushita Electric Ind Co Ltd | 加熱装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55158452U (US06168655-20010102-C00055.png) * | 1979-04-25 | 1980-11-14 |
-
1986
- 1986-05-21 JP JP1986077467U patent/JPH0446275Y2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS433918Y1 (US06168655-20010102-C00055.png) * | 1965-04-09 | 1968-02-19 | ||
| JPS60594U (ja) * | 1983-06-17 | 1985-01-05 | 三菱重工業株式会社 | 原子炉炉心 |
| JPS618557A (ja) * | 1984-06-22 | 1986-01-16 | Matsushita Electric Ind Co Ltd | 加熱装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62188773U (US06168655-20010102-C00055.png) | 1987-12-01 |
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