JPH0444211B2 - - Google Patents

Info

Publication number
JPH0444211B2
JPH0444211B2 JP61191532A JP19153286A JPH0444211B2 JP H0444211 B2 JPH0444211 B2 JP H0444211B2 JP 61191532 A JP61191532 A JP 61191532A JP 19153286 A JP19153286 A JP 19153286A JP H0444211 B2 JPH0444211 B2 JP H0444211B2
Authority
JP
Japan
Prior art keywords
grating
pitch
scale
main scale
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61191532A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6347615A (ja
Inventor
Soji Ichikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to JP19153286A priority Critical patent/JPS6347615A/ja
Priority to IN615/CAL/87A priority patent/IN168444B/en
Priority to US07/082,593 priority patent/US4912322A/en
Priority to DE3727188A priority patent/DE3727188C2/de
Priority to GB8719257A priority patent/GB2194044B/en
Priority to CN87106274.7A priority patent/CN1013705B/zh
Publication of JPS6347615A publication Critical patent/JPS6347615A/ja
Priority to GB9004757A priority patent/GB2228320B/en
Priority to GB9004758A priority patent/GB2228321B/en
Priority to IN235/CAL/90A priority patent/IN169778B/en
Priority to IN234/CAL/90A priority patent/IN169777B/en
Priority to IN236/CAL/90A priority patent/IN169779B/en
Publication of JPH0444211B2 publication Critical patent/JPH0444211B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Automatic Control Of Machine Tools (AREA)
JP19153286A 1986-08-15 1986-08-15 光学式変位検出器 Granted JPS6347615A (ja)

Priority Applications (11)

Application Number Priority Date Filing Date Title
JP19153286A JPS6347615A (ja) 1986-08-15 1986-08-15 光学式変位検出器
IN615/CAL/87A IN168444B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-08-15 1987-08-07
US07/082,593 US4912322A (en) 1986-08-15 1987-08-07 Optical type displacement detecting device
DE3727188A DE3727188C2 (de) 1986-08-15 1987-08-14 Optische Verschiebungserfassungseinrichtung
GB8719257A GB2194044B (en) 1986-08-15 1987-08-14 Optical type displacement detecting device
CN87106274.7A CN1013705B (zh) 1986-08-15 1987-08-15 光学式位移检测装置
GB9004757A GB2228320B (en) 1986-08-15 1990-03-02 Optical type displacement detecting device
GB9004758A GB2228321B (en) 1986-08-15 1990-03-02 Optical type replacement detecting device
IN235/CAL/90A IN169778B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-08-15 1990-03-21
IN234/CAL/90A IN169777B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-08-15 1990-03-21
IN236/CAL/90A IN169779B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-08-15 1990-03-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19153286A JPS6347615A (ja) 1986-08-15 1986-08-15 光学式変位検出器

Publications (2)

Publication Number Publication Date
JPS6347615A JPS6347615A (ja) 1988-02-29
JPH0444211B2 true JPH0444211B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-07-21

Family

ID=16276233

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19153286A Granted JPS6347615A (ja) 1986-08-15 1986-08-15 光学式変位検出器

Country Status (1)

Country Link
JP (1) JPS6347615A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5345269B2 (ja) * 1999-10-26 2013-11-20 シチズンホールディングス株式会社 光学式変位測定装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01212316A (ja) * 1988-02-19 1989-08-25 Omron Tateisi Electron Co 光学式エンコーダ
KR100326170B1 (ko) * 2000-03-30 2002-02-27 윤종용 광소자의 광도파로열 피치를 측정하는 장치
JP4833543B2 (ja) * 2004-12-09 2011-12-07 株式会社ミツトヨ 光電式エンコーダ、それに用いるスケール及びその製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2826213B2 (de) * 1978-06-15 1980-06-04 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Photoelektrisches inkrementales Längen- und Winkelmeßsystem

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5345269B2 (ja) * 1999-10-26 2013-11-20 シチズンホールディングス株式会社 光学式変位測定装置

Also Published As

Publication number Publication date
JPS6347615A (ja) 1988-02-29

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees