JPH0428143B2 - - Google Patents
Info
- Publication number
- JPH0428143B2 JPH0428143B2 JP29866886A JP29866886A JPH0428143B2 JP H0428143 B2 JPH0428143 B2 JP H0428143B2 JP 29866886 A JP29866886 A JP 29866886A JP 29866886 A JP29866886 A JP 29866886A JP H0428143 B2 JPH0428143 B2 JP H0428143B2
- Authority
- JP
- Japan
- Prior art keywords
- dust
- value
- comparison
- tolerance
- management
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000428 dust Substances 0.000 claims description 93
- 238000005259 measurement Methods 0.000 claims description 23
- 238000001514 detection method Methods 0.000 claims description 16
- 238000004364 calculation method Methods 0.000 claims description 15
- 235000012431 wafers Nutrition 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29866886A JPS63152138A (ja) | 1986-12-17 | 1986-12-17 | ダスト管理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29866886A JPS63152138A (ja) | 1986-12-17 | 1986-12-17 | ダスト管理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63152138A JPS63152138A (ja) | 1988-06-24 |
| JPH0428143B2 true JPH0428143B2 (OSRAM) | 1992-05-13 |
Family
ID=17862721
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29866886A Granted JPS63152138A (ja) | 1986-12-17 | 1986-12-17 | ダスト管理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63152138A (OSRAM) |
-
1986
- 1986-12-17 JP JP29866886A patent/JPS63152138A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63152138A (ja) | 1988-06-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |