JPH0429439Y2 - - Google Patents
Info
- Publication number
- JPH0429439Y2 JPH0429439Y2 JP1982191351U JP19135182U JPH0429439Y2 JP H0429439 Y2 JPH0429439 Y2 JP H0429439Y2 JP 1982191351 U JP1982191351 U JP 1982191351U JP 19135182 U JP19135182 U JP 19135182U JP H0429439 Y2 JPH0429439 Y2 JP H0429439Y2
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- sample
- beam irradiation
- electron
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 33
- 238000010894 electron beam technology Methods 0.000 claims description 18
- 230000003287 optical effect Effects 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 description 15
- 230000001678 irradiating effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000000605 extraction Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19135182U JPS5997458U (ja) | 1982-12-20 | 1982-12-20 | イオン電子線照射装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19135182U JPS5997458U (ja) | 1982-12-20 | 1982-12-20 | イオン電子線照射装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5997458U JPS5997458U (ja) | 1984-07-02 |
| JPH0429439Y2 true JPH0429439Y2 (bg) | 1992-07-16 |
Family
ID=30412081
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19135182U Granted JPS5997458U (ja) | 1982-12-20 | 1982-12-20 | イオン電子線照射装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5997458U (bg) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS515315A (en) * | 1974-07-04 | 1976-01-17 | Hiroshi Arima | Rensetsutairuno seizohoho |
| JPS52104290A (en) * | 1976-02-27 | 1977-09-01 | Shimadzu Corp | Composite analysis unit |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54117059U (bg) * | 1978-02-03 | 1979-08-16 |
-
1982
- 1982-12-20 JP JP19135182U patent/JPS5997458U/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS515315A (en) * | 1974-07-04 | 1976-01-17 | Hiroshi Arima | Rensetsutairuno seizohoho |
| JPS52104290A (en) * | 1976-02-27 | 1977-09-01 | Shimadzu Corp | Composite analysis unit |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5997458U (ja) | 1984-07-02 |
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