JPH0431831Y2 - - Google Patents

Info

Publication number
JPH0431831Y2
JPH0431831Y2 JP1985104293U JP10429385U JPH0431831Y2 JP H0431831 Y2 JPH0431831 Y2 JP H0431831Y2 JP 1985104293 U JP1985104293 U JP 1985104293U JP 10429385 U JP10429385 U JP 10429385U JP H0431831 Y2 JPH0431831 Y2 JP H0431831Y2
Authority
JP
Japan
Prior art keywords
metal plate
thin metal
piezoelectric element
surface side
ceramic actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985104293U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6214990U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985104293U priority Critical patent/JPH0431831Y2/ja
Publication of JPS6214990U publication Critical patent/JPS6214990U/ja
Application granted granted Critical
Publication of JPH0431831Y2 publication Critical patent/JPH0431831Y2/ja
Expired legal-status Critical Current

Links

JP1985104293U 1985-07-09 1985-07-09 Expired JPH0431831Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985104293U JPH0431831Y2 (enExample) 1985-07-09 1985-07-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985104293U JPH0431831Y2 (enExample) 1985-07-09 1985-07-09

Publications (2)

Publication Number Publication Date
JPS6214990U JPS6214990U (enExample) 1987-01-29
JPH0431831Y2 true JPH0431831Y2 (enExample) 1992-07-30

Family

ID=30977652

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985104293U Expired JPH0431831Y2 (enExample) 1985-07-09 1985-07-09

Country Status (1)

Country Link
JP (1) JPH0431831Y2 (enExample)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58172391U (ja) * 1982-05-10 1983-11-17 日本特殊陶業株式会社 微動変位制御装置
JPS6074981A (ja) * 1983-09-30 1985-04-27 Hitachi Maxell Ltd 捩りモ−ドの振動子を用いた圧電平板モ−タ

Also Published As

Publication number Publication date
JPS6214990U (enExample) 1987-01-29

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