JPH0444422B2 - - Google Patents
Info
- Publication number
- JPH0444422B2 JPH0444422B2 JP58112928A JP11292883A JPH0444422B2 JP H0444422 B2 JPH0444422 B2 JP H0444422B2 JP 58112928 A JP58112928 A JP 58112928A JP 11292883 A JP11292883 A JP 11292883A JP H0444422 B2 JPH0444422 B2 JP H0444422B2
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- carrier
- box
- fork
- reticle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 210000000078 claw Anatomy 0.000 description 16
- 239000000428 dust Substances 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 6
- 238000005192 partition Methods 0.000 description 4
- 230000037431 insertion Effects 0.000 description 3
- 238000003780 insertion Methods 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 230000003749 cleanliness Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67359—Closed carriers specially adapted for containing masks, reticles or pellicles
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B23/00—Devices for changing pictures in viewing apparatus or projectors
- G03B23/02—Devices for changing pictures in viewing apparatus or projectors in which a picture is removed from a stock and returned to the same stock or another one; Magazines therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
- G03F7/70741—Handling masks outside exposure position, e.g. reticle libraries
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67386—Closed carriers characterised by the construction of the closed carrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67775—Docking arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は半導体焼付装置の於て用いられるフオ
トマスク若しくはレチクルと呼ばれる原版の防塵
を考慮した収納カセツトに関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a storage cassette designed to prevent dust from forming an original called a photomask or reticle used in a semiconductor printing apparatus.
IC.LSI.超LSI等の半導体の製造時、解決されね
ばならない事項の１つにマスク又はレチクルへの
塵埃付着の問題がある。超微細なこれらのパター
ンをウエハーの上に焼き付ける為マスク又はレチ
クル上にゴミがあると転写された半導体回路パタ
ーンの損傷につながり、製造化されたLSI等の半
導体装置の性能を低下させるばかりでなく、最悪
の場合との半導体装置の機能全体を麻痺させる。
When manufacturing semiconductors such as IC, LSI, and VLSI, one of the issues that must be solved is the problem of dust adhesion to masks or reticles. Since these ultra-fine patterns are printed onto wafers, if there is dust on the mask or reticle, it will not only damage the transferred semiconductor circuit patterns, but also reduce the performance of manufactured semiconductor devices such as LSIs. In the worst case, it paralyzes the entire functionality of the semiconductor device.
特に近年主流となりつつあるステツプ・アン
ド・リピート方式（繰り返し露光方式）の投影露
光装置では、１つのマスク又はレチクル用いてそ
の半導体集積回路パターンが１つのウエハーに何
シヨツトも焼付けられる為、もしゴミがあると、
そのウエハーの全てのチツプが不良になつてしま
うという問題がある。これらの問題からマスク又
はレチクルに発塵原因である人間が可能な限り接
近しない方がよい。 In particular, in the step-and-repeat projection exposure equipment that has become mainstream in recent years, many shots of the semiconductor integrated circuit pattern are printed on one wafer using one mask or reticle, so if dust is If there,
The problem is that all the chips on the wafer become defective. Because of these problems, it is better for people who are the cause of dust generation to not come close to the mask or reticle as much as possible.
ところで、マスクやレチクル等の原版の清浄度
を保持した状態で収納し、且つ必要な時には速や
かに内部の原版を取り出せる防塵カセツトとして
は、例えば特開昭57−64928号公報に開示された
ものが知られている。 By the way, as a dust-proof cassette that can store originals such as masks and reticles while maintaining their cleanliness and allow the originals inside to be taken out quickly when necessary, for example, the one disclosed in Japanese Patent Application Laid-Open No. 57-64928 is available. Are known.
しかしながら、この装置で使用されているカセ
ツトは、レチクル等の原版を支持する箱（下側部
材）と、それに対する該（上側部材）を一端で結
合して両者を一体的に構成しているので、その内
部から収納原版を取り出して搬送する際には、カ
セツトの側壁に設けられている扉を開けて、カセ
ツト内部に原版取り出し用のフオークを侵入させ
ることが必要となる。また、この従来のカセツト
では、原版は取り出された直後から所定の搬送完
了位置まで原版のみで搬送されることになる。こ
のため、この従来のカセツトは、搬送途中で原版
に塵やゴミ等が付着する可能性が高いものであつ
た。
However, the cassette used in this device consists of a box (lower member) that supports an original such as a reticle, and a box (upper member) that supports it, which are connected at one end to form an integral structure. When taking out and transporting the stored originals from inside the cassette, it is necessary to open a door provided on the side wall of the cassette and insert a fork for taking out the originals into the cassette. Further, in this conventional cassette, the original is conveyed by itself to a predetermined conveyance completion position immediately after being taken out. For this reason, with this conventional cassette, there is a high possibility that dust, dirt, etc. may adhere to the original during transportation.
