JPH0444925B2 - - Google Patents
Info
- Publication number
- JPH0444925B2 JPH0444925B2 JP59088455A JP8845584A JPH0444925B2 JP H0444925 B2 JPH0444925 B2 JP H0444925B2 JP 59088455 A JP59088455 A JP 59088455A JP 8845584 A JP8845584 A JP 8845584A JP H0444925 B2 JPH0444925 B2 JP H0444925B2
- Authority
- JP
- Japan
- Prior art keywords
- image signal
- section
- cursor
- dimension
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005259 measurement Methods 0.000 claims description 34
- 238000010894 electron beam technology Methods 0.000 claims description 13
- 238000003860 storage Methods 0.000 claims description 9
- 238000000034 method Methods 0.000 description 20
- 230000003321 amplification Effects 0.000 description 14
- 238000003199 nucleic acid amplification method Methods 0.000 description 14
- 239000004065 semiconductor Substances 0.000 description 8
- 238000001514 detection method Methods 0.000 description 7
- 238000012545 processing Methods 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000004364 calculation method Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 3
- 230000010354 integration Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000001186 cumulative effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 101100112083 Arabidopsis thaliana CRT1 gene Proteins 0.000 description 1
- 101100238301 Arabidopsis thaliana MORC1 gene Proteins 0.000 description 1
- 238000012935 Averaging Methods 0.000 description 1
- 101100519629 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) PEX2 gene Proteins 0.000 description 1
- 101100468521 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) RFX1 gene Proteins 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 238000002353 field-effect transistor method Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000011426 transformation method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59088455A JPS60233508A (ja) | 1984-05-04 | 1984-05-04 | 寸法測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59088455A JPS60233508A (ja) | 1984-05-04 | 1984-05-04 | 寸法測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60233508A JPS60233508A (ja) | 1985-11-20 |
| JPH0444925B2 true JPH0444925B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-07-23 |
Family
ID=13943269
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59088455A Granted JPS60233508A (ja) | 1984-05-04 | 1984-05-04 | 寸法測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60233508A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1984
- 1984-05-04 JP JP59088455A patent/JPS60233508A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60233508A (ja) | 1985-11-20 |