JPH0439398B2 - - Google Patents

Info

Publication number
JPH0439398B2
JPH0439398B2 JP60006848A JP684885A JPH0439398B2 JP H0439398 B2 JPH0439398 B2 JP H0439398B2 JP 60006848 A JP60006848 A JP 60006848A JP 684885 A JP684885 A JP 684885A JP H0439398 B2 JPH0439398 B2 JP H0439398B2
Authority
JP
Japan
Prior art keywords
membrane
wastewater
reduction potential
water
ultrafiltration membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60006848A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61167494A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP684885A priority Critical patent/JPS61167494A/ja
Publication of JPS61167494A publication Critical patent/JPS61167494A/ja
Publication of JPH0439398B2 publication Critical patent/JPH0439398B2/ja
Granted legal-status Critical Current

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  • Separation Using Semi-Permeable Membranes (AREA)
  • Treatment Of Water By Oxidation Or Reduction (AREA)
JP684885A 1985-01-18 1985-01-18 シリコンウエ−ハ−研磨排水の処理方法 Granted JPS61167494A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP684885A JPS61167494A (ja) 1985-01-18 1985-01-18 シリコンウエ−ハ−研磨排水の処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP684885A JPS61167494A (ja) 1985-01-18 1985-01-18 シリコンウエ−ハ−研磨排水の処理方法

Publications (2)

Publication Number Publication Date
JPS61167494A JPS61167494A (ja) 1986-07-29
JPH0439398B2 true JPH0439398B2 (https=) 1992-06-29

Family

ID=11649655

Family Applications (1)

Application Number Title Priority Date Filing Date
JP684885A Granted JPS61167494A (ja) 1985-01-18 1985-01-18 シリコンウエ−ハ−研磨排水の処理方法

Country Status (1)

Country Link
JP (1) JPS61167494A (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2647104B2 (ja) * 1987-11-24 1997-08-27 オルガノ株式会社 半導体ウエハーの製造工程より排出される排水の処理方法
JP4790243B2 (ja) * 2004-09-30 2011-10-12 新日本製鐵株式会社 硫黄化合物を含む廃水の処理方法
TWI417430B (zh) * 2006-08-25 2013-12-01 應用材料股份有限公司 基板研磨液之使用點處理方法與系統
JP4609675B2 (ja) * 2007-08-16 2011-01-12 オルガノ株式会社 メタル研磨ｃｍｐ工程排水処理装置及び方法
CN104609668A (zh) * 2015-01-23 2015-05-13 先达恩那社水处理工程（天津）有限公司 芯片生产线的废水处理方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS592554B2 (ja) * 1975-10-28 1984-01-19 荏原インフイルコ株式会社 マクブンリホウホウ
JPS5474285A (en) * 1977-11-25 1979-06-14 Sasakura Eng Co Ltd Reverse osmotic pressure apparatus control method
JPS5687402A (en) * 1979-12-14 1981-07-16 Ebara Infilco Co Ltd Membrane separation method
JPS5980387A (ja) * 1982-10-27 1984-05-09 Toray Eng Co Ltd 半透性複合膜による電子部品洗浄廃水の逆浸透処理方法
JPS59189987A (ja) * 1983-04-11 1984-10-27 Nec Corp シリコンウエ−ハ−研摩排水の循環利用方法

Also Published As

Publication number Publication date
JPS61167494A (ja) 1986-07-29

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Legal Events

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