本発明は、このような事情に鑑みなされたもの
で、その目的は、マスクやレチクル等の原版の清
浄度を保持した状態で収納すると共に、必要な時
には自動交換装置等によつて速やかに、且つ清浄
な状態のままで内部の原版の取り出せる防塵カセ
ツトを提供することにある。 The present invention was developed in view of the above circumstances, and its purpose is to store originals such as masks and reticles while maintaining their cleanliness, and to quickly store originals such as masks and reticles using an automatic exchange device when necessary. To provide a dust-proof cassette from which originals inside can be taken out in a clean state.
この目的を達成するために、本発明は、マスク
またはレチクル等の原版を載置するための下側部
材と、下側部材を所定の引出し方向に引出せるよ
うに下側部材と重ね合される上側部材を有し、下
側部材と上側部材を重ね合せることにより基板を
収納する収納室を形成すると共に、下側部材は前
記引出し方向に沿つた側壁の外側に突出片を備
え、カセツトキヤリアに保持されている際に突出
片の下側に進入するフオークで突出片の下面が支
持されることにより、カセツトキヤリア内に上側
部材を残したまま下側部材がカセツトキヤリア外
に引出されるようになしている。
To achieve this objective, the present invention includes a lower member for placing an original such as a mask or a reticle, and a lower member that is overlapped with the lower member so that the lower member can be pulled out in a predetermined pulling direction. The lower member has an upper member, and by overlapping the lower member and the upper member, a storage chamber for storing the substrate is formed. By supporting the lower surface of the protruding piece with the fork that enters the lower side of the protruding piece when it is being held, the lower member can be pulled out of the cassette carrier while leaving the upper member inside the cassette carrier. I am doing it.
以下、本発明の防塵カセツトを図に示した実施
例に基づいて詳細に説明する。
Hereinafter, the dustproof cassette of the present invention will be explained in detail based on the embodiment shown in the drawings.
第１図は蓋部材の破砕斜視図を第２図は箱部材
の斜視図を、第３図は第１図のＡ視図の部分図、
第４図は第２図のＢ視図の部分図を、第５図は蓋
部材と箱部材を組合せたカセツトの斜視図を、第
６図は第５図のＣ−C′線の断面図を、第７図は爪
部材の詳細な説明図を、第８図はキヤリア内にカ
セツトを収容した斜視図を、第９図は第８図のＥ
視図を夫々示している。 Fig. 1 is an exploded perspective view of the lid member, Fig. 2 is a perspective view of the box member, Fig. 3 is a partial view of the A view in Fig. 1,
Fig. 4 is a partial view of the B view in Fig. 2, Fig. 5 is a perspective view of the cassette in which the lid member and box member are combined, and Fig. 6 is a sectional view taken along the line C-C' in Fig. 5. , FIG. 7 is a detailed explanatory diagram of the claw member, FIG. 8 is a perspective view of the cassette accommodated in the carrier, and FIG. 9 is a detailed explanatory diagram of the claw member.
The perspective views are shown respectively.
図に於て、１は蓋部材、２は蓋部材１を取扱い
易くする為の把手、３は箱部材４と蓋部材１とを
組合わせた時お互いが容易に分離しないようにす
る為の爪部材で、引掛り部である４ｂと係合す
る。１ａは蓋部材１の突出した保持部で、箱部材
４はそれの突出部４ａが保持部１ａの上に載る事
によつて、蓋部材１に保持される。 In the figure, 1 is a lid member, 2 is a handle to make it easier to handle the lid member 1, and 3 is a claw to prevent the box member 4 and the lid member 1 from being easily separated when they are combined. The member engages with the hook portion 4b. Reference numeral 1a denotes a protruding holding portion of the lid member 1, and the box member 4 is held by the lid member 1 by placing the protruding portion 4a on the holding portion 1a.
１ｂは蓋部材１の入口端部、４ｃは蓋部材１と
箱部材４とを組合わせた時、止部材となるもので
ある。４ｄはマスク又はレチクルを載せて支持す
るための支持部に相当する底面と段差のついた段
差面である。１ｃは蓋部材１の底部で箱部材４と
を第５図の如く組合わせた時ここが最底部にな
る。 1b is the entrance end of the lid member 1, and 4c is a stop member when the lid member 1 and the box member 4 are combined. Reference numeral 4d denotes a step surface having a step and a bottom surface corresponding to a support portion on which a mask or reticle is placed and supported. 1c is the bottom of the lid member 1, and when it is combined with the box member 4 as shown in FIG. 5, this becomes the bottommost part.
５は蓋部材１と箱部材４の結合を手で容易に解
く為の箱部材４の止部材４ｃのある側の端部に設
けられた把手である。６はレチクルで、箱部材４
の段差面４ｄ上に載置した時の断面図が第６図に
示されているが、これと共に塵埃の付着防止目的
のペリクル膜７及びその支持枠であるペリクル枠
７ａ描いている。４a′は蓋部材１の保持部１ａと
箱部材４の突出部４ａとを重ね合せた時の重なつ
ていない部分であり、後述のフオーク１１の係合
部１０がこの部分に接触する。 Reference numeral 5 denotes a handle provided at the end of the box member 4 on the side where the stopper member 4c is located for easily uncoupling the lid member 1 and the box member 4 by hand. 6 is a reticle, box member 4
FIG. 6 shows a cross-sectional view of the device placed on the stepped surface 4d, and also depicts the pellicle film 7 for the purpose of preventing dust from adhering to the pellicle film 7 and the pellicle frame 7a serving as its supporting frame. 4a' is a portion where the holding portion 1a of the lid member 1 and the protruding portion 4a of the box member 4 do not overlap when they are overlapped, and the engaging portion 10 of the fork 11, which will be described later, comes into contact with this portion.
第７図は第１図に示した爪部材３と第２図に示
した引掛り部４ｂとの関係を簡略的に示いた部分
断面図、１ｄは蓋部材１の側壁、３ａは爪部材３
の押込み端、３ｂは爪部材３の他端に設けられた
円柱状の係止部、３ｅは爪部材３の回転軸で、軸
の両端は側壁１ｄに回転自在に軸支されている。
また３ｆはトーシヨンバネで、一端は爪部材３に
係合し、他端は側壁１ｄに係合するものとし、そ
の結果、爪部材３に反時計回りの回転力が付与さ
れる。本図や第６図に示したように箱部材４が蓋
部材１に挿入された時は、係止端３ｂが引掛り部
４ｂに落込んで、これを係止するが後述の第８図
や第９図のようにカセツトとして箱部材１が後述
のキヤリヤ９に挿着された時にはキヤリヤ９の内
壁９ｄが押込み端３ａを箱部材４側に押込み、係
止部３ｂは引掛り部４ｂから引込んで引掛り部４
ｂは解除される。なお、トーシヨンバネ３ｆの反
時計回り方向の付勢により爪部材３がキヤリヤ９
の内壁９ｄを押圧するので、蓋部材１はキヤリヤ
９に摩擦係止される。９はキヤリヤで、第６図の
ように蓋部材１と箱部材４とを組合せた時のカセ
ツトを第８図や第９図に示したように多数収容す
るためのものである。９ｂはキヤリヤ９の上下を
多数の区域に仕切る仕切板もしくは底板の片方の
両側に設けられた突出状のキヤリヤ９に結合され
たストツパーである。 7 is a partial sectional view schematically showing the relationship between the claw member 3 shown in FIG. 1 and the hook portion 4b shown in FIG. 2, 1d is the side wall of the lid member 1, and 3a is the claw member 3.
, 3b is a cylindrical locking portion provided at the other end of the claw member 3, and 3e is a rotating shaft of the claw member 3, both ends of which are rotatably supported by the side wall 1d.
Further, 3f is a torsion spring, one end of which engages with the claw member 3 and the other end of which engages with the side wall 1d, and as a result, a counterclockwise rotational force is applied to the claw member 3. When the box member 4 is inserted into the lid member 1 as shown in this figure and FIG. When the box member 1 is inserted as a cassette into a carrier 9 (described later) as shown in FIG. 9, the inner wall 9d of the carrier 9 pushes the pushing end 3a toward the box member 4, and the locking portion 3b is retracted from the hook portion 4b. Hook part 4
b is canceled. Note that the claw member 3 is pressed against the carrier 9 by the counterclockwise bias of the torsion spring 3f.
Since the cover member 1 is pressed against the inner wall 9d of the carrier 9, the cover member 1 is frictionally engaged with the carrier 9. A carrier 9 is used to accommodate a large number of cassettes when the lid member 1 and the box member 4 are combined as shown in FIG. 6, as shown in FIGS. 8 and 9. Reference numeral 9b denotes a stopper connected to the carrier 9 in a projecting shape provided on one side of a partition plate or a bottom plate that partitions the upper and lower parts of the carrier 9 into a number of areas.
第９図には自動でキヤリヤ９からカセツトが分
離され箱部材４（勿論、第５図に示したようにレ
チクル６を含んでいる。）のみが取り出される時
の状態を示している。１１はフオークで、カセツ
トとキヤリヤ９との隙間穴８に差し込まれる、図
では機構は不図示であるが矢印方向即ちレチクル
６の面に平行方向と垂直方向に移動可能である。
なお、フオーク１１の長手方向と直角方向の幅Ｌ
は突出部４ａの長手方向と直角方向の幅から保持
部１ａの長手方向と直角方向の幅を差し引いた幅
より小さく設定してある。従つて、フオーク１１
をカセツト内に挿入した時、フオーク１１の腕
（幅Ｌ）は保持部１ａと突出部４ａとが重なりあ
つていない部分４a′の突出部４ａを支える。９ａ
は蓋部材１の入口端部１ｂのストツパーであり、
キヤリヤ９の上下を多数の区域に仕切る仕切板も
しくは底辺のもう片方の両側に夫々設けられた突
出部で、自動でフオーク１１により箱部材４がキ
ヤリヤ９から取り出される時、箱部材４と蓋部材
１とが分離される時蓋部材１をキヤリヤ９内に押
し止める役目を果す。１０はフオーク１１の係合
部で箱部材４の部分４a′の端にある不図示の凹部
に係合する。 FIG. 9 shows a state in which the cassette is automatically separated from the carrier 9 and only the box member 4 (which of course includes the reticle 6 as shown in FIG. 5) is taken out. A fork 11 is inserted into a gap 8 between the cassette and the carrier 9. Although the mechanism is not shown in the figure, it is movable in the direction of the arrow, that is, in the direction parallel to and perpendicular to the surface of the reticle 6.
In addition, the width L of the fork 11 in the longitudinal direction and the perpendicular direction
is set smaller than the width obtained by subtracting the width of the holding portion 1a in the direction perpendicular to the longitudinal direction from the width of the protruding portion 4a in the direction perpendicular to the longitudinal direction. Therefore, Folk 11
When inserted into the cassette, the arm (width L) of the fork 11 supports the protrusion 4a of the portion 4a' where the holding portion 1a and the protrusion 4a do not overlap. 9a
is a stopper at the inlet end 1b of the lid member 1,
A partition plate that partitions the upper and lower parts of the carrier 9 into a large number of areas, or a protrusion provided on the other side of the bottom, is used to automatically separate the box member 4 and the lid member when the box member 4 is taken out from the carrier 9 by the fork 11. 1 serves to hold the lid member 1 in the carrier 9 when separated. Reference numeral 10 denotes an engaging portion of the fork 11, which engages with a recess (not shown) at the end of the portion 4a' of the box member 4.
次に前記構成に於て防塵カセツトの動作を説明
する。 Next, the operation of the dustproof cassette in the above configuration will be explained.
第２図に示した箱部材４の段差面４ｄの上にマ
スク又はレチクル（本実施例の場合はレチクル
６）は人手によつて第６図に示した如く置かれ第
１図に示した蓋部材１の入口端部１ｂの所から保
持部１ａの上に突出部４ａが載る様にして箱部材
４は蓋部材１に差し込まれる。蓋部材１の入口端
部１ｂと箱部材４の止部材４ｃとがピツタリ合つ
た位置で前述したように爪部材３は箱部材４の引
掛り部４ｂに係合し、蓋部材１と箱部材４とが分
離しない様に係止する。この時の結合した図が第
５図及び第７図であり、それを断面にせ示したの
が第６図である。第５図に示したカセツトの状態
で、カセツトは第８図に示すＤ方向からキヤリヤ
９に人手によつて挿入される。なおカセツトはス
トツパー９ｂを乗り越える様にキヤリヤ９には空
間９ｃが設けられている。キヤリヤ９に挿入され
たカセツトは反対側に行きすぎない様ストツパ９
ａによつて位置決めされる。 A mask or reticle (reticle 6 in this embodiment) is manually placed on the stepped surface 4d of the box member 4 shown in FIG. 2 as shown in FIG. 6, and the lid shown in FIG. The box member 4 is inserted into the lid member 1 such that the protrusion 4a rests on the holding portion 1a from the entrance end 1b of the member 1. At the position where the entrance end 1b of the lid member 1 and the stopper member 4c of the box member 4 are tightly fitted together, the claw member 3 engages with the catch portion 4b of the box member 4 as described above, and the lid member 1 and the box member 4 are brought into contact with each other. 4 and lock so that they do not separate. Figures 5 and 7 are the combined views at this time, and Figure 6 is a cross-sectional view of them. In the state of the cassette shown in FIG. 5, the cassette is manually inserted into the carrier 9 from direction D shown in FIG. A space 9c is provided in the carrier 9 so that the cassette can pass over the stopper 9b. Stopper 9 prevents the cassette inserted into carrier 9 from going too far to the opposite side.
Positioned by a.
次に第９図に於てキヤリヤ９から箱部材４が自
動で搬出される動作について説明する。フオーク
１１は上下方向に移動し所望のカセツトに対向す
る位置で止まる。第９図では上から２段目のカセ
ツトの位置にてフオーク１１は停止している。こ
の位置の検出はモータ回転数あるいは直線エンコ
ーダによつて自在になされ、不図示であるが安全
の為の光スイツチも入つている。 Next, referring to FIG. 9, the operation of automatically unloading the box member 4 from the carrier 9 will be explained. The fork 11 moves vertically and stops at a position facing a desired cassette. In FIG. 9, the fork 11 is stopped at the second cassette from the top. This position can be detected freely using the motor rotation speed or a linear encoder, and a light switch (not shown) is also included for safety.
次はフオーク１１は水平方向に移動して隙間穴
８に挿入される。挿入は箱部材４及びキヤリヤ９
に接触しない位置で行なわれる。又、その挿入終
了位置は光スイツチ、モータの回転数あるいはエ
ンコーダによつて自在に決められる。 Next, the fork 11 is moved horizontally and inserted into the clearance hole 8. Insert box member 4 and carrier 9
It is carried out in a position where there is no contact with the Further, the insertion end position can be freely determined by an optical switch, the rotational speed of the motor, or an encoder.
挿入が終ると搬送用のフオーク１１は箱部材４
の部分４a′に接する位置迄上昇し、係合部１０に
よつて部分４a′の不図示の凹部に係合され、箱部
材４はフオーク１１に保持される。 When the insertion is completed, the fork 11 for transportation is moved to the box member 4.
The box member 4 is held by the fork 11 by being engaged with a not-shown recess of the portion 4a' by the engaging portion 10.
次に挿入方向と反対方向へフオーク１１は戻る
この時蓋部材１はキヤリヤ９のストツパー９ａに
引掛つていたりあるいは前述のようにキヤリヤ９
の内壁９ｄに爪部材３が摩擦係合しており、また
前述のように係止部３ｂは引掛り部４ｂから引込
んで係止を解除しているため、フオーク１１は箱
部材４のみをレチクル６と共に搬出することがで
きる。フオーク１１により箱部材４と共に搬出さ
れたレチクル６は次に不図示の手段により、箱部
材４からその支持面に対して略垂直方向に取出さ
れた露光位置に送られる。こうして露光済のレチ
クルは前述の搬送動作と逆動作によつて再びキヤ
リヤ９内に搬入される。この時第８図のストツパ
ー９ｂは箱部材４が蓋部材１に入る時蓋部材１を
押えるキヤリヤ９から押出さない役目をする。不
図示であるが蓋部材１とキヤリヤ９との間には空
間９ｃがあるが箱部材４の出入に伴い蓋部材１が
キヤリヤ９内で上下に動かない様前述のように爪
部材３がキヤリヤ９の内壁９ｄに摩擦係合してい
る。 Next, the fork 11 returns in the direction opposite to the insertion direction, and at this time the lid member 1 is caught on the stopper 9a of the carrier 9, or as described above,
The claw member 3 is frictionally engaged with the inner wall 9d of the box member 3, and the locking portion 3b is retracted from the hook portion 4b to release the locking as described above. It can be carried out together with 6. The reticle 6 carried out together with the box member 4 by the fork 11 is then sent by unillustrated means to an exposure position where it is taken out from the box member 4 in a direction substantially perpendicular to its supporting surface. In this way, the exposed reticle is carried into the carrier 9 again by a reverse operation to the above-mentioned carrying operation. At this time, the stopper 9b shown in FIG. 8 serves to prevent the box member 4 from being pushed out from the carrier 9 that presses the lid member 1 when it enters the lid member 1. Although not shown, there is a space 9c between the lid member 1 and the carrier 9, but as described above, the claw member 3 is placed in the carrier so that the lid member 1 does not move up and down in the carrier 9 as the box member 4 is moved in and out. It is frictionally engaged with the inner wall 9d of 9.
