JPH0430134B2 - - Google Patents
Info
- Publication number
- JPH0430134B2 JPH0430134B2 JP18274682A JP18274682A JPH0430134B2 JP H0430134 B2 JPH0430134 B2 JP H0430134B2 JP 18274682 A JP18274682 A JP 18274682A JP 18274682 A JP18274682 A JP 18274682A JP H0430134 B2 JPH0430134 B2 JP H0430134B2
- Authority
- JP
- Japan
- Prior art keywords
- main surface
- etching
- hole forming
- photoresist film
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005530 etching Methods 0.000 claims description 42
- 229920002120 photoresistant polymer Polymers 0.000 claims description 31
- 238000000034 method Methods 0.000 claims description 27
- 238000010894 electron beam technology Methods 0.000 claims description 19
- 238000004519 manufacturing process Methods 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 14
- 239000007788 liquid Substances 0.000 claims description 9
- 238000001035 drying Methods 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 238000005406 washing Methods 0.000 claims description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 229910001209 Low-carbon steel Inorganic materials 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 235000010724 Wisteria floribunda Nutrition 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- JOSWYUNQBRPBDN-UHFFFAOYSA-P ammonium dichromate Chemical compound [NH4+].[NH4+].[O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O JOSWYUNQBRPBDN-UHFFFAOYSA-P 0.000 description 1
- 239000005018 casein Substances 0.000 description 1
- BECPQYXYKAMYBN-UHFFFAOYSA-N casein, tech. Chemical compound NCCCCC(C(O)=O)N=C(O)C(CC(O)=O)N=C(O)C(CCC(O)=N)N=C(O)C(CC(C)C)N=C(O)C(CCC(O)=O)N=C(O)C(CC(O)=O)N=C(O)C(CCC(O)=O)N=C(O)C(C(C)O)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=O)N=C(O)C(CCC(O)=O)N=C(O)C(COP(O)(O)=O)N=C(O)C(CCC(O)=N)N=C(O)C(N)CC1=CC=CC=C1 BECPQYXYKAMYBN-UHFFFAOYSA-N 0.000 description 1
- 235000021240 caseins Nutrition 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000004200 microcrystalline wax Substances 0.000 description 1
- 229940114937 microcrystalline wax Drugs 0.000 description 1
- 235000019808 microcrystalline wax Nutrition 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 235000011121 sodium hydroxide Nutrition 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/14—Manufacture of electrodes or electrode systems of non-emitting electrodes
- H01J9/142—Manufacture of electrodes or electrode systems of non-emitting electrodes of shadow-masks for colour television tubes
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18274682A JPS5973834A (ja) | 1982-10-20 | 1982-10-20 | シャドウマスクの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18274682A JPS5973834A (ja) | 1982-10-20 | 1982-10-20 | シャドウマスクの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5973834A JPS5973834A (ja) | 1984-04-26 |
| JPH0430134B2 true JPH0430134B2 (enrdf_load_html_response) | 1992-05-20 |
Family
ID=16123707
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18274682A Granted JPS5973834A (ja) | 1982-10-20 | 1982-10-20 | シャドウマスクの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5973834A (enrdf_load_html_response) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101219622B1 (ko) * | 2010-08-04 | 2013-01-08 | 김석중 | 예혼합 압축 자기착화형 2행정 엔진 |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5336587A (en) * | 1988-05-24 | 1994-08-09 | Kabushiki Kaisha Toshiba | Method of manufacturing main plates for exposure printing |
| JPH02103841A (ja) * | 1988-10-11 | 1990-04-16 | Toshiba Corp | シャドウマスクの製造方法 |
| DE69111002T2 (de) * | 1990-09-20 | 1995-11-02 | Dainippon Screen Mfg | Verfahren zur Herstellung von kleinen Durchgangslöchern in dünne Metallplatten. |
| JP3009076B2 (ja) * | 1990-09-20 | 2000-02-14 | 大日本スクリーン製造 株式会社 | 金属薄板への微細透孔形成方法 |
-
1982
- 1982-10-20 JP JP18274682A patent/JPS5973834A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101219622B1 (ko) * | 2010-08-04 | 2013-01-08 | 김석중 | 예혼합 압축 자기착화형 2행정 엔진 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5973834A (ja) | 1984-04-26 |
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