JPH0436113Y2 - - Google Patents
Info
- Publication number
- JPH0436113Y2 JPH0436113Y2 JP1986085604U JP8560486U JPH0436113Y2 JP H0436113 Y2 JPH0436113 Y2 JP H0436113Y2 JP 1986085604 U JP1986085604 U JP 1986085604U JP 8560486 U JP8560486 U JP 8560486U JP H0436113 Y2 JPH0436113 Y2 JP H0436113Y2
- Authority
- JP
- Japan
- Prior art keywords
- film
- electrode
- bonding
- layer
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010931 gold Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 7
- 230000002950 deficient Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- VKOBVWXKNCXXDE-UHFFFAOYSA-N icosanoic acid Chemical compound CCCCCCCCCCCCCCCCCCCC(O)=O VKOBVWXKNCXXDE-UHFFFAOYSA-N 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 125000001165 hydrophobic group Chemical group 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 125000000896 monocarboxylic acid group Chemical group 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L24/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/04042—Bonding areas specifically adapted for wire connectors, e.g. wirebond pads
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/8536—Bonding interfaces of the semiconductor or solid state body
- H01L2224/85375—Bonding interfaces of the semiconductor or solid state body having an external coating, e.g. protective bond-through coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986085604U JPH0436113Y2 (US07860544-20101228-C00003.png) | 1986-06-05 | 1986-06-05 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986085604U JPH0436113Y2 (US07860544-20101228-C00003.png) | 1986-06-05 | 1986-06-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62196338U JPS62196338U (US07860544-20101228-C00003.png) | 1987-12-14 |
JPH0436113Y2 true JPH0436113Y2 (US07860544-20101228-C00003.png) | 1992-08-26 |
Family
ID=30941163
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986085604U Expired JPH0436113Y2 (US07860544-20101228-C00003.png) | 1986-06-05 | 1986-06-05 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0436113Y2 (US07860544-20101228-C00003.png) |
-
1986
- 1986-06-05 JP JP1986085604U patent/JPH0436113Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS62196338U (US07860544-20101228-C00003.png) | 1987-12-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2004079801A (ja) | コンデンサ装置及びその製造方法 | |
JPS60138943A (ja) | 半導体デバイスの接続電極の電解形成方法 | |
JPWO2011010638A1 (ja) | 誘電体薄膜素子及びその製造方法 | |
JP2009010114A (ja) | 誘電体薄膜キャパシタ | |
JPH0436113Y2 (US07860544-20101228-C00003.png) | ||
TW200307364A (en) | Ferroelectric capacitor, method of manufacturing same, and semiconductor memory device | |
JPS6185844A (ja) | 集積回路とその製法 | |
JPH0249471A (ja) | 半導体装置とその製造方法 | |
JPH1197289A (ja) | 薄膜チップコンデンサー及びその製造方法 | |
JPS59229850A (ja) | 半導体装置 | |
JP2000223662A (ja) | 強誘電体キャパシタおよびその製造方法 | |
JPH0670258U (ja) | 圧電体素子 | |
JP3170254B2 (ja) | キャパシタ | |
JPS5911681A (ja) | 半導体装置の製造法 | |
JP3248475B2 (ja) | 強誘電体不揮発メモリセル構造の製造方法 | |
JPS63302538A (ja) | 半導体装置 | |
JP2874463B2 (ja) | 半導体装置の製造方法 | |
JPS60116137A (ja) | 半導体装置用多層膜 | |
JPS63308924A (ja) | 半導体装置 | |
JP2623610B2 (ja) | ジョセフソン接合素子 | |
JP3015491B2 (ja) | AlN基板 | |
JP3220903B2 (ja) | 半導体装置の製造方法 | |
JPS61116860A (ja) | 半導体集積回路の多層配線の形成方法 | |
JPS63318145A (ja) | 半導体装置の製造方法 | |
JP2845054B2 (ja) | 半導体装置の製造方法 |