前記実施例では蓋部材１の入口端部１ｃがスト
ツパー９ａに引掛つている為、フオーク１１を箱
部材４に係合させた状態でキヤリヤ９外に引き出
すと同時に箱部材収着と蓋部材１とを分離する
が、これは以下の如くしても良い。 In the embodiment described above, since the inlet end 1c of the lid member 1 is hooked on the stopper 9a, the fork 11 is pulled out of the carrier 9 while being engaged with the box member 4, and at the same time the box member sorption and the lid member 1 are removed. This can be done as follows.
即ちキヤリヤ９に爪部材３を押す様な構造を設
けキヤリヤ９にカセツトを入れると同時に付勢力
を解除する、その時、止部材４ｃと蓋部材の入口
端部１ｂとの密着が弱まる恐れがあるので、その
時は入口端部１ｂが止部材４ｃに嵌合う形止部材
４ｃに凹部を設けてもよいし、逆に止部材４ｃに
凸部を入口端部１ｂに凹部を設けてもよい。 That is, the carrier 9 is provided with a structure that presses the claw member 3, and the urging force is released at the same time as the cassette is inserted into the carrier 9. At that time, there is a risk that the close contact between the stop member 4c and the inlet end 1b of the lid member may be weakened. In that case, a concave portion may be provided in the retaining member 4c where the inlet end portion 1b fits into the retaining member 4c, or conversely, a convex portion may be provided in the retaining member 4c and a recessed portion may be provided in the inlet end portion 1b.
押圧部材については入口端部１ｂと止部材４ｃ
の部分にあるいはその対向反対側にマグネツトを
設けても良い。カセツトには又どんなレチクルが
入つているかを外部から判断できる様に標識をカ
セツトに接着又は差し込み式にして設けてもよい
し、カセツトを透明部材に一部又は全部をする事
により中のレチクルナンバーを容易に読取る事が
出来る様にしてもよい。 Regarding the pressing member, the inlet end 1b and the stop member 4c
A magnet may be provided at the portion or on the opposite side thereof. The cassette may also be provided with a mark that is glued or inserted into the cassette so that it can be determined from the outside what kind of reticle is contained in the cassette, or the reticle number inside may be marked by attaching or inserting a mark to the cassette. It may be arranged so that it can be easily read.
箱とフオークの係合はフオークの吸気部を設け
箱を吸気する事によりフオークと箱とを固定して
もよい、マグネツトを利用してもよい。 To engage the box and the fork, the fork and the box may be fixed by providing an intake part of the fork to draw air into the box, or a magnet may be used.
以上説明したように、本発明によれば、マスク
やレチクル等の原版をカセツトキヤリアから取出
す際、原版は上側部材をカセツトキヤリア内に残
したまま下側部材と一緒に取出される。このた
め、本発明によれば、カセツトキヤリア内に侵入
するフオークで原版を傷付けるおそれや、露光位
置への返送途中で原版が塵埃が付着してしまうお
それを低減できる。
As described above, according to the present invention, when an original such as a mask or a reticle is taken out from a cassette carrier, the original is taken out together with the lower part while leaving the upper part in the cassette carrier. Therefore, according to the present invention, it is possible to reduce the risk of the original being damaged by a fork that enters the cassette carrier, and the risk that dust will adhere to the original while being returned to the exposure position.
