JPH0428139B2 - - Google Patents
Info
- Publication number
- JPH0428139B2 JPH0428139B2 JP16875384A JP16875384A JPH0428139B2 JP H0428139 B2 JPH0428139 B2 JP H0428139B2 JP 16875384 A JP16875384 A JP 16875384A JP 16875384 A JP16875384 A JP 16875384A JP H0428139 B2 JPH0428139 B2 JP H0428139B2
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- width
- pixels
- directions
- defect inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59168753A JPS6147634A (ja) | 1984-08-14 | 1984-08-14 | パタ−ンの欠陥検査方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59168753A JPS6147634A (ja) | 1984-08-14 | 1984-08-14 | パタ−ンの欠陥検査方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6147634A JPS6147634A (ja) | 1986-03-08 |
| JPH0428139B2 true JPH0428139B2 (enrdf_load_stackoverflow) | 1992-05-13 |
Family
ID=15873789
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59168753A Granted JPS6147634A (ja) | 1984-08-14 | 1984-08-14 | パタ−ンの欠陥検査方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6147634A (enrdf_load_stackoverflow) |
-
1984
- 1984-08-14 JP JP59168753A patent/JPS6147634A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6147634A (ja) | 1986-03-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0534720B1 (en) | Register marks | |
| US4693608A (en) | Method and apparatus for determining position of points on article | |
| KR960013357B1 (ko) | 화상데이타 검사방법 및 장치 | |
| JPS643050B2 (enrdf_load_stackoverflow) | ||
| DD219567A5 (de) | Verfahren und geraet fuer die fehlerpruefung von uebertragungsmasken von leitungsmustern integrierter schaltungen | |
| JP3721983B2 (ja) | 三次元形状の欠陥検査方法 | |
| JPH0428139B2 (enrdf_load_stackoverflow) | ||
| JPS60126830A (ja) | パタ−ンの欠陥検査装置に用いる走査方法 | |
| JP2000018919A (ja) | 撮像装置，光学式測定装置および光学式検査装置 | |
| JP2004208299A (ja) | センサアセンブリにおけるアセンブリおよび位置合わせエラーを測定するための標的、方法および装置 | |
| JPS63187118A (ja) | 位置読み取りエンコ−ダ | |
| JPS6356702B2 (enrdf_load_stackoverflow) | ||
| JPH058822B2 (enrdf_load_stackoverflow) | ||
| JPH10311705A (ja) | 画像入力装置 | |
| JP2829211B2 (ja) | 合せずれ測定方法 | |
| JPH0666558A (ja) | 微細対象物測定装置の測定箇所視野内設定方法 | |
| JP3017839B2 (ja) | 欠陥検査方法及び検査装置 | |
| JPH0282367A (ja) | ３次元形状検査装置 | |
| JPS6133442B2 (enrdf_load_stackoverflow) | ||
| JPS63199416A (ja) | 位置ずれ測定用マ−クおよびこれを用いた位置ずれ測定方法 | |
| JPS6147635A (ja) | パタ−ンの欠陥検査装置に用いるパタ−ンの判定方法 | |
| JP3684707B2 (ja) | レチクルパターン検査方法 | |
| JPS63222247A (ja) | 画像歪補正方法 | |
| JP2892068B2 (ja) | 荷電ビーム描画方法 | |
| US5317338A (en) | Visual measurement technique and test pattern for aperture offsets in photoplotters |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |