JPH0431522B2 - - Google Patents
Info
- Publication number
- JPH0431522B2 JPH0431522B2 JP17914586A JP17914586A JPH0431522B2 JP H0431522 B2 JPH0431522 B2 JP H0431522B2 JP 17914586 A JP17914586 A JP 17914586A JP 17914586 A JP17914586 A JP 17914586A JP H0431522 B2 JPH0431522 B2 JP H0431522B2
- Authority
- JP
- Japan
- Prior art keywords
- film thickness
- light
- cosδλ
- base
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010408 film Substances 0.000 claims description 45
- 239000010409 thin film Substances 0.000 claims description 20
- 230000010287 polarization Effects 0.000 claims description 8
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 description 14
- 238000005259 measurement Methods 0.000 description 11
- 239000003921 oil Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 230000000704 physical effect Effects 0.000 description 5
- 229910000831 Steel Inorganic materials 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 229910001335 Galvanized steel Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000012885 constant function Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000008397 galvanized steel Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002480 mineral oil Substances 0.000 description 1
- 235000010446 mineral oil Nutrition 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17914586A JPS6336105A (ja) | 1986-07-30 | 1986-07-30 | 膜厚測定装置 |
US07/062,242 US4850711A (en) | 1986-06-13 | 1987-06-11 | Film thickness-measuring apparatus using linearly polarized light |
DE87108476T DE3787320T2 (de) | 1986-06-13 | 1987-06-12 | Schichtdickenmessgerät mit linearpolarisiertem Licht. |
EP87108476A EP0249235B1 (fr) | 1986-06-13 | 1987-06-12 | Appareil pour mesurer l'épaisseur d'une couche par la lumière à polarisation linéaire |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17914586A JPS6336105A (ja) | 1986-07-30 | 1986-07-30 | 膜厚測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6336105A JPS6336105A (ja) | 1988-02-16 |
JPH0431522B2 true JPH0431522B2 (fr) | 1992-05-26 |
Family
ID=16060756
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17914586A Granted JPS6336105A (ja) | 1986-06-13 | 1986-07-30 | 膜厚測定装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6336105A (fr) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0527230B1 (fr) * | 1991-01-30 | 1996-06-05 | Nkk Corporation | Ellipsometre |
JPH05157521A (ja) * | 1991-08-29 | 1993-06-22 | Nkk Corp | エリプソパラメータ測定方法及びエリプソメータ |
JPH05113371A (ja) * | 1991-08-29 | 1993-05-07 | Nkk Corp | エリプソパラメータ測定方法及びエリプソメータ |
JP2594773B2 (ja) * | 1994-12-20 | 1997-03-26 | 財団法人韓国電子通信研究所 | 金属有機物の化学蒸着による膜のモニタリング装置 |
JP4694179B2 (ja) * | 2004-11-18 | 2011-06-08 | 株式会社トプコン | 表面検査装置 |
JP2007040930A (ja) * | 2005-08-05 | 2007-02-15 | Ebara Corp | 膜厚測定方法及び基板処理装置 |
KR100870132B1 (ko) * | 2007-05-21 | 2008-11-25 | 한국과학기술원 | 음향광학 변조 필터를 이용한 분광타원해석기 및 이를이용한 타원 해석방법 |
KR101274398B1 (ko) * | 2008-02-14 | 2013-06-14 | 미쓰비시덴키 가부시키가이샤 | 컨트롤 센터 |
JP4950309B2 (ja) * | 2008-02-14 | 2012-06-13 | 三菱電機株式会社 | コントロールセンタ |
KR101193253B1 (ko) * | 2008-02-14 | 2012-10-19 | 미쓰비시덴키 가부시키가이샤 | 컨트롤 센터 |
KR200486227Y1 (ko) | 2016-03-16 | 2018-04-17 | 엘에스산전 주식회사 | 모터 컨트롤 센터 유닛 |
-
1986
- 1986-07-30 JP JP17914586A patent/JPS6336105A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6336105A (ja) | 1988-02-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |