JPH0440531U - - Google Patents

Info

Publication number
JPH0440531U
JPH0440531U JP1762790U JP1762790U JPH0440531U JP H0440531 U JPH0440531 U JP H0440531U JP 1762790 U JP1762790 U JP 1762790U JP 1762790 U JP1762790 U JP 1762790U JP H0440531 U JPH0440531 U JP H0440531U
Authority
JP
Japan
Prior art keywords
jig
pure water
water
bar
elevating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1762790U
Other languages
English (en)
Other versions
JP2531239Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990017627U priority Critical patent/JP2531239Y2/ja
Publication of JPH0440531U publication Critical patent/JPH0440531U/ja
Application granted granted Critical
Publication of JP2531239Y2 publication Critical patent/JP2531239Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Description

【図面の簡単な説明】
添付図面は本考案の実施例を示し、第１図は第
１実施例の昇降治具の正面図、第２図は同じく治
具バーの断面図、第３図は第２実施例の昇降治具
の正面図、第４図は同じく側面図、第５図は第４
図のＡ−Ａ′線に沿つた断面図、第６図は第４図
のＢ−Ｂ′線に沿つた断面図であり、図中１は昇
降治具、２は治具バー、３は水滴除去部、４は洗
浄乾燥対象物、５は温純水、６は水滴である。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) 洗浄乾燥対象物を洗浄後、これを温純水に
    浸漬し、そしてゆつくりとほぼ垂直に上方へ引上
    げ、温純水の表面張力を利用してこれら洗浄乾燥
    対象物を乾燥させる為の昇降治具に於いて； 昇降治具１を構成する治具バー２上の温純水５
    の水滴６の溜まり易い部分に、治具バー２の材料
    に比し疎水性に富む材料より成る水滴除去部３を
    設けたことを特徴とする温純水引上げ方式乾燥装
    置に於ける昇降治具。 (2) 上記治具バー２上の温純水５の水滴６の溜
    まり易い部分は治具バー２と洗浄乾燥対象物４と
    の接触部分であつて、そこに疎水性に富む材料よ
    り成る水滴除去部３が設けられていることを特徴
    とする請求項第１項記載の温純水引上げ方式乾燥
    装置に於ける昇降治具。 (3) 上記治具バー２上の温純水５の水滴６の溜
    まり易い部分は治具バー２の重力方向最下端部分
    であつて、そこに疎水性に富む材料より成る水滴
    除去部３が設けられていることを特徴とする請求
    項第１項記載の温純水引上げ方式乾燥装置に於け
    る昇降治具。 (4) 上記疎水性に富む材料はふつ素系樹脂であ
    ることを特徴とする請求項第１項記載の温純水引
    上げ方式乾燥装置に於ける昇降治具。
JP1990017627U 1990-02-23 1990-02-23 温純水引上げ方式乾燥装置における昇降治具 Expired - Lifetime JP2531239Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990017627U JP2531239Y2 (ja) 1990-02-23 1990-02-23 温純水引上げ方式乾燥装置における昇降治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990017627U JP2531239Y2 (ja) 1990-02-23 1990-02-23 温純水引上げ方式乾燥装置における昇降治具

Publications (2)

Publication Number Publication Date
JPH0440531U true JPH0440531U (ja) 1992-04-07
JP2531239Y2 JP2531239Y2 (ja) 1997-04-02

Family

ID=31520813

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990017627U Expired - Lifetime JP2531239Y2 (ja) 1990-02-23 1990-02-23 温純水引上げ方式乾燥装置における昇降治具

Country Status (1)

Country Link
JP (1) JP2531239Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011089162A (ja) * 2009-10-21 2011-05-06 Sumitomo Electric Ind Ltd Ｍｇ部材の表面処理用治具と表面処理方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62291927A (ja) * 1986-06-12 1987-12-18 Matsushita Electric Ind Co Ltd 基板保持治具
JPS6367735A (ja) * 1986-09-09 1988-03-26 Texas Instr Japan Ltd 基体収容装置及び基体乾燥方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62291927A (ja) * 1986-06-12 1987-12-18 Matsushita Electric Ind Co Ltd 基板保持治具
JPS6367735A (ja) * 1986-09-09 1988-03-26 Texas Instr Japan Ltd 基体収容装置及び基体乾燥方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011089162A (ja) * 2009-10-21 2011-05-06 Sumitomo Electric Ind Ltd Ｍｇ部材の表面処理用治具と表面処理方法

Also Published As

Publication number Publication date
JP2531239Y2 (ja) 1997-04-02

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