JPH0437908Y2 - - Google Patents

Info

Publication number
JPH0437908Y2
JPH0437908Y2 JP17569886U JP17569886U JPH0437908Y2 JP H0437908 Y2 JPH0437908 Y2 JP H0437908Y2 JP 17569886 U JP17569886 U JP 17569886U JP 17569886 U JP17569886 U JP 17569886U JP H0437908 Y2 JPH0437908 Y2 JP H0437908Y2
Authority
JP
Japan
Prior art keywords
substrate
shutter
molecular beam
beam source
irradiation means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17569886U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6381868U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17569886U priority Critical patent/JPH0437908Y2/ja
Publication of JPS6381868U publication Critical patent/JPS6381868U/ja
Application granted granted Critical
Publication of JPH0437908Y2 publication Critical patent/JPH0437908Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP17569886U 1986-11-14 1986-11-14 Expired JPH0437908Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17569886U JPH0437908Y2 (enrdf_load_stackoverflow) 1986-11-14 1986-11-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17569886U JPH0437908Y2 (enrdf_load_stackoverflow) 1986-11-14 1986-11-14

Publications (2)

Publication Number Publication Date
JPS6381868U JPS6381868U (enrdf_load_stackoverflow) 1988-05-30
JPH0437908Y2 true JPH0437908Y2 (enrdf_load_stackoverflow) 1992-09-04

Family

ID=31115265

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17569886U Expired JPH0437908Y2 (enrdf_load_stackoverflow) 1986-11-14 1986-11-14

Country Status (1)

Country Link
JP (1) JPH0437908Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6381868U (enrdf_load_stackoverflow) 1988-05-30

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