JPH0439555Y2 - - Google Patents

Info

Publication number
JPH0439555Y2
JPH0439555Y2 JP1986060325U JP6032586U JPH0439555Y2 JP H0439555 Y2 JPH0439555 Y2 JP H0439555Y2 JP 1986060325 U JP1986060325 U JP 1986060325U JP 6032586 U JP6032586 U JP 6032586U JP H0439555 Y2 JPH0439555 Y2 JP H0439555Y2
Authority
JP
Japan
Prior art keywords
pressure
circuit board
printed circuit
gas injection
probe card
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986060325U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62170543U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986060325U priority Critical patent/JPH0439555Y2/ja
Publication of JPS62170543U publication Critical patent/JPS62170543U/ja
Application granted granted Critical
Publication of JPH0439555Y2 publication Critical patent/JPH0439555Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Pressure Sensors (AREA)
JP1986060325U 1986-04-21 1986-04-21 Expired JPH0439555Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986060325U JPH0439555Y2 (enExample) 1986-04-21 1986-04-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986060325U JPH0439555Y2 (enExample) 1986-04-21 1986-04-21

Publications (2)

Publication Number Publication Date
JPS62170543U JPS62170543U (enExample) 1987-10-29
JPH0439555Y2 true JPH0439555Y2 (enExample) 1992-09-16

Family

ID=30892639

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986060325U Expired JPH0439555Y2 (enExample) 1986-04-21 1986-04-21

Country Status (1)

Country Link
JP (1) JPH0439555Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090039908A1 (en) * 2006-04-26 2009-02-12 Tokyo Electron Limited Microstructure inspecting apparatus and microstructure inspecting method

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5745472A (en) * 1980-09-02 1982-03-15 Matsushita Electric Ind Co Ltd Pressure-sensitive element inspection device
JPS57122546U (enExample) * 1981-01-23 1982-07-30

Also Published As

Publication number Publication date
JPS62170543U (enExample) 1987-10-29

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