JPH0433124B2 - - Google Patents

Info

Publication number
JPH0433124B2
JPH0433124B2 JP23901784A JP23901784A JPH0433124B2 JP H0433124 B2 JPH0433124 B2 JP H0433124B2 JP 23901784 A JP23901784 A JP 23901784A JP 23901784 A JP23901784 A JP 23901784A JP H0433124 B2 JPH0433124 B2 JP H0433124B2
Authority
JP
Japan
Prior art keywords
roll
width
substrate
film
auxiliary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP23901784A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61116812A (ja
Inventor
Akio Konishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP23901784A priority Critical patent/JPS61116812A/ja
Publication of JPS61116812A publication Critical patent/JPS61116812A/ja
Publication of JPH0433124B2 publication Critical patent/JPH0433124B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)
JP23901784A 1984-11-13 1984-11-13 垂直磁化膜形成装置 Granted JPS61116812A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23901784A JPS61116812A (ja) 1984-11-13 1984-11-13 垂直磁化膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23901784A JPS61116812A (ja) 1984-11-13 1984-11-13 垂直磁化膜形成装置

Publications (2)

Publication Number Publication Date
JPS61116812A JPS61116812A (ja) 1986-06-04
JPH0433124B2 true JPH0433124B2 (enrdf_load_stackoverflow) 1992-06-02

Family

ID=17038651

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23901784A Granted JPS61116812A (ja) 1984-11-13 1984-11-13 垂直磁化膜形成装置

Country Status (1)

Country Link
JP (1) JPS61116812A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006045593A (ja) * 2004-08-02 2006-02-16 Fuji Electric Holdings Co Ltd 基板処理装置および基板処理方法

Also Published As

Publication number Publication date
JPS61116812A (ja) 1986-06-04

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term