JPH0429993Y2 - - Google Patents

Info

Publication number
JPH0429993Y2
JPH0429993Y2 JP1986048729U JP4872986U JPH0429993Y2 JP H0429993 Y2 JPH0429993 Y2 JP H0429993Y2 JP 1986048729 U JP1986048729 U JP 1986048729U JP 4872986 U JP4872986 U JP 4872986U JP H0429993 Y2 JPH0429993 Y2 JP H0429993Y2
Authority
JP
Japan
Prior art keywords
cylinder
piston
rotating shaft
shifter
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986048729U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62159237U (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986048729U priority Critical patent/JPH0429993Y2/ja
Publication of JPS62159237U publication Critical patent/JPS62159237U/ja
Application granted granted Critical
Publication of JPH0429993Y2 publication Critical patent/JPH0429993Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Actuator (AREA)
  • Feeding Of Workpieces (AREA)
JP1986048729U 1986-04-01 1986-04-01 Expired JPH0429993Y2 (en))

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986048729U JPH0429993Y2 (en)) 1986-04-01 1986-04-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986048729U JPH0429993Y2 (en)) 1986-04-01 1986-04-01

Publications (2)

Publication Number Publication Date
JPS62159237U JPS62159237U (en)) 1987-10-09
JPH0429993Y2 true JPH0429993Y2 (en)) 1992-07-20

Family

ID=30870534

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986048729U Expired JPH0429993Y2 (en)) 1986-04-01 1986-04-01

Country Status (1)

Country Link
JP (1) JPH0429993Y2 (en))

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9605692B2 (en) * 2014-10-01 2017-03-28 Woodward, Inc. Locking rotary actuator

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5161948A (ja) * 1974-11-26 1976-05-28 Seiko Instr & Electronics Manipyureeta
JPS52143658A (en) * 1976-05-24 1977-11-30 Toshiba Corp Device for positioning wrist
JPS5837118B2 (ja) * 1980-06-04 1983-08-13 ファナック株式会社 工業用ロボットの手首機構
JPS5746149U (en)) * 1980-08-28 1982-03-13
JPS5761948A (en) * 1980-10-01 1982-04-14 Toshiba Corp Automatic chemicial analyzer

Also Published As

Publication number Publication date
JPS62159237U (en)) 1987-10-09

Similar Documents

Publication Publication Date Title
US4808059A (en) Apparatus and method for transferring workpieces
EP1197988B1 (en) Multiple wafer lift apparatus and method therefor
US4061062A (en) Method and a device for the automatic replacement of a workpiece to be machined on a machine-tool
JPH05160241A (ja) 基板処理装置
US20020189085A1 (en) Line of manufacturing units for carrying out machining operations, provided with modular translating devices for the transfer of workpieces form one unit to another of the line
CN210365895U (zh) 一种三轴线性移动换向抓取设备
CN108466511A (zh) 玻璃精雕机组合生产线
JPH0429993Y2 (en))
CN209831279U (zh) 晶圆凹口抛光装置
JPS61293645A (ja) 搬送・塗布用ロボツト装置
JPH091492A (ja) 重量ワークを搬送する方法
WO1991004131A1 (en) Apparatus for controlling driving of change arm
CN209831278U (zh) 晶圆边缘抛光装置
JPH0338006B2 (en))
CN210281830U (zh) 晶圆边缘抛光机构及晶圆边缘抛光装置
EP0371205B1 (en) Transfer Device
JP2655850B2 (ja) プレスブレーキにおける板材支持装置
JPS5866603A (ja) Ｎｃ旋盤用ロボツト
KR20060044780A (ko) 판재 가공 기계를 위한 판형 요소의 로딩 및 언로딩 장치
JPS6218383Y2 (en))
JPH0655308A (ja) ローディング装置
JPS597027Y2 (ja) オ−トロ−ダ−
JPH07148687A (ja) 産業ロボットの把持装置とその運転方法
JPH0520844U (ja) ワーク受渡装置
JPH0647692A (ja) ワークの把持方法と把持装置