JPH0444422B2 - - Google Patents

Info

Publication number
JPH0444422B2
JPH0444422B2 JP58112928A JP11292883A JPH0444422B2 JP H0444422 B2 JPH0444422 B2 JP H0444422B2 JP 58112928 A JP58112928 A JP 58112928A JP 11292883 A JP11292883 A JP 11292883A JP H0444422 B2 JPH0444422 B2 JP H0444422B2
Authority
JP
Japan
Prior art keywords
cassette
carrier
box
fork
reticle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58112928A
Other languages
English (en)
Japanese (ja)
Other versions
JPS605520A (ja
Inventor
Shunzo Imai
Hiroshi Sato
Kazuo Iizuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP58112928A priority Critical patent/JPS605520A/ja
Publication of JPS605520A publication Critical patent/JPS605520A/ja
Priority to US06/892,734 priority patent/US4758127A/en
Publication of JPH0444422B2 publication Critical patent/JPH0444422B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P72/1906—
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B23/00—Devices for changing pictures in viewing apparatus or projectors
    • G03B23/02—Devices for changing pictures in viewing apparatus or projectors in which pictures are removed from, and returned to, magazines; Magazines therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • G03F7/70741—Handling masks outside exposure position, e.g. reticle libraries
    • H10P72/1922—
    • H10P72/3404—
    • H10P72/3408—
    • H10P72/3411—

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Library & Information Science (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP58112928A 1983-06-24 1983-06-24 防塵カセツト Granted JPS605520A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP58112928A JPS605520A (ja) 1983-06-24 1983-06-24 防塵カセツト
US06/892,734 US4758127A (en) 1983-06-24 1986-07-28 Original feeding apparatus and a cassette for containing the original

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58112928A JPS605520A (ja) 1983-06-24 1983-06-24 防塵カセツト

Publications (2)

Publication Number Publication Date
JPS605520A JPS605520A (ja) 1985-01-12
JPH0444422B2 true JPH0444422B2 (OSRAM) 1992-07-21

Family

ID=14598993

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58112928A Granted JPS605520A (ja) 1983-06-24 1983-06-24 防塵カセツト

Country Status (1)

Country Link
JP (1) JPS605520A (OSRAM)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2539447B2 (ja) * 1987-08-12 1996-10-02 株式会社日立製作所 枚葉キャリアによる生産方法
CH695872A5 (de) * 2002-07-29 2006-09-29 Brooks Pri Automation Switzerl Reticle-Handhabungsvorrichtung.
JP5144478B2 (ja) * 2008-11-27 2013-02-13 リンテック株式会社 半導体ウエハ収納キャリア

Also Published As

Publication number Publication date
JPS605520A (ja) 1985-01-12

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