JPS6333406U - - Google Patents
Info
- Publication number
- JPS6333406U JPS6333406U JP12752486U JP12752486U JPS6333406U JP S6333406 U JPS6333406 U JP S6333406U JP 12752486 U JP12752486 U JP 12752486U JP 12752486 U JP12752486 U JP 12752486U JP S6333406 U JPS6333406 U JP S6333406U
- Authority
- JP
- Japan
- Prior art keywords
- measured
- detector
- film thickness
- light
- measuring device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986127524U JPH0429364Y2 (ru) | 1986-08-21 | 1986-08-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986127524U JPH0429364Y2 (ru) | 1986-08-21 | 1986-08-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6333406U true JPS6333406U (ru) | 1988-03-03 |
| JPH0429364Y2 JPH0429364Y2 (ru) | 1992-07-16 |
Family
ID=31022358
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986127524U Expired JPH0429364Y2 (ru) | 1986-08-21 | 1986-08-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0429364Y2 (ru) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5752807A (en) * | 1980-09-17 | 1982-03-29 | Ricoh Co Ltd | Device for measuring film thickness |
-
1986
- 1986-08-21 JP JP1986127524U patent/JPH0429364Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5752807A (en) * | 1980-09-17 | 1982-03-29 | Ricoh Co Ltd | Device for measuring film thickness |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0429364Y2 (ru) | 1992-07-16 |