JPH0466285B2 - - Google Patents
Info
- Publication number
- JPH0466285B2 JPH0466285B2 JP61196150A JP19615086A JPH0466285B2 JP H0466285 B2 JPH0466285 B2 JP H0466285B2 JP 61196150 A JP61196150 A JP 61196150A JP 19615086 A JP19615086 A JP 19615086A JP H0466285 B2 JPH0466285 B2 JP H0466285B2
- Authority
- JP
- Japan
- Prior art keywords
- measured
- light
- film thickness
- refractive index
- interference
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005259 measurement Methods 0.000 claims description 11
- 238000004611 spectroscopical analysis Methods 0.000 claims 1
- 238000001228 spectrum Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19615086A JPS6350706A (ja) | 1986-08-21 | 1986-08-21 | 膜厚測定装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19615086A JPS6350706A (ja) | 1986-08-21 | 1986-08-21 | 膜厚測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6350706A JPS6350706A (ja) | 1988-03-03 |
JPH0466285B2 true JPH0466285B2 (ru) | 1992-10-22 |
Family
ID=16353041
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19615086A Granted JPS6350706A (ja) | 1986-08-21 | 1986-08-21 | 膜厚測定装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6350706A (ru) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4838169A (ru) * | 1971-09-16 | 1973-06-05 | ||
JPS6176905A (ja) * | 1984-09-21 | 1986-04-19 | Oak Seisakusho:Kk | 膜厚測定の方法 |
-
1986
- 1986-08-21 JP JP19615086A patent/JPS6350706A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4838169A (ru) * | 1971-09-16 | 1973-06-05 | ||
JPS6176905A (ja) * | 1984-09-21 | 1986-04-19 | Oak Seisakusho:Kk | 膜厚測定の方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS6350706A (ja) | 1988-03-03 |
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