JPH0433130B2 - - Google Patents

Info

Publication number
JPH0433130B2
JPH0433130B2 JP58144969A JP14496983A JPH0433130B2 JP H0433130 B2 JPH0433130 B2 JP H0433130B2 JP 58144969 A JP58144969 A JP 58144969A JP 14496983 A JP14496983 A JP 14496983A JP H0433130 B2 JPH0433130 B2 JP H0433130B2
Authority
JP
Japan
Prior art keywords
silicon oxide
tungsten
oxide film
molybdenum
silicide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58144969A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6037123A (ja
Inventor
Nobuyoshi Kobayashi
Shojiro Sugashiro
Seiichi Iwata
Naoki Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58144969A priority Critical patent/JPS6037123A/ja
Publication of JPS6037123A publication Critical patent/JPS6037123A/ja
Publication of JPH0433130B2 publication Critical patent/JPH0433130B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/011—Manufacture or treatment of electrodes ohmically coupled to a semiconductor

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP58144969A 1983-08-10 1983-08-10 半導体装置の製造方法 Granted JPS6037123A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58144969A JPS6037123A (ja) 1983-08-10 1983-08-10 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58144969A JPS6037123A (ja) 1983-08-10 1983-08-10 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS6037123A JPS6037123A (ja) 1985-02-26
JPH0433130B2 true JPH0433130B2 (enExample) 1992-06-02

Family

ID=15374402

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58144969A Granted JPS6037123A (ja) 1983-08-10 1983-08-10 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6037123A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0789549B2 (ja) * 1985-03-18 1995-09-27 株式会社日立製作所 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS6037123A (ja) 1985-02-26

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