JPH0435405Y2 - - Google Patents

Info

Publication number

JPH0435405Y2

JPH0435405Y2 JP2602686U JP2602686U JPH0435405Y2 JP H0435405 Y2 JPH0435405 Y2 JP H0435405Y2 JP 2602686 U JP2602686 U JP 2602686U JP 2602686 U JP2602686 U JP 2602686U JP H0435405 Y2 JPH0435405 Y2 JP H0435405Y2

Authority

JP

Japan

Prior art keywords

metal

ceramic

pedestal

substrate

ceramic substrate

Prior art date

1986-02-25

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

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• 239000002184 metal Substances 0.000 claims description 21
• 229910052751 metal Inorganic materials 0.000 claims description 21
• NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 11
• 229910052574 oxide ceramic Inorganic materials 0.000 claims description 3
• 239000000758 substrate Substances 0.000 description 15
• 239000000919 ceramic Substances 0.000 description 13
• RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
• 229910052802 copper Inorganic materials 0.000 description 5
• 239000010949 copper Substances 0.000 description 5
• 238000002844 melting Methods 0.000 description 4
• 230000008018 melting Effects 0.000 description 4
• 239000011819 refractory material Substances 0.000 description 4
• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
• 239000001301 oxygen Substances 0.000 description 3
• 229910052760 oxygen Inorganic materials 0.000 description 3
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
• 230000002950 deficient Effects 0.000 description 2
• 238000010304 firing Methods 0.000 description 2
• 239000011224 oxide ceramic Substances 0.000 description 2
• 230000002093 peripheral effect Effects 0.000 description 2
• 102000004190 Enzymes Human genes 0.000 description 1
• 108090000790 Enzymes Proteins 0.000 description 1
• 238000005275 alloying Methods 0.000 description 1
• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
• 229910052681 coesite Inorganic materials 0.000 description 1
• 229910052906 cristobalite Inorganic materials 0.000 description 1
• 230000000694 effects Effects 0.000 description 1
• 239000011261 inert gas Substances 0.000 description 1
• CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
• 239000000463 material Substances 0.000 description 1
• 229910044991 metal oxide Inorganic materials 0.000 description 1
• 150000004706 metal oxides Chemical class 0.000 description 1
• 238000000034 method Methods 0.000 description 1
• 239000000377 silicon dioxide Substances 0.000 description 1
• 235000012239 silicon dioxide Nutrition 0.000 description 1
• 229910052682 stishovite Inorganic materials 0.000 description 1
• 229910052905 tridymite Inorganic materials 0.000 description 1