JPH044524B2 - - Google Patents

Info

Publication number
JPH044524B2
JPH044524B2 JP61051959A JP5195986A JPH044524B2 JP H044524 B2 JPH044524 B2 JP H044524B2 JP 61051959 A JP61051959 A JP 61051959A JP 5195986 A JP5195986 A JP 5195986A JP H044524 B2 JPH044524 B2 JP H044524B2
Authority
JP
Japan
Prior art keywords
pattern
dimension
image
dimensions
gravity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP61051959A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62209304A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP61051959A priority Critical patent/JPS62209304A/ja
Priority to US07/023,493 priority patent/US4790023A/en
Priority to EP87302042A priority patent/EP0238247B1/en
Priority to DE8787302042T priority patent/DE3761515D1/de
Publication of JPS62209304A publication Critical patent/JPS62209304A/ja
Publication of JPH044524B2 publication Critical patent/JPH044524B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/024—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of diode-array scanning

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP61051959A 1986-03-10 1986-03-10 寸法測定方法 Granted JPS62209304A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP61051959A JPS62209304A (ja) 1986-03-10 1986-03-10 寸法測定方法
US07/023,493 US4790023A (en) 1986-03-10 1987-03-09 Method for measuring dimensions of fine pattern
EP87302042A EP0238247B1 (en) 1986-03-10 1987-03-10 Method for measuring dimensions of fine pattern
DE8787302042T DE3761515D1 (de) 1986-03-10 1987-03-10 Verfahren zum messen der abmessungen kleiner muster.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61051959A JPS62209304A (ja) 1986-03-10 1986-03-10 寸法測定方法

Publications (2)

Publication Number Publication Date
JPS62209304A JPS62209304A (ja) 1987-09-14
JPH044524B2 true JPH044524B2 (enExample) 1992-01-28

Family

ID=12901400

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61051959A Granted JPS62209304A (ja) 1986-03-10 1986-03-10 寸法測定方法

Country Status (4)

Country Link
US (1) US4790023A (enExample)
EP (1) EP0238247B1 (enExample)
JP (1) JPS62209304A (enExample)
DE (1) DE3761515D1 (enExample)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8800570D0 (en) * 1988-01-12 1988-02-10 Leicester Polytechnic Measuring method
US5340992A (en) * 1988-02-16 1994-08-23 Canon Kabushiki Kaisha Apparatus and method of detecting positional relationship using a weighted coefficient
US4969200A (en) * 1988-03-25 1990-11-06 Texas Instruments Incorporated Target autoalignment for pattern inspector or writer
IT1220409B (it) * 1988-06-29 1990-06-15 Gd Spa Metodo per il controllo di estremita' di sigarette disposte ammassate
DE3835981A1 (de) * 1988-10-21 1990-04-26 Mtu Muenchen Gmbh Verfahren zur pruefung der toleranzen von bohrungen
US5850465A (en) * 1989-06-26 1998-12-15 Fuji Photo Film Co., Ltd. Abnormnal pattern detecting or judging apparatus, circular pattern judging apparatus, and image finding apparatus
US5231678A (en) * 1989-11-15 1993-07-27 Ezel, Inc. Configuration recognition system calculating a three-dimensional distance to an object by detecting cross points projected on the object
US5164994A (en) * 1989-12-21 1992-11-17 Hughes Aircraft Company Solder joint locator
US5231675A (en) * 1990-08-31 1993-07-27 The Boeing Company Sheet metal inspection system and apparatus
US5288938A (en) * 1990-12-05 1994-02-22 Yamaha Corporation Method and apparatus for controlling electronic tone generation in accordance with a detected type of performance gesture
JPH0750508A (ja) * 1993-08-06 1995-02-21 Fujitsu Ltd アンテナモジュール
US6084986A (en) * 1995-02-13 2000-07-04 Eastman Kodak Company System and method for finding the center of approximately circular patterns in images
US6072897A (en) * 1997-09-18 2000-06-06 Applied Materials, Inc. Dimension error detection in object
US7262864B1 (en) * 2001-07-02 2007-08-28 Advanced Micro Devices, Inc. Method and apparatus for determining grid dimensions using scatterometry
US20060108048A1 (en) * 2004-11-24 2006-05-25 The Boeing Company In-process vision detection of flaws and fod by back field illumination
US7424902B2 (en) * 2004-11-24 2008-09-16 The Boeing Company In-process vision detection of flaw and FOD characteristics
US8668793B2 (en) * 2005-08-11 2014-03-11 The Boeing Company Systems and methods for in-process vision inspection for automated machines
US8050486B2 (en) * 2006-05-16 2011-11-01 The Boeing Company System and method for identifying a feature of a workpiece
US20070277919A1 (en) * 2006-05-16 2007-12-06 The Boeing Company Systems and methods for monitoring automated composite manufacturing processes
US9052294B2 (en) * 2006-05-31 2015-06-09 The Boeing Company Method and system for two-dimensional and three-dimensional inspection of a workpiece
US8331648B2 (en) * 2008-10-03 2012-12-11 Patent Store Llc Making sealant containing twist-on wire connectors
CN101979751B (zh) * 2010-09-28 2012-07-25 中华人民共和国陕西出入境检验检疫局 基于图像分析的织物尺寸稳定性检测方法
US11412155B1 (en) * 2021-11-29 2022-08-09 Unity Technologies Sf Dynamic range of a virtual production display

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3679820A (en) * 1970-01-19 1972-07-25 Western Electric Co Measuring system
US4017721A (en) * 1974-05-16 1977-04-12 The Bendix Corporation Method and apparatus for determining the position of a body
DE2542904A1 (de) * 1975-09-26 1977-03-31 Automationsanlagen Dipl Ing Kl Verfahren zum pruefen eines gegenstandes
GB2067326B (en) * 1980-01-09 1983-03-09 British United Shoe Machinery Workpiece identification apparatus
EP0149457B1 (en) * 1984-01-13 1993-03-31 Kabushiki Kaisha Komatsu Seisakusho Method of identifying contour lines
IT1179997B (it) * 1984-02-24 1987-09-23 Consiglio Nazionale Ricerche Procedimento ed apparecchiatura per il rilievo dell impronta lasciata in un provino nella misura della durezza alla penetrazione
US4596037A (en) * 1984-03-09 1986-06-17 International Business Machines Corporation Video measuring system for defining location orthogonally
JPS61293657A (ja) * 1985-06-21 1986-12-24 Matsushita Electric Works Ltd 半田付け外観検査方法
US4658428A (en) * 1985-07-17 1987-04-14 Honeywell Inc. Image recognition template generation

Also Published As

Publication number Publication date
US4790023A (en) 1988-12-06
JPS62209304A (ja) 1987-09-14
EP0238247A1 (en) 1987-09-23
EP0238247B1 (en) 1990-01-24
DE3761515D1 (de) 1990-03-01

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees