JPH0432347B2 - - Google Patents

Info

Publication number
JPH0432347B2
JPH0432347B2 JP11639587A JP11639587A JPH0432347B2 JP H0432347 B2 JPH0432347 B2 JP H0432347B2 JP 11639587 A JP11639587 A JP 11639587A JP 11639587 A JP11639587 A JP 11639587A JP H0432347 B2 JPH0432347 B2 JP H0432347B2
Authority
JP
Japan
Prior art keywords
semiconductor device
probe needle
relay
fixed cover
support plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11639587A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63281079A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11639587A priority Critical patent/JPS63281079A/ja
Publication of JPS63281079A publication Critical patent/JPS63281079A/ja
Publication of JPH0432347B2 publication Critical patent/JPH0432347B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP11639587A 1987-05-12 1987-05-12 半導体装置の検査装置 Granted JPS63281079A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11639587A JPS63281079A (ja) 1987-05-12 1987-05-12 半導体装置の検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11639587A JPS63281079A (ja) 1987-05-12 1987-05-12 半導体装置の検査装置

Publications (2)

Publication Number Publication Date
JPS63281079A JPS63281079A (ja) 1988-11-17
JPH0432347B2 true JPH0432347B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-05-29

Family

ID=14685977

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11639587A Granted JPS63281079A (ja) 1987-05-12 1987-05-12 半導体装置の検査装置

Country Status (1)

Country Link
JP (1) JPS63281079A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7458837B2 (en) 2006-01-13 2008-12-02 Advantest Corporation Connector housing block, interface member and electronic device testing apparatus
JP4488438B2 (ja) * 2006-01-13 2010-06-23 株式会社アドバンテスト コネクタハウジングブロック、インターフェイス部材および電子部品試験装置

Also Published As

Publication number Publication date
JPS63281079A (ja) 1988-11-17

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