JPH0438184Y2 - - Google Patents
Info
- Publication number
- JPH0438184Y2 JPH0438184Y2 JP16151188U JP16151188U JPH0438184Y2 JP H0438184 Y2 JPH0438184 Y2 JP H0438184Y2 JP 16151188 U JP16151188 U JP 16151188U JP 16151188 U JP16151188 U JP 16151188U JP H0438184 Y2 JPH0438184 Y2 JP H0438184Y2
- Authority
- JP
- Japan
- Prior art keywords
- room
- air
- clean
- ceiling
- rooms
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000126 substance Substances 0.000 claims description 17
- 230000002265 prevention Effects 0.000 claims description 9
- 238000000638 solvent extraction Methods 0.000 claims 1
- 238000000034 method Methods 0.000 description 17
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 10
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 6
- 229910021529 ammonia Inorganic materials 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 238000011109 contamination Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000003595 mist Substances 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 238000009423 ventilation Methods 0.000 description 2
- 230000001143 conditioned effect Effects 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hcl hcl Chemical compound Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16151188U JPH0438184Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-12-13 | 1988-12-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16151188U JPH0438184Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-12-13 | 1988-12-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0281335U JPH0281335U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-06-22 |
| JPH0438184Y2 true JPH0438184Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-09-08 |
Family
ID=31444511
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16151188U Expired JPH0438184Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-12-13 | 1988-12-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0438184Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1988
- 1988-12-13 JP JP16151188U patent/JPH0438184Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0281335U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-06-22 |