JPH0318500Y2 - - Google Patents
Info
- Publication number
- JPH0318500Y2 JPH0318500Y2 JP1985186992U JP18699285U JPH0318500Y2 JP H0318500 Y2 JPH0318500 Y2 JP H0318500Y2 JP 1985186992 U JP1985186992 U JP 1985186992U JP 18699285 U JP18699285 U JP 18699285U JP H0318500 Y2 JPH0318500 Y2 JP H0318500Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- thin film
- film
- forming apparatus
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 52
- 238000010438 heat treatment Methods 0.000 claims description 24
- 239000010409 thin film Substances 0.000 claims description 22
- 238000001704 evaporation Methods 0.000 claims description 19
- 230000008020 evaporation Effects 0.000 claims description 16
- 239000010408 film Substances 0.000 description 32
- 238000010894 electron beam technology Methods 0.000 description 12
- 239000013078 crystal Substances 0.000 description 11
- 239000002994 raw material Substances 0.000 description 8
- 229910010413 TiO 2 Inorganic materials 0.000 description 7
- 239000007789 gas Substances 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 239000012788 optical film Substances 0.000 description 5
- 239000012495 reaction gas Substances 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000002003 electron diffraction Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001308 synthesis method Methods 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Thermal Transfer Or Thermal Recording In General (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985186992U JPH0318500Y2 (enrdf_load_stackoverflow) | 1985-12-04 | 1985-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985186992U JPH0318500Y2 (enrdf_load_stackoverflow) | 1985-12-04 | 1985-12-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6293363U JPS6293363U (enrdf_load_stackoverflow) | 1987-06-15 |
| JPH0318500Y2 true JPH0318500Y2 (enrdf_load_stackoverflow) | 1991-04-18 |
Family
ID=31137054
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985186992U Expired JPH0318500Y2 (enrdf_load_stackoverflow) | 1985-12-04 | 1985-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0318500Y2 (enrdf_load_stackoverflow) |
-
1985
- 1985-12-04 JP JP1985186992U patent/JPH0318500Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6293363U (enrdf_load_stackoverflow) | 1987-06-15 |
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