JPH044101B2 - - Google Patents
Info
- Publication number
- JPH044101B2 JPH044101B2 JP21744183A JP21744183A JPH044101B2 JP H044101 B2 JPH044101 B2 JP H044101B2 JP 21744183 A JP21744183 A JP 21744183A JP 21744183 A JP21744183 A JP 21744183A JP H044101 B2 JPH044101 B2 JP H044101B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- polishing
- resistance value
- film resistors
- amount
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 claims description 100
- 238000005498 polishing Methods 0.000 claims description 98
- 239000000758 substrate Substances 0.000 claims description 22
- 239000004020 conductor Substances 0.000 claims description 16
- 238000007517 polishing process Methods 0.000 description 6
- 238000001514 detection method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000005674 electromagnetic induction Effects 0.000 description 3
- 230000001276 controlling effect Effects 0.000 description 2
- 230000002596 correlated effect Effects 0.000 description 1
- 230000000875 corresponding effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21744183A JPS60108267A (ja) | 1983-11-17 | 1983-11-17 | 薄膜磁気ヘツドの研摩装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21744183A JPS60108267A (ja) | 1983-11-17 | 1983-11-17 | 薄膜磁気ヘツドの研摩装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60108267A JPS60108267A (ja) | 1985-06-13 |
| JPH044101B2 true JPH044101B2 (enrdf_load_html_response) | 1992-01-27 |
Family
ID=16704276
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21744183A Granted JPS60108267A (ja) | 1983-11-17 | 1983-11-17 | 薄膜磁気ヘツドの研摩装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60108267A (enrdf_load_html_response) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3403605B2 (ja) * | 1997-04-08 | 2003-05-06 | 富士通株式会社 | 部材接着方法及び部材接着装置 |
| JP2007058968A (ja) | 2005-08-23 | 2007-03-08 | Tdk Corp | 薄膜磁気ヘッド構造体およびその製造方法、ならびに薄膜磁気ヘッドの製造方法 |
-
1983
- 1983-11-17 JP JP21744183A patent/JPS60108267A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60108267A (ja) | 1985-06-13 |
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