JPH0427121B2 - - Google Patents

Info

Publication number
JPH0427121B2
JPH0427121B2 JP60260801A JP26080185A JPH0427121B2 JP H0427121 B2 JPH0427121 B2 JP H0427121B2 JP 60260801 A JP60260801 A JP 60260801A JP 26080185 A JP26080185 A JP 26080185A JP H0427121 B2 JPH0427121 B2 JP H0427121B2
Authority
JP
Japan
Prior art keywords
carrier
transfer
semiconductor wafers
boat
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60260801A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62121102A (ja
Inventor
Wataru Ookase
Kenichi Kinoshita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Sagami Ltd
Original Assignee
Tokyo Electron Sagami Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Sagami Ltd filed Critical Tokyo Electron Sagami Ltd
Priority to JP26080185A priority Critical patent/JPS62121102A/ja
Publication of JPS62121102A publication Critical patent/JPS62121102A/ja
Publication of JPH0427121B2 publication Critical patent/JPH0427121B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Specific Conveyance Elements (AREA)
JP26080185A 1985-11-20 1985-11-20 炉処理装置 Granted JPS62121102A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26080185A JPS62121102A (ja) 1985-11-20 1985-11-20 炉処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26080185A JPS62121102A (ja) 1985-11-20 1985-11-20 炉処理装置

Publications (2)

Publication Number Publication Date
JPS62121102A JPS62121102A (ja) 1987-06-02
JPH0427121B2 true JPH0427121B2 (esLanguage) 1992-05-11

Family

ID=17352931

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26080185A Granted JPS62121102A (ja) 1985-11-20 1985-11-20 炉処理装置

Country Status (1)

Country Link
JP (1) JPS62121102A (esLanguage)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020141012A1 (en) * 2018-12-31 2020-07-09 Goldhofer Ag Heavy-load vehicle

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59128125A (ja) * 1983-01-12 1984-07-24 Nec Home Electronics Ltd ロ−ダ・アンロ−ダ
JPS6031410A (ja) * 1983-07-28 1985-02-18 Nippon Telegr & Teleph Corp <Ntt> 回転式棚設備
JPS6044406A (ja) * 1983-08-17 1985-03-09 Daifuku Co Ltd 荷保管設備
JPS6044403A (ja) * 1983-08-17 1985-03-09 Daifuku Co Ltd クリ−ンル−ム内の荷保管設備
JPS6044404A (ja) * 1983-08-17 1985-03-09 Daifuku Co Ltd クリ−ンル−ム内の荷保管設備
JPS6044405A (ja) * 1983-08-17 1985-03-09 Daifuku Co Ltd クリ−ンル−ム内の荷保管設備

Also Published As

Publication number Publication date
JPS62121102A (ja) 1987-06-02

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