JPH0436229U - - Google Patents
Info
- Publication number
- JPH0436229U JPH0436229U JP7793590U JP7793590U JPH0436229U JP H0436229 U JPH0436229 U JP H0436229U JP 7793590 U JP7793590 U JP 7793590U JP 7793590 U JP7793590 U JP 7793590U JP H0436229 U JPH0436229 U JP H0436229U
- Authority
- JP
- Japan
- Prior art keywords
- section
- wafer
- sections
- rinsing
- automatic transport
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 5
- 238000009792 diffusion process Methods 0.000 claims description 4
- 238000005406 washing Methods 0.000 claims description 4
- 238000001035 drying Methods 0.000 claims description 3
- 230000003647 oxidation Effects 0.000 claims description 3
- 238000007254 oxidation reaction Methods 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 8
- 238000000034 method Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 3
- 238000010306 acid treatment Methods 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N hydrofluoric acid Substances F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7793590U JPH0436229U (enExample) | 1990-07-23 | 1990-07-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7793590U JPH0436229U (enExample) | 1990-07-23 | 1990-07-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0436229U true JPH0436229U (enExample) | 1992-03-26 |
Family
ID=31620766
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7793590U Pending JPH0436229U (enExample) | 1990-07-23 | 1990-07-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0436229U (enExample) |
-
1990
- 1990-07-23 JP JP7793590U patent/JPH0436229U/ja active Pending
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