JPH0441172Y2 - - Google Patents

Info

Publication number
JPH0441172Y2
JPH0441172Y2 JP1986194509U JP19450986U JPH0441172Y2 JP H0441172 Y2 JPH0441172 Y2 JP H0441172Y2 JP 1986194509 U JP1986194509 U JP 1986194509U JP 19450986 U JP19450986 U JP 19450986U JP H0441172 Y2 JPH0441172 Y2 JP H0441172Y2
Authority
JP
Japan
Prior art keywords
plasma
gas
plasma generation
microwave
transport pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986194509U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6398728U (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986194509U priority Critical patent/JPH0441172Y2/ja
Publication of JPS6398728U publication Critical patent/JPS6398728U/ja
Application granted granted Critical
Publication of JPH0441172Y2 publication Critical patent/JPH0441172Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP1986194509U 1986-12-19 1986-12-19 Expired JPH0441172Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986194509U JPH0441172Y2 (OSRAM) 1986-12-19 1986-12-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986194509U JPH0441172Y2 (OSRAM) 1986-12-19 1986-12-19

Publications (2)

Publication Number Publication Date
JPS6398728U JPS6398728U (OSRAM) 1988-06-27
JPH0441172Y2 true JPH0441172Y2 (OSRAM) 1992-09-28

Family

ID=31151549

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986194509U Expired JPH0441172Y2 (OSRAM) 1986-12-19 1986-12-19

Country Status (1)

Country Link
JP (1) JPH0441172Y2 (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000073029A (ja) * 1998-08-26 2000-03-07 Nitto Denko Corp 粘着部材及びその製造方法

Also Published As

Publication number Publication date
JPS6398728U (OSRAM) 1988-06-27

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