DE3761515D1 - Verfahren zum messen der abmessungen kleiner muster. - Google Patents

Verfahren zum messen der abmessungen kleiner muster.

Info

Publication number
DE3761515D1
DE3761515D1 DE8787302042T DE3761515T DE3761515D1 DE 3761515 D1 DE3761515 D1 DE 3761515D1 DE 8787302042 T DE8787302042 T DE 8787302042T DE 3761515 T DE3761515 T DE 3761515T DE 3761515 D1 DE3761515 D1 DE 3761515D1
Authority
DE
Germany
Prior art keywords
dimensions
measuring
small pattern
pattern
small
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8787302042T
Other languages
English (en)
Inventor
Shougo Matsui
Kenichi Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Application granted granted Critical
Publication of DE3761515D1 publication Critical patent/DE3761515D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/024—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of diode-array scanning

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE8787302042T 1986-03-10 1987-03-10 Verfahren zum messen der abmessungen kleiner muster. Expired - Fee Related DE3761515D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61051959A JPS62209304A (ja) 1986-03-10 1986-03-10 寸法測定方法

Publications (1)

Publication Number Publication Date
DE3761515D1 true DE3761515D1 (de) 1990-03-01

Family

ID=12901400

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787302042T Expired - Fee Related DE3761515D1 (de) 1986-03-10 1987-03-10 Verfahren zum messen der abmessungen kleiner muster.

Country Status (4)

Country Link
US (1) US4790023A (de)
EP (1) EP0238247B1 (de)
JP (1) JPS62209304A (de)
DE (1) DE3761515D1 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8800570D0 (en) * 1988-01-12 1988-02-10 Leicester Polytechnic Measuring method
US5340992A (en) * 1988-02-16 1994-08-23 Canon Kabushiki Kaisha Apparatus and method of detecting positional relationship using a weighted coefficient
US4969200A (en) * 1988-03-25 1990-11-06 Texas Instruments Incorporated Target autoalignment for pattern inspector or writer
IT1220409B (it) * 1988-06-29 1990-06-15 Gd Spa Metodo per il controllo di estremita' di sigarette disposte ammassate
DE3835981A1 (de) * 1988-10-21 1990-04-26 Mtu Muenchen Gmbh Verfahren zur pruefung der toleranzen von bohrungen
US5850465A (en) * 1989-06-26 1998-12-15 Fuji Photo Film Co., Ltd. Abnormnal pattern detecting or judging apparatus, circular pattern judging apparatus, and image finding apparatus
US5231678A (en) * 1989-11-15 1993-07-27 Ezel, Inc. Configuration recognition system calculating a three-dimensional distance to an object by detecting cross points projected on the object
US5164994A (en) * 1989-12-21 1992-11-17 Hughes Aircraft Company Solder joint locator
US5231675A (en) * 1990-08-31 1993-07-27 The Boeing Company Sheet metal inspection system and apparatus
US5288938A (en) * 1990-12-05 1994-02-22 Yamaha Corporation Method and apparatus for controlling electronic tone generation in accordance with a detected type of performance gesture
JPH0750508A (ja) * 1993-08-06 1995-02-21 Fujitsu Ltd アンテナモジュール
US6084986A (en) * 1995-02-13 2000-07-04 Eastman Kodak Company System and method for finding the center of approximately circular patterns in images
US6072897A (en) * 1997-09-18 2000-06-06 Applied Materials, Inc. Dimension error detection in object
US7262864B1 (en) * 2001-07-02 2007-08-28 Advanced Micro Devices, Inc. Method and apparatus for determining grid dimensions using scatterometry
US7424902B2 (en) 2004-11-24 2008-09-16 The Boeing Company In-process vision detection of flaw and FOD characteristics
US20060108048A1 (en) * 2004-11-24 2006-05-25 The Boeing Company In-process vision detection of flaws and fod by back field illumination
US8668793B2 (en) * 2005-08-11 2014-03-11 The Boeing Company Systems and methods for in-process vision inspection for automated machines
US9052294B2 (en) * 2006-05-31 2015-06-09 The Boeing Company Method and system for two-dimensional and three-dimensional inspection of a workpiece
US8050486B2 (en) * 2006-05-16 2011-11-01 The Boeing Company System and method for identifying a feature of a workpiece
US20070277919A1 (en) * 2006-05-16 2007-12-06 The Boeing Company Systems and methods for monitoring automated composite manufacturing processes
US8331648B2 (en) * 2008-10-03 2012-12-11 Patent Store Llc Making sealant containing twist-on wire connectors
CN101979751B (zh) * 2010-09-28 2012-07-25 中华人民共和国陕西出入境检验检疫局 基于图像分析的织物尺寸稳定性检测方法
US11412156B1 (en) * 2021-11-29 2022-08-09 Unity Technologies Sf Increasing dynamic range of a virtual production display

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3679820A (en) * 1970-01-19 1972-07-25 Western Electric Co Measuring system
US4017721A (en) * 1974-05-16 1977-04-12 The Bendix Corporation Method and apparatus for determining the position of a body
DE2542904A1 (de) * 1975-09-26 1977-03-31 Automationsanlagen Dipl Ing Kl Verfahren zum pruefen eines gegenstandes
GB2067326B (en) * 1980-01-09 1983-03-09 British United Shoe Machinery Workpiece identification apparatus
DE3587220T2 (de) * 1984-01-13 1993-07-08 Komatsu Mfg Co Ltd Identifizierungsverfahren von konturlinien.
IT1179997B (it) * 1984-02-24 1987-09-23 Consiglio Nazionale Ricerche Procedimento ed apparecchiatura per il rilievo dell impronta lasciata in un provino nella misura della durezza alla penetrazione
US4596037A (en) * 1984-03-09 1986-06-17 International Business Machines Corporation Video measuring system for defining location orthogonally
JPS61293657A (ja) * 1985-06-21 1986-12-24 Matsushita Electric Works Ltd 半田付け外観検査方法
US4658428A (en) * 1985-07-17 1987-04-14 Honeywell Inc. Image recognition template generation

Also Published As

Publication number Publication date
JPS62209304A (ja) 1987-09-14
EP0238247B1 (de) 1990-01-24
EP0238247A1 (de) 1987-09-23
JPH044524B2 (de) 1992-01-28
US4790023A (en) 1988-12-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee