JPH0431522B2 - - Google Patents

Info

Publication number
JPH0431522B2
JPH0431522B2 JP17914586A JP17914586A JPH0431522B2 JP H0431522 B2 JPH0431522 B2 JP H0431522B2 JP 17914586 A JP17914586 A JP 17914586A JP 17914586 A JP17914586 A JP 17914586A JP H0431522 B2 JPH0431522 B2 JP H0431522B2
Authority
JP
Japan
Prior art keywords
film thickness
light
cosδλ
base
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17914586A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6336105A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17914586A priority Critical patent/JPS6336105A/ja
Priority to US07/062,242 priority patent/US4850711A/en
Priority to DE87108476T priority patent/DE3787320T2/de
Priority to EP87108476A priority patent/EP0249235B1/fr
Publication of JPS6336105A publication Critical patent/JPS6336105A/ja
Publication of JPH0431522B2 publication Critical patent/JPH0431522B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP17914586A 1986-06-13 1986-07-30 膜厚測定装置 Granted JPS6336105A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP17914586A JPS6336105A (ja) 1986-07-30 1986-07-30 膜厚測定装置
US07/062,242 US4850711A (en) 1986-06-13 1987-06-11 Film thickness-measuring apparatus using linearly polarized light
DE87108476T DE3787320T2 (de) 1986-06-13 1987-06-12 Schichtdickenmessgerät mit linearpolarisiertem Licht.
EP87108476A EP0249235B1 (fr) 1986-06-13 1987-06-12 Appareil pour mesurer l'épaisseur d'une couche par la lumière à polarisation linéaire

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17914586A JPS6336105A (ja) 1986-07-30 1986-07-30 膜厚測定装置

Publications (2)

Publication Number Publication Date
JPS6336105A JPS6336105A (ja) 1988-02-16
JPH0431522B2 true JPH0431522B2 (fr) 1992-05-26

Family

ID=16060756

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17914586A Granted JPS6336105A (ja) 1986-06-13 1986-07-30 膜厚測定装置

Country Status (1)

Country Link
JP (1) JPS6336105A (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0527230B1 (fr) * 1991-01-30 1996-06-05 Nkk Corporation Ellipsometre
JPH05157521A (ja) * 1991-08-29 1993-06-22 Nkk Corp エリプソパラメータ測定方法及びエリプソメータ
JPH05113371A (ja) * 1991-08-29 1993-05-07 Nkk Corp エリプソパラメータ測定方法及びエリプソメータ
JP2594773B2 (ja) * 1994-12-20 1997-03-26 財団法人韓国電子通信研究所 金属有機物の化学蒸着による膜のモニタリング装置
JP4694179B2 (ja) * 2004-11-18 2011-06-08 株式会社トプコン 表面検査装置
JP2007040930A (ja) * 2005-08-05 2007-02-15 Ebara Corp 膜厚測定方法及び基板処理装置
KR100870132B1 (ko) * 2007-05-21 2008-11-25 한국과학기술원 음향광학 변조 필터를 이용한 분광타원해석기 및 이를이용한 타원 해석방법
KR101274398B1 (ko) * 2008-02-14 2013-06-14 미쓰비시덴키 가부시키가이샤 컨트롤 센터
JP4950309B2 (ja) * 2008-02-14 2012-06-13 三菱電機株式会社 コントロールセンタ
KR101193253B1 (ko) * 2008-02-14 2012-10-19 미쓰비시덴키 가부시키가이샤 컨트롤 센터
KR200486227Y1 (ko) 2016-03-16 2018-04-17 엘에스산전 주식회사 모터 컨트롤 센터 유닛

Also Published As

Publication number Publication date
JPS6336105A (ja) 1988-02-16

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees