JPH0436236Y2 - - Google Patents
Info
- Publication number
- JPH0436236Y2 JPH0436236Y2 JP1987124475U JP12447587U JPH0436236Y2 JP H0436236 Y2 JPH0436236 Y2 JP H0436236Y2 JP 1987124475 U JP1987124475 U JP 1987124475U JP 12447587 U JP12447587 U JP 12447587U JP H0436236 Y2 JPH0436236 Y2 JP H0436236Y2
- Authority
- JP
- Japan
- Prior art keywords
- adsorption layer
- temperature
- adsorption
- layer
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001179 sorption measurement Methods 0.000 claims description 84
- 230000008531 maintenance mechanism Effects 0.000 claims description 11
- 230000007246 mechanism Effects 0.000 claims description 2
- 230000007423 decrease Effects 0.000 description 7
- 238000001514 detection method Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 230000003247 decreasing effect Effects 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 4
- 230000020169 heat generation Effects 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987124475U JPH0436236Y2 (US06346242-20020212-C00066.png) | 1987-08-14 | 1987-08-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987124475U JPH0436236Y2 (US06346242-20020212-C00066.png) | 1987-08-14 | 1987-08-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6430691U JPS6430691U (US06346242-20020212-C00066.png) | 1989-02-27 |
| JPH0436236Y2 true JPH0436236Y2 (US06346242-20020212-C00066.png) | 1992-08-26 |
Family
ID=31374239
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987124475U Expired JPH0436236Y2 (US06346242-20020212-C00066.png) | 1987-08-14 | 1987-08-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0436236Y2 (US06346242-20020212-C00066.png) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4233866B2 (ja) | 2002-12-27 | 2009-03-04 | 三菱重工業株式会社 | 印刷機の廃液再生装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54163118A (en) * | 1978-06-15 | 1979-12-25 | Matsushita Electric Ind Co Ltd | Drafting board |
-
1987
- 1987-08-14 JP JP1987124475U patent/JPH0436236Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54163118A (en) * | 1978-06-15 | 1979-12-25 | Matsushita Electric Ind Co Ltd | Drafting board |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6430691U (US06346242-20020212-C00066.png) | 1989-02-27 |
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