JPH0429364Y2 - - Google Patents
Info
- Publication number
- JPH0429364Y2 JPH0429364Y2 JP1986127524U JP12752486U JPH0429364Y2 JP H0429364 Y2 JPH0429364 Y2 JP H0429364Y2 JP 1986127524 U JP1986127524 U JP 1986127524U JP 12752486 U JP12752486 U JP 12752486U JP H0429364 Y2 JPH0429364 Y2 JP H0429364Y2
- Authority
- JP
- Japan
- Prior art keywords
- measured
- light
- detector
- film thickness
- measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005259 measurement Methods 0.000 claims description 13
- 230000003287 optical effect Effects 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 3
- 238000009825 accumulation Methods 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 238000010009 beating Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986127524U JPH0429364Y2 (ru) | 1986-08-21 | 1986-08-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986127524U JPH0429364Y2 (ru) | 1986-08-21 | 1986-08-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6333406U JPS6333406U (ru) | 1988-03-03 |
| JPH0429364Y2 true JPH0429364Y2 (ru) | 1992-07-16 |
Family
ID=31022358
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986127524U Expired JPH0429364Y2 (ru) | 1986-08-21 | 1986-08-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0429364Y2 (ru) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5752807A (en) * | 1980-09-17 | 1982-03-29 | Ricoh Co Ltd | Device for measuring film thickness |
-
1986
- 1986-08-21 JP JP1986127524U patent/JPH0429364Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5752807A (en) * | 1980-09-17 | 1982-03-29 | Ricoh Co Ltd | Device for measuring film thickness |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6333406U (ru) | 1988-03-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6550101B2 (ja) | 膜厚測定方法及び膜厚測定装置 | |
| JPH0330802B2 (ru) | ||
| CA2849502A1 (en) | Apparatus for detecting a 3d structure of an object | |
| KR940016660A (ko) | 박막 두께 측정 장치 및 방법 | |
| JP3065374B2 (ja) | 被検体の光学的検査方法、被検体の光学的検査装置、および被検体の光学的検査用干渉計 | |
| US4969744A (en) | Optical angle-measuring device | |
| JP2004530905A (ja) | 干渉計システム、インタフェログラムの記録方法、ならびに目的表面を有する物体の提供および製造方法 | |
| JPH0429364Y2 (ru) | ||
| CN107942339B (zh) | 一种光子计数激光干涉测距方法 | |
| JPS6350703A (ja) | 膜厚測定装置 | |
| JPH0464417B2 (ru) | ||
| JPS59105508A (ja) | 白色干渉膜厚測定方法 | |
| KR20040010172A (ko) | 방사율 분포 측정 장치 및 방법 | |
| JPH0444202B2 (ru) | ||
| JPS5952963B2 (ja) | 変形の測定方法 | |
| JPH0435683B2 (ru) | ||
| JPS6350704A (ja) | 膜厚測定装置 | |
| JPH064611U (ja) | 光学式距離測定装置 | |
| JPH0466285B2 (ru) | ||
| JP2595050B2 (ja) | 微小角度測定装置 | |
| JPH063364B2 (ja) | 膜厚測定方法 | |
| JPS58727A (ja) | フ−リエ変換分光装置 | |
| JPS6350705A (ja) | 膜厚測定装置 | |
| JPH01320409A (ja) | 膜厚測定方法 | |
| JPH0742084Y2 (ja) | 表面形状測定器 |