第１図はカセツトの蓋部材の一部破砕斜視図、
第２図はカセツトの箱部材の斜視図、第３図は第
１図をＡ方向から見た一部省略斜視図、第４図は
第２図をＢ方向から見た一部省略斜視図、第５図
はカセツトの斜視図、第６図は第５図のＣ−C′線
のカセツトの状態の断面図、第７図は、爪部材の
状態を示す断面部分図、第８図はカセツトをキヤ
リヤに挿入した斜視図、第９図は第８図のキヤリ
ヤ等をＥ方向から見た図でフオークとの関係を示
す斜視図である。
１は蓋部材、１ａは保持部、１ｂは入口端部、
１ｃは底部、２は把手、３は爪部材、４は箱部
材、４ａは突出部、４ｂは引掛り部、４ｃは止部
材、４ｄは段差面、４a′は部分、５は把手、６は
レチクル、７はペリクル膜、７ａペリクル枠、８
は隙間穴、９ａ，９ｂはストツパー、９ｃは空
間、１０は係合部、１１はフオークである。
FIG. 1 is a partially fragmented perspective view of the lid member of the cassette;
Fig. 2 is a perspective view of the box member of the cassette, Fig. 3 is a partially omitted perspective view of Fig. 1 seen from direction A, Fig. 4 is a partially omitted perspective view of Fig. 2 seen from direction B, 5 is a perspective view of the cassette, FIG. 6 is a cross-sectional view of the cassette taken along line C-C' in FIG. 5, FIG. 7 is a partial cross-sectional view showing the state of the claw member, and FIG. FIG. 9 is a perspective view of the carrier shown in FIG. 8 viewed from direction E, showing the relationship with the fork. 1 is a lid member, 1a is a holding part, 1b is an inlet end,
1c is the bottom, 2 is the handle, 3 is the claw member, 4 is the box member, 4a is the protrusion, 4b is the hook, 4c is the stopper, 4d is the stepped surface, 4a' is the part, 5 is the handle, 6 is the Reticle, 7 is pellicle membrane, 7a pellicle frame, 8
9 are clearance holes, 9a and 9b are stoppers, 9c is a space, 10 is an engaging portion, and 11 is a fork.
Claims (1)
めの下側部材と、前記下側部材を所定の引出し方
向に引出せるように前記下側部材と重ね合される
上側部材を有し、前記下側部材と前記上側部材を
重ね合せることにより前記基板を収納する収納室
を形成すると共に、前記下側部材は前記引出し方
向に沿つた側壁の外側に突出片を備え、カセツト
キヤリアに保持されている際に前記突出片の下側
に進入するフオークで前記突出片の下面が支持さ
れることにより、前記カセツトキヤリア内に前記
上側部材を残したまま前記下側部材が前記カセツ
トキヤリア外に引出されるようになしたことを特
徴とする防塵カセツト。1 A lower member for placing an original such as a mask or a reticle, and an upper member overlapped with the lower member so that the lower member can be pulled out in a predetermined drawing direction, and the lower member By overlapping the member and the upper member, a storage chamber for storing the board is formed, and the lower member has a protruding piece on the outside of the side wall along the drawing direction, so that when the lower member is held in the cassette carrier, The lower surface of the protruding piece is supported by a fork that enters the lower side of the protruding piece, so that the lower member is pulled out of the cassette carrier while leaving the upper member inside the cassette carrier. A dustproof cassette featuring the following features:
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58112928A JPS605520A (en) | 1983-06-24 | 1983-06-24 | Dust-proof cassette |
| US06/892,734 US4758127A (en) | 1983-06-24 | 1986-07-28 | Original feeding apparatus and a cassette for containing the original |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58112928A JPS605520A (en) | 1983-06-24 | 1983-06-24 | Dust-proof cassette |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS605520A JPS605520A (en) | 1985-01-12 |
| JPH0444422B2 true JPH0444422B2 (en) | 1992-07-21 |
Family
ID=14598993
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58112928A Granted JPS605520A (en) | 1983-06-24 | 1983-06-24 | Dust-proof cassette |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS605520A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2539447B2 (en) * | 1987-08-12 | 1996-10-02 | 株式会社日立製作所 | Production method by single-wafer carrier |
| CH695872A5 (en) * | 2002-07-29 | 2006-09-29 | Brooks Pri Automation Switzerl | Reticle handling device. |
| JP5144478B2 (en) * | 2008-11-27 | 2013-02-13 | リンテック株式会社 | Semiconductor wafer storage carrier |
-
1983
- 1983-06-24 JP JP58112928A patent/JPS605520A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS605520A (en) | 1985-01-12 |
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