JPS6147634A - パタ−ンの欠陥検査方法 - Google Patents

パタ−ンの欠陥検査方法

Info

Publication number
JPS6147634A
JPS6147634A JP59168753A JP16875384A JPS6147634A JP S6147634 A JPS6147634 A JP S6147634A JP 59168753 A JP59168753 A JP 59168753A JP 16875384 A JP16875384 A JP 16875384A JP S6147634 A JPS6147634 A JP S6147634A
Authority
JP
Japan
Prior art keywords
pattern
width
directions
pixels
rule
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59168753A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0428139B2 (enrdf_load_stackoverflow
Inventor
Yasushi Uchiyama
内山　康
Daikichi Awamura
粟村　大吉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON JIDO SEIGYO KK
Original Assignee
NIPPON JIDO SEIGYO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON JIDO SEIGYO KK filed Critical NIPPON JIDO SEIGYO KK
Priority to JP59168753A priority Critical patent/JPS6147634A/ja
Publication of JPS6147634A publication Critical patent/JPS6147634A/ja
Publication of JPH0428139B2 publication Critical patent/JPH0428139B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP59168753A 1984-08-14 1984-08-14 パタ−ンの欠陥検査方法 Granted JPS6147634A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59168753A JPS6147634A (ja) 1984-08-14 1984-08-14 パタ−ンの欠陥検査方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59168753A JPS6147634A (ja) 1984-08-14 1984-08-14 パタ−ンの欠陥検査方法

Publications (2)

Publication Number Publication Date
JPS6147634A true JPS6147634A (ja) 1986-03-08
JPH0428139B2 JPH0428139B2 (enrdf_load_stackoverflow) 1992-05-13

Family

ID=15873789

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59168753A Granted JPS6147634A (ja) 1984-08-14 1984-08-14 パタ−ンの欠陥検査方法

Country Status (1)

Country Link
JP (1) JPS6147634A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0428139B2 (enrdf_load_stackoverflow) 1992-05-13

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees