JPH043107B2 - - Google Patents

Info

Publication number
JPH043107B2
JPH043107B2 JP57076303A JP7630382A JPH043107B2 JP H043107 B2 JPH043107 B2 JP H043107B2 JP 57076303 A JP57076303 A JP 57076303A JP 7630382 A JP7630382 A JP 7630382A JP H043107 B2 JPH043107 B2 JP H043107B2
Authority
JP
Japan
Prior art keywords
chip
wafer
pattern
name
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57076303A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58194348A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP57076303A priority Critical patent/JPS58194348A/ja
Publication of JPS58194348A publication Critical patent/JPS58194348A/ja
Publication of JPH043107B2 publication Critical patent/JPH043107B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P74/00—
    • H10W46/603—

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP57076303A 1982-05-07 1982-05-07 ウエハ内チツプの自動種別確認方式 Granted JPS58194348A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57076303A JPS58194348A (ja) 1982-05-07 1982-05-07 ウエハ内チツプの自動種別確認方式

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57076303A JPS58194348A (ja) 1982-05-07 1982-05-07 ウエハ内チツプの自動種別確認方式

Publications (2)

Publication Number Publication Date
JPS58194348A JPS58194348A (ja) 1983-11-12
JPH043107B2 true JPH043107B2 (enExample) 1992-01-22

Family

ID=13601597

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57076303A Granted JPS58194348A (ja) 1982-05-07 1982-05-07 ウエハ内チツプの自動種別確認方式

Country Status (1)

Country Link
JP (1) JPS58194348A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0715931B2 (ja) * 1985-08-30 1995-02-22 キヤノン株式会社 ウェハ処理装置
JPH04130386U (ja) * 1991-05-23 1992-11-30 株式会社ダイクレ Ｆｒｐグレーチングの積層構造

Also Published As

Publication number Publication date
JPS58194348A (ja) 1983-11-